List of Heating equipment/furnace products
- classification：Heating equipment/furnace
1～45 item / All 4714 items
We provide comprehensive support from design to manufacturing and maintenance!
- Contract manufacturing
It won't break even after 1 million repetitions! A mat switch with reliable operation, high durability, and low price. Suitable for options in machine tools as well. Please consult us about delivery t...
- Sensors
Intuitive operation and precise settings with a dial. Reliable electronic temperature controller supporting high-precision heating control and snow melting.
- Temperature and Humidity Control
- Thermometer
- Other heaters
A snow melting system that uses far-infrared radiation to melt snow! Easy installation on existing walls and poles. Reduces snow removal labor and keeps costs down.
- Other heaters
Meeting various environmental needs! Pursuing the ideal road heating based on half a century of achievements and trust!
- Other heaters
The transformer manufacturer Nikkodenki will exhibit at booth 3-29 at "JECA FAIR 2024, the 72nd Electrical Installation Industry Exhibition (May 29 (Wed) - 31 (Fri), 2024 at Tokyo Big Sight)!"
We are pleased to announce that our company will be exhibiting at the "JECA FAIR 2024, the 72nd Electrical Industry Exhibition," which will be held at Tokyo Big Sight from May 29 (Wednesday) to May 31 (Friday). We kindly invite you to visit our booth during this time, and we sincerely look forward to your attendance despite your busy schedule. Exhibition: "JECA FAIR 2024, the 72nd Electrical Industry Exhibition" (https://www.jecafair.jp/) Date: May 29 (Wednesday) to May 31 (Friday), 2024 Time: 10:00 AM to 5:00 PM (Opening at 10:30 AM on the first day and closing at 4:30 PM on the last day) Location: Tokyo Big Sight, Halls 1, 2, and 3 Address: 3-11-1 Ariake, Koto-ku, Tokyo 135-0063 Booth No.: 3-29 Nikko Electric Co., Ltd. Satellite Akiba Address: 4th Floor, Yuki Building, 23-2 Kanda Higashimatsushita-cho, Chiyoda-ku, Tokyo TEL: 03-3518-5050 FAX: 03-3518-5051
The panel is made of highly durable striped steel plate! It has a non-slip surface treatment!
- Other heaters
The transformer manufacturer Nikkodenki will exhibit at booth 3-29 at "JECA FAIR 2024, the 72nd Electrical Installation Industry Exhibition (May 29 (Wed) - 31 (Fri), 2024 at Tokyo Big Sight)!"
We are pleased to announce that our company will be exhibiting at the "JECA FAIR 2024, the 72nd Electrical Industry Exhibition," which will be held at Tokyo Big Sight from May 29 (Wednesday) to May 31 (Friday). We kindly invite you to visit our booth during this time, and we sincerely look forward to your attendance despite your busy schedule. Exhibition: "JECA FAIR 2024, the 72nd Electrical Industry Exhibition" (https://www.jecafair.jp/) Date: May 29 (Wednesday) to May 31 (Friday), 2024 Time: 10:00 AM to 5:00 PM (Opening at 10:30 AM on the first day and closing at 4:30 PM on the last day) Location: Tokyo Big Sight, Halls 1, 2, and 3 Address: 3-11-1 Ariake, Koto-ku, Tokyo 135-0063 Booth No.: 3-29 Nikko Electric Co., Ltd. Satellite Akiba Address: 4th Floor, Yuki Building, 23-2 Kanda Higashimatsushita-cho, Chiyoda-ku, Tokyo TEL: 03-3518-5050 FAX: 03-3518-5051
Snow removal measures for structures! The future snow melting system that melts snow with infrared radiation.
- Other heaters
The transformer manufacturer Nikkodenki will exhibit at booth 3-29 at "JECA FAIR 2024, the 72nd Electrical Installation Industry Exhibition (May 29 (Wed) - 31 (Fri), 2024 at Tokyo Big Sight)!"
