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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Other semiconductor manufacturing equipment
  6. Non-contact chuck "Float Chuck SA Type"

Non-contact chuck "Float Chuck SA Type"

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Non-contact chuck "Float Chuck WA Type"

last updated:Apr 13, 2021

ソーラーリサーチ研究所 大阪事業所
ソーラーリサーチ研究所 大阪事業所
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Bernoulli chuck with air consumption reduced to one-third of the conventional amount.

Transport the workpiece non-contact. The air consumption is one-third of the conventional amount. The holding force is strong. It has excellent holding stability.

    Other semiconductor manufacturing equipmentPlasma GeneratorChuck
wa-2cMac-tec.jpg

Non-contact chuck "Float Chuck SA Type"

wa-2cMac-tec.jpg
wa-2cMac-tec.jpg
  • Related Link - http://www.solarlab.co.jp/sac1

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basic information

By ejecting gas, it generates negative pressure through the ejector effect and Bernoulli effect, and positive pressure through the pressure-type air cushion effect, allowing the workpiece to be suspended and transported in a non-contact state. It is a Bernoulli chuck. The newly developed non-contact pad "Float Chuck SA Series" consumes one-third the amount of air compared to conventional products.

Price information

-

Delivery Time

P3

Applications/Examples of results

Non-contact chuck "Float Chuck SA type" suspends and transports the workpiece in a non-contact state by generating negative pressure through the ejector effect and Bernoulli effect by ejecting gas, as well as generating positive pressure through a pressure-type air cushion effect. It is a Bernoulli chuck. The newly developed SA type series consumes one-third the amount of air compared to conventional products. ◎ Achievements Semiconductor wafers LCD glass Lenses Ceramic substrates Metal plates Others

Company information

ソーラーリサーチ研究所

ソーラーリサーチ研究所 大阪事業所

Electronic Components and Semiconductors

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Manufacturing of non-contact transport devices and application devices for wafers, liquid crystal glass substrates, PDPs, ceramics, printed circuit boards, FPC substrates, films, paper, cloth, etc., using our patented non-contact transport device "Float Chuck" based on the vertical gas jet method developed by our company.

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