List of Machine elements products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

Compact piezo stage with a minimum resolution of 0.1 nm - for micro scanning under a microscope.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Compact piezo stage with a minimum resolution of 0.1 nm and a maximum stroke of 38 µm.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Compact piezo stage with a minimum resolution of 0.1 nm and a maximum stroke of 38 µm.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Compact piezo stage with a minimum resolution of 0.1 nm and a maximum stroke of 38 µm.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Compact piezo stage with a minimum resolution of 0.1 nm - for micro-positioning under a microscope.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Compact piezo stage with a minimum resolution of 0.1 nm and a maximum stroke of 38 µm.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

15–38 µm stroke, 0.1 nm resolution, compact high-speed response piezo stage

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

High-precision Z-focus scanner for semiconductor inspection equipment with sub-nanometer resolution and maximum 800 µm stroke capability.

• Other machine elements
• Actuator
• Piezoelectric Devices

Sub-nanometer resolution, compatible with maximum 800 µm stroke, high-speed and high-precision PIFOC focus scanner.

• Other machine elements
• Actuator
• Piezoelectric Devices

Sub-nanometer resolution, Z-direction maximum stroke of 800 µm, equipped with a flexure mechanism focus scanner.

• Other machine elements
• Actuator
• Piezoelectric Devices

Sub-nanometer resolution, focus scanner P-725.xCDE2 with a maximum movement of 800 µm.

• Other machine elements
• Actuator
• Piezoelectric Devices

Sub-nanometer resolution, maximum operation of 800 µm, high-speed and high-precision PIFOC(R) focus scanner.

• Other machine elements
• Actuator
• Piezoelectric Devices

100 µm stroke, sub-nanometer resolution, high-response focus scanner at 560 Hz with a load of 210 g.

• Actuator
• Piezoelectric Devices
• encoder

100 µm stroke, 0.4 nm resolution, compatible with high-load objective lenses, high-speed and high-precision PIFOC focus scanner.

• Actuator
• Piezoelectric Devices
• encoder

High-load compatible sub-nanometer resolution focus scanner supporting nano-structure analysis

• Actuator
• Piezoelectric Devices
• encoder