Excimer laser pulse deposition system
At AOV, we handle a variety of customized vacuum deposition equipment to meet the diverse needs of our customers. The vacuum equipment offered by AOV is broadly divided into physical vapor deposition (PVD) and chemical vapor deposition (CVD) methods. The equipment using the PVD method includes: * PLD (Pulsed Laser Deposition) equipment * Magnetron Sputtering equipment * EB (Electron Beam) Deposition equipment * Ion Beam Assisted Deposition (IBAD) method and we offer various types of equipment along with those using the CVD method. Our technology features high-temperature substrate heating under high ambient gas conditions (such as oxygen, nitrogen, argon, etc.) and stable drive control mechanisms at high temperatures, which have received positive feedback. For more detailed product information, please visit our website.
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basic information
Thin film fabrication technology is applied in various fields such as high-temperature superconductors, ferroelectrics, semiconductors, and FPDs. The Pulsed Laser Deposition (PLD) method has characteristics that allow it to be used under conditions and for materials that cannot be processed by other techniques in the physical vapor deposition (PVD) category. Among them, excimer lasers are one of the most suitable laser oscillators, characterized by their high output.
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Applications/Examples of results
Various manufacturers, universities, and government agencies.
Company information
We provide customized systems tailored to the usage needs of our customers, such as basic research and manufacturing development, which are utilized by various companies and research institutions. Focusing on in-house design and manufacturing at our Nishihachioji factory, we respond quickly not only to maintenance and repairs but also to backup for replacement and consumable parts. From small PLDs for basic research to large PLDs using high-output lasers for manufacturing purposes, we manufacture and provide the entire system of lasers, optical systems, and film deposition equipment. ■ Provision of PLD systems compatible with high oxygen atmospheres and high-temperature environments ■ Selection of models and proposals for optical systems based on the characteristics of various lasers such as excimer lasers and Nd:YAG lasers ■ Customized design and manufacturing according to film materials and applications ■ Comprehensive proposals for necessary peripheral equipment and safety measures.