We are pleased to announce that our company will be exhibiting at the "JECA FAIR 2024, the 72nd Electrical Industry Exhibition," which will be held at Tokyo Big Sight from May 29 (Wednesday) to May 31 (Friday). We kindly invite you to visit our booth during this time, and we sincerely look forward to your attendance despite your busy schedule. Exhibition: "JECA FAIR 2024, the 72nd Electrical Industry Exhibition" (https://www.jecafair.jp/) Date: May 29 (Wednesday) to May 31 (Friday), 2024 Time: 10:00 AM to 5:00 PM (Opening at 10:30 AM on the first day and closing at 4:30 PM on the last day) Location: Tokyo Big Sight, Halls 1, 2, and 3 Address: 3-11-1 Ariake, Koto-ku, Tokyo 135-0063 Booth No.: 3-29 Nikko Electric Co., Ltd. Satellite Akiba Address: 4th Floor, Yuki Building, 23-2 Kanda Higashimatsushita-cho, Chiyoda-ku, Tokyo TEL: 03-3518-5050 FAX: 03-3518-5051
Corresponding to the full liberalization of electricity, we offer snow melting power contracts! Non-polluting and can be installed in various locations.
- Other heaters
The transformer manufacturer Nikkodenki will exhibit at booth 3-29 at "JECA FAIR 2024, the 72nd Electrical Installation Industry Exhibition (May 29 (Wed) - 31 (Fri), 2024 at Tokyo Big Sight)!"
We are pleased to announce that our company will be exhibiting at the "JECA FAIR 2024, the 72nd Electrical Industry Exhibition," which will be held at Tokyo Big Sight from May 29 (Wednesday) to May 31 (Friday). We kindly invite you to visit our booth during this time, and we sincerely look forward to your attendance despite your busy schedule. Exhibition: "JECA FAIR 2024, the 72nd Electrical Industry Exhibition" (https://www.jecafair.jp/) Date: May 29 (Wednesday) to May 31 (Friday), 2024 Time: 10:00 AM to 5:00 PM (Opening at 10:30 AM on the first day and closing at 4:30 PM on the last day) Location: Tokyo Big Sight, Halls 1, 2, and 3 Address: 3-11-1 Ariake, Koto-ku, Tokyo 135-0063 Booth No.: 3-29 Nikko Electric Co., Ltd. Satellite Akiba Address: 4th Floor, Yuki Building, 23-2 Kanda Higashimatsushita-cho, Chiyoda-ku, Tokyo TEL: 03-3518-5050 FAX: 03-3518-5051
A comfortable winter free from the struggles of snow shoveling! Easy and effortless one-touch operation for anyone!
- Other heaters
The transformer manufacturer Nikkodenki will exhibit at booth 3-29 at "JECA FAIR 2024, the 72nd Electrical Installation Industry Exhibition (May 29 (Wed) - 31 (Fri), 2024 at Tokyo Big Sight)!"
We are pleased to announce that our company will be exhibiting at the "JECA FAIR 2024, the 72nd Electrical Industry Exhibition," which will be held at Tokyo Big Sight from May 29 (Wednesday) to May 31 (Friday). We kindly invite you to visit our booth during this time, and we sincerely look forward to your attendance despite your busy schedule. Exhibition: "JECA FAIR 2024, the 72nd Electrical Industry Exhibition" (https://www.jecafair.jp/) Date: May 29 (Wednesday) to May 31 (Friday), 2024 Time: 10:00 AM to 5:00 PM (Opening at 10:30 AM on the first day and closing at 4:30 PM on the last day) Location: Tokyo Big Sight, Halls 1, 2, and 3 Address: 3-11-1 Ariake, Koto-ku, Tokyo 135-0063 Booth No.: 3-29 Nikko Electric Co., Ltd. Satellite Akiba Address: 4th Floor, Yuki Building, 23-2 Kanda Higashimatsushita-cho, Chiyoda-ku, Tokyo TEL: 03-3518-5050 FAX: 03-3518-5051
A high-performance automatic control system that achieves reliable road surface management and energy-saving driving.
- Temperature and Humidity Control
- Control Panel
- Other heaters
It is also possible to connect multiple mats to a single power source for installation! Since it is an add-on, it is easy to install!
- Other heaters
The transformer manufacturer Nikkodenki will exhibit at booth 3-29 at "JECA FAIR 2024, the 72nd Electrical Installation Industry Exhibition (May 29 (Wed) - 31 (Fri), 2024 at Tokyo Big Sight)!"
