List of Semiconductor Manufacturing Equipment products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

Surface grinding is possible without removing the roll! It keeps the roll surface in optimal condition.

• Wafer processing/polishing equipment

IPA steam cleaning and drying equipment! Achieving clean drying for devices, wafers, glass, and parts!

• Wafer processing/polishing equipment
• Other semiconductor manufacturing equipment
• High pressure cleaner

Batch cleaning equipment utilizing cleaning technology and transport/control technology, compatible with various chemical solutions!

• Wafer processing/polishing equipment
• Other semiconductor manufacturing equipment
• High pressure cleaner

1-inch UHV-compatible sputter cathode with 2 sources! The load lock chamber can be expanded!

• Sputtering Equipment

Easy maintenance and workability! The lift-off film formation mechanism employs a special heat insulation mechanism!

• Evaporation Equipment

You can attach and detach the bell jar inside the glove box, and exchange or replenish the substrate and deposition materials!

• Evaporation Equipment

A research membrane environment that aims to eliminate oxygen and moisture! Supports multilayer membranes, compound membranes, and reactive membranes!

• Sputtering Equipment

The substrate dimensions can accommodate up to 3 pieces with a maximum size of 3 inches! It is equipped with a heating mechanism and a reverse sputtering mechanism!

• Sputtering Equipment

Can be fixed at any position on an arc-shaped rail corresponding to substrate incidence! The deposition position can be adjusted.

• Evaporation Equipment

Equipped with a holder that supports substrate rotation and substrate heating! Continuous film deposition is possible without releasing into the atmosphere!

• Evaporation Equipment

Transport between chambers is achieved by the transfer rod! Continuous film formation is possible without releasing into the atmosphere!

• Evaporation Equipment
• Sputtering Equipment

Custom production is possible according to application from single item prototypes! Lineup includes "EB Gun" and "K Cell"!

• Sputtering Equipment
• Other machine elements

Equipped with an EB source expansion port! Compatible with 4-inch substrates, it features a substrate heating mechanism and a film thickness control mechanism!

• Evaporation Equipment

We will introduce energy semiconductor device research and development systems compatible with φ4-inch substrates!

• Plasma surface treatment equipment
• Sputtering Equipment
• Analytical Equipment and Devices

A compact and space-efficient device! The substrate supports φ4 inch, and it comes with a heating mechanism and T/S variable mechanism!

• CVD Equipment