List of Heating equipment/furnace products

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• Sensors

We can accommodate high resistance over 10,000 ohms, with diameters ranging from approximately 30 mm to 8 inches, and we also offer thinning and chip processing arrangements!

• Other semiconductors
• Processing Contract
• Wafer

Volatile chlorination of GaN, AlN, and Si-based deposits with Cl2/HCl, and dry cleaning of the fixture.

• Industrial Furnace

Chloride metal impurities with Cl2 and HCl, leaving the base material for selective separation.

• Industrial Furnace

Suppressing concerns about degradation and leaks of furnace materials due to corrosive gases, safely examining halogen atmosphere testing.

• Electric furnace

Manage dew point and oxygen concentration to reproducibly evaluate ceramics sintering and densification conditions.

• Industrial Furnace

Support for examining the conditions of chemical reaction processes, including reactive gases and exhaust gas treatment.

• Industrial Furnace

Support for the firing of environmental purification materials and exhaust gas evaluation with atmosphere control such as vacuum, air, and NH3.

• Industrial Furnace

Supports airtight sealing and reliability improvement of semiconductor components in a high vacuum and high purity atmosphere.

• Industrial Furnace

Supports degassing, oxidation prevention, and stabilization of samples before analysis in a high vacuum and high purity atmosphere.

• Industrial Furnace

Support for material development and high-temperature heat treatment in a vacuum and reducing atmosphere.

• Industrial Furnace

Support for sealing, brazing, and heat treatment of optical components in a high-purity atmosphere.

• Industrial Furnace

Supports the development and manufacturing of heat-resistant components for aerospace applications through high-temperature firing at up to 3000℃ in a low-oxygen atmosphere.

• Industrial Furnace

Supports new material development and prototype evaluation with high-temperature firing up to 3000℃ and atmosphere control.

• Industrial Furnace

Supports high-density and sintering of ceramics in a high-temperature firing of up to 3000℃ and low-oxygen atmosphere.

• Industrial Furnace

Supports high-temperature sintering up to 3000℃. Assists in carbonization, graphitization, and debinding processes in a low-oxygen atmosphere.

• Industrial Furnace

For the firing conditions of ESC ceramic components. Contributes to improving the reproducibility of firing quality with an N₂ + H₂ reduction atmosphere and dew point control.

• Industrial Furnace