We are pleased to announce that our company will be exhibiting at the "JECA FAIR 2024, the 72nd Electrical Industry Exhibition," which will be held at Tokyo Big Sight from May 29 (Wednesday) to May 31 (Friday). We kindly invite you to visit our booth during this time, and we sincerely look forward to your attendance despite your busy schedule. Exhibition: "JECA FAIR 2024, the 72nd Electrical Industry Exhibition" (https://www.jecafair.jp/) Date: May 29 (Wednesday) to May 31 (Friday), 2024 Time: 10:00 AM to 5:00 PM (Opening at 10:30 AM on the first day and closing at 4:30 PM on the last day) Location: Tokyo Big Sight, Halls 1, 2, and 3 Address: 3-11-1 Ariake, Koto-ku, Tokyo 135-0063 Booth No.: 3-29 Nikko Electric Co., Ltd. Satellite Akiba Address: 4th Floor, Yuki Building, 23-2 Kanda Higashimatsushita-cho, Chiyoda-ku, Tokyo TEL: 03-3518-5050 FAX: 03-3518-5051
Would you like to reduce labor costs by simplifying the gasket replacement process with a clinker-made gasket that is less likely to stick to the flange?
- Industrial Furnace
- Pipe Fittings
- Piping Materials
Leave the sintering and pre-sintering of industrial chemical raw materials such as functional materials, electronic materials, and powder mixed materials to us.
- Contract manufacturing
- Processing Contract
- Industrial Furnace
Vacuum Ultra-High Temperature Cylindrical Heater Unit Maximum Temperature 1800°C (Graphite, C/C Composite)
- Ceramic Heater
◇◆◇ nanoPVD-S10A Magnetron Sputtering Device ◇◆◇
This is an RF/DC magnetron sputtering device for research and development. Despite its high performance and multifunctionality, it fits into the limited space of a laboratory with its compact size and easy operation via a 7-inch front touch panel. ● Achievable pressure: 5x10^-5 Pa (*fastest 30 minutes up to 1x10^-4 Pa!) ● Film uniformity: ±3% ● Various options: up/down rotation, heater, cathode for magnetic materials, and more ● 3-source cathode + 3 MFC systems, with additional RF/DC power supply, allowing for versatile applications such as multilayer films and simultaneous deposition. - Insulating films - Conductive films - Compounds, etc. 【Main Features】 ◉ Compatible substrates: 2" (up to 3 sources) or 1" (1 source) ◉ 2" cathode x up to 3 sources ◉ Easy operation via touch panel with PLC automatic program control ◉ MFC high-precision APC automatic process pressure control ◉ Up to 3 MFC systems ◉ USB port for Windows PC connection, capable of creating and saving recipes for up to 1000 layers and 50 films. Live data logging on PC. ◉ Vacuum system: TMP + RP (*dry pump option) ◉ Substrate rotation, up/down elevation, heating (Max 500℃) ◉ Quartz crystal film thickness monitor/controller
![[Nanofurnace] BWS-NANO Thermal CVD ...](https://image.mono.ipros.com/public/product/image/0d0/2000191194/IPROS99314670218218380543.jpeg?w=280&h=280){kind=small}
Hot Wall Type Thermal CVD Equipment: A compact, high-performance CVD device ideal for fundamental research.
- CVD Equipment
- Annealing furnace
- Heating device
◇◆◇ nanoPVD-S10A Magnetron Sputtering Device ◇◆◇
This is an RF/DC magnetron sputtering device for research and development. Despite its high performance and multifunctionality, it fits into the limited space of a laboratory with its compact size and easy operation via a 7-inch front touch panel. ● Achievable pressure: 5x10^-5 Pa (*fastest 30 minutes up to 1x10^-4 Pa!) ● Film uniformity: ±3% ● Various options: up/down rotation, heater, cathode for magnetic materials, and more ● 3-source cathode + 3 MFC systems, with additional RF/DC power supply, allowing for versatile applications such as multilayer films and simultaneous deposition. - Insulating films - Conductive films - Compounds, etc. 【Main Features】 ◉ Compatible substrates: 2" (up to 3 sources) or 1" (1 source) ◉ 2" cathode x up to 3 sources ◉ Easy operation via touch panel with PLC automatic program control ◉ MFC high-precision APC automatic process pressure control ◉ Up to 3 MFC systems ◉ USB port for Windows PC connection, capable of creating and saving recipes for up to 1000 layers and 50 films. Live data logging on PC. ◉ Vacuum system: TMP + RP (*dry pump option) ◉ Substrate rotation, up/down elevation, heating (Max 500℃) ◉ Quartz crystal film thickness monitor/controller
High-temperature crucible heating heater for vacuum use. A versatile heater unit that can be used as an organic deposition source at 800°C and a metal deposition source at 1500°C.
