Gantry-type 4-axis stage
XY-axis stage driven by a linear motor on a stone base plate, equipped with a Z-axis unit driven by a ball screw on a gantry frame, forming a compact XYZ stage. 【Features】 ○ The Z-axis can accommodate imaging equipment such as microscopes, making it ideal for inspection processes up to 300mm in size. ○ Compared to a standard 4-axis unit, the height of the high-precision X-Y-θ axes can be kept low through linear drive, resulting in no table shake and excellent uniformity even during high-speed movement. ● For other functions and details, please download the catalog.
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basic information
XY axis stage driven by a linear motor on a stone base plate, equipped with a Z axis unit driven by a ball screw on a gantry frame, forming a compact XYZ stage. 【Features】 ○ The Z axis can accommodate imaging equipment such as microscopes, making it ideal for inspection processes up to 300mm in size. ○ Compared to conventional 4-axis units, the height of the high-precision X-Y-θ axes can be kept low through linear drive, resulting in no table shake and excellent uniformity even during high-speed movement. ● For other functions and details, please download the catalog.
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Company information
Leveraging our experience in the development of semiconductor-related equipment, we established a company with a small team of production technology experts to undertake development tasks that are difficult for large corporations to accomplish in a short period of time, while also focusing on cost performance. Our motivation is to utilize our ideas to enter the market, promote Japanese production that can compete globally, and revive the declining "manufacturing Japan." We are challenging ourselves to develop and supply precision slide mechanisms that can respond to low costs and short delivery times, which large companies are unable to achieve.