Capable of atmosphere processing! An IR furnace that can also handle severe clean environments.
It is a single-wafer IR furnace. 【Features】 ◆ High-level cleanliness With a clean structure that does not generate self-dust, it has high cleanliness performance. It can also handle processing of array substrates that require a stringent clean environment. ◆ High heating efficiency Adopting an infrared (IR) heating method with excellent heating efficiency, it enables high-efficiency processing for various film thicknesses. It is optimal for processing thick films such as orientation films and passivation films. ◆ Excellent temperature uniformity Equipped with IR panel heaters that excel in temperature uniformity, it can provide uniform heating even for large substrates such as 10th generation. ◆ Atmosphere processing capability It is possible to introduce nitrogen gas into the furnace for heating treatment at low oxygen concentrations.
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basic information
It is a single-wafer infrared (IR) furnace. 【Features】 ◆ High-level cleanliness With a clean structure that does not generate self-dust, it possesses high cleanliness performance. It can also handle the processing of array substrates that require a stringent clean environment. ◆ High heating efficiency Adopting an infrared (IR) heating method with excellent heating efficiency, it enables high-efficiency processing for various film thicknesses. It is optimal for processing thick films such as orientation films and passivation films. ◆ Excellent temperature uniformity Equipped with an IR panel heater that excels in temperature uniformity, it can provide uniform heating even for large substrates such as 10th generation. ◆ Atmosphere processing capability It is possible to introduce nitrogen gas into the furnace for heating treatment at low oxygen concentrations.
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Applications/Examples of results
◆ Firing of orientation film ◆ Annealing ◆ Firing of passivation film ◆ Seal full curing / partial curing
Company information
JTEKT Thermo System started its business by manufacturing and selling heat treatment equipment for bearing materials. Since then, it has quickly responded to technological innovations and changes in industrial structures, and has been engaged in the development of various manufacturing equipment, not only for metals but also for semiconductors, electronic components, displays, and more.