- Evaporation Equipment
- Heating device
- Electric furnace
◇◆◇ nanoPVD-S10A Magnetron Sputtering Device ◇◆◇
This is an RF/DC magnetron sputtering device for research and development. Despite its high performance and multifunctionality, it fits into the limited space of a laboratory with its compact size and easy operation via a 7-inch front touch panel. ● Achievable pressure: 5x10^-5 Pa (*fastest 30 minutes up to 1x10^-4 Pa!) ● Film uniformity: ±3% ● Various options: up/down rotation, heater, cathode for magnetic materials, and more ● 3-source cathode + 3 MFC systems, with additional RF/DC power supply, allowing for versatile applications such as multilayer films and simultaneous deposition. - Insulating films - Conductive films - Compounds, etc. 【Main Features】 ◉ Compatible substrates: 2" (up to 3 sources) or 1" (1 source) ◉ 2" cathode x up to 3 sources ◉ Easy operation via touch panel with PLC automatic program control ◉ MFC high-precision APC automatic process pressure control ◉ Up to 3 MFC systems ◉ USB port for Windows PC connection, capable of creating and saving recipes for up to 1000 layers and 50 films. Live data logging on PC. ◉ Vacuum system: TMP + RP (*dry pump option) ◉ Substrate rotation, up/down elevation, heating (Max 500℃) ◉ Quartz crystal film thickness monitor/controller
FiberMax (Alumina Fiber) - High heat-resistant lightweight insulation board utilizing the properties of PCW (Polycrystalline Fiber).
- Ceramics
- fiber
- Industrial Furnace
Fundamental to applied technologies using thermal/non-thermal processes.
- Technical and Reference Books
- Other process controls
- Heating device
Introducing the latest lineup of hydrogen gas burners and low-carbon equipment! 【Thermal Technology 2024】 (October 10-11, Grand Front Osaka)
- Heating device
- Industrial Furnace
- Drying Equipment
【Exhibition Information】Coating Japan - High-Performance Materials Week - Paint and Coating Equipment Exhibition
We are pleased to announce that Shoei Seisakusho, a manufacturer of gas burners and industrial furnaces, will be exhibiting at the "Coating and Painting Equipment Exhibition" held at Makuhari Messe. We will showcase a lineup of heat-generating devices for painting drying equipment, as well as deodorization devices (VOC removal devices) in a panel display. We will also introduce examples of energy-saving equipment and decarbonization items using hydrogen gas burners. ---------------------- The Coating and Painting Equipment Exhibition - COATING JAPAN - is a specialized exhibition where functional coatings, painting equipment, and surface treatment technologies are all presented together. ----------------------
The Lechler 490/491 model, with its unique structure and patented design, is a high flow type that is resistant to clogging and maintains a consistent spray angle despite pressure fluctuations.
- Industrial Furnace
- Other powder equipment
- valve
The website of the long-established German nozzle manufacturer, Lechler, has been renewed.
The website of Lechler, the number one nozzle manufacturer in Europe (Germany), has been renewed. You can access industrial spray nozzles (general, environmental, steel) and agricultural spray nozzles from the homepage. Please take a moment to visit the following URL if you have the time.
A heater that warms up drums and other containers to reduce the viscosity of liquids.
- Other heaters
- Heater
Nikkankogyo Shimbun January 30, 2025 Issue Announcement of Advertisements and Articles Published
We have an advertisement and article published in the January 30, 2025 issue of the Nikkan Kogyo Shimbun. The article titled "The No. 1 Top Manufacturer of High-Performance Drum Pumps and Air Equipment for Factory and On-Site Operations" features our electric drum pumps for kerosene and light oil (TDP1 series), dedicated circulation filtration for cutting fluids (J-F series), liquid management solutions (sensor-type liquid level gauges, air-type liquid level gauges, laser-type liquid level gauges), air and electric drum pumps for thinners, acetone, and alcohol (CHD1 series), disaster response solutions (Wing Pump series, EDO series), and liquid heating solutions (HTJ series). Additionally, there is an interview article with our President, Kimura. Please take a look!
Rent an electric furnace with a wide heat distribution area and a temperature control power supply as a set. Payment is based on usage from a period of one month. Click now for more details!
- Electric furnace
A heating solution for mass-producing nanoparticles in a "continuous" manner with uniform particle size.
- Heating device
- Other heating equipment
For those struggling with heat radiation and heat conduction from the furnace! Achieve both extended equipment lifespan and energy savings through proper material selection and precise processing base...
- Industrial Furnace
- Electric furnace
- Heating device
Packing used around furnace equipment, high-performance fiber products requiring tensile strength.
- Heating device
- Industrial Furnace
- Electric furnace
An ideal insulation material that can be used from -190℃ to 1100℃ and exhibits excellent performance.
- Heating device
- Industrial Furnace
- Electric furnace
It has become possible to manufacture high-performance insulation materials flexibly to match costs.
- Industrial Furnace
- Heating device
- Electric furnace
High-temperature heat-resistant shoes with excellent safety and functionality.
- Heating device
- Industrial Furnace
- Safety shoes and sneakers
Experts in high-temperature insulation materials essential for heat treatment! We handle everything from insulation material selection to precision processing. *Free product catalog available (PDF dow...
- Electric furnace
- Heating device
- Industrial Furnace
It is a flexible heater that can meet various needs.
- Industrial Furnace
- Heating device
- Electric furnace
We process all types of insulation boards.
- Industrial Furnace
- Electric furnace
- Heating device
If you have any issues with the near-infrared lamp heater, please consult us first.
- Heating device
- Other heaters
Maximum operating temperature 2000℃ Semi-automatic control Ultra-high temperature experimental furnace (carbon furnace, tungsten metal furnace) Compact and space-saving experimental furnace
- Heating device
- Annealing furnace
- Electric furnace
【MiniLab-125】 Multi-target sputtering system (compatible with Φ8") equipped with a 1000℃ heater stage (SiC coating)! Compact size!
Multifunctional Multi-Sputtering Device (Compatible with Φ8inch Substrates) - Triple-source simultaneous deposition + Single-source Pulse DC sputtering - Flexible arrangement of RF500W and DC850W power supplies to the three-source cathodes (Source 1, 2, 3) - Equipped with a 5KW Pulse DC power supply → Used with dedicated cathode (4) - Substrate heating stage Max 800℃ (SiC-coated heater can achieve Max 1000℃) - MFC x 3 systems (Ar, O2, N2) for reactive sputtering - Main chamber RIE etching stage RF300W - LL chamber <30W low-power controlled soft etching - Unique "Soft-Etching" technology reduces substrate damage through substrate bias - Touch panel or Windows PC operation: All operations can be performed via touch panel/PC without dispersing control. - Equipment installation dimensions: 1,960(W) x 1,100(D) x 1,700(H) mm - Multi-chamber configurations are also possible. ● Mixed specifications for resistance heating deposition, organic material deposition, EB deposition, PECVD, etc., can also be configured.
Tabletop small-sized experimental furnace - space-saving, with a maximum operating temperature of 2000°C! We also manufacture metal furnaces for reducing atmospheres.
- Heating device
- Electric furnace
- Other heaters
◇◆◇ nanoPVD-S10A Magnetron Sputtering Device ◇◆◇
This is an RF/DC magnetron sputtering device for research and development. Despite its high performance and multifunctionality, it fits into the limited space of a laboratory with its compact size and easy operation via a 7-inch front touch panel. ● Achievable pressure: 5x10^-5 Pa (*fastest 30 minutes up to 1x10^-4 Pa!) ● Film uniformity: ±3% ● Various options: up/down rotation, heater, cathode for magnetic materials, and more ● 3-source cathode + 3 MFC systems, with additional RF/DC power supply, allowing for versatile applications such as multilayer films and simultaneous deposition. - Insulating films - Conductive films - Compounds, etc. 【Main Features】 ◉ Compatible substrates: 2" (up to 3 sources) or 1" (1 source) ◉ 2" cathode x up to 3 sources ◉ Easy operation via touch panel with PLC automatic program control ◉ MFC high-precision APC automatic process pressure control ◉ Up to 3 MFC systems ◉ USB port for Windows PC connection, capable of creating and saving recipes for up to 1000 layers and 50 films. Live data logging on PC. ◉ Vacuum system: TMP + RP (*dry pump option) ◉ Substrate rotation, up/down elevation, heating (Max 500℃) ◉ Quartz crystal film thickness monitor/controller
Tabletop small-sized experimental furnace - space-saving with a maximum operating temperature of 2000℃! We also manufacture metal furnaces for reducing atmospheres.
- Heating device
- Electric furnace
- Annealing furnace
【MiniLab-125】 Multi-target sputtering system (compatible with Φ8") equipped with a 1000℃ heater stage (SiC coating)! Compact size!
Multifunctional Multi-Sputtering Device (Compatible with Φ8inch Substrates) - Triple-source simultaneous deposition + Single-source Pulse DC sputtering - Flexible arrangement of RF500W and DC850W power supplies to the three-source cathodes (Source 1, 2, 3) - Equipped with a 5KW Pulse DC power supply → