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  6. Ultra-high purity gas mini purifier

Ultra-high purity gas mini purifier

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GP/GPF Series

last updated:Jun 20, 2012

ピー・ジェイ
ピー・ジェイ
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It does not cause the generation of particles or chemical reactions due to corrosion.

This is a gas purifier manufactured by Pureon Japan Co., Ltd. At the use point, it removes impurities such as moisture, oxygen, and hydrocarbons contained in inert gases and special gases to a maximum of 1 PPB or less, depending on the conditions. All filter media for coarse filtration are made of SUS316L as standard. There is also a compact and lightweight type with a spacing of 84 mm and weighing 120 g. By reactivating it through baking at temperatures between 350°C and 400°C, depending on the type of gas, it can be reused repeatedly until its full lifespan.

    CVD EquipmentSemiconductor inspection/test equipmentOther semiconductor manufacturing equipment
GP,GPFシリーズ.jpg

Ultra-high purity gas mini purifier

GP,GPFシリーズ.jpg
GP,GPFシリーズ.jpg

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basic information

【Features】 ○ The purification capability for individual impurities is below 1 PPB, and the total impurities on the outlet side is below 10 PPB (depending on conditions). ○ The flow rate range is 0.5 to 20 LPM (varies by model and pressure conditions). ○ The maximum operating pressure is 0.97 MPa (140.65 PSIG). ● For more details, please contact us or refer to the catalog.

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Semiconductor manufacturing gas lines, gas cabinets, semiconductor manufacturing equipment, etc.

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ピー・ジェイ

ピー・ジェイ

Electronic Components and Semiconductors

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PJ Corporation was established as the general sales agent for Pureon Japan Co., Ltd. PJ Corporation will do its utmost to promote Pureon products worldwide. Products handled: 1. All products from Pureon Japan Co., Ltd. - Ceramic gas filters - Metal gas filters - Hastelloy gas filters - PTFE gas filters - Hybrid filters - Gas purifiers - Heaters - Liquid filters - Pressure sensors - Display devices - Temperature sensors - Differential pressure gauges - Resistivity meters - Digital flow control systems 2. Fluid control equipment parts for semiconductor manufacturing equipment and general industrial machinery.

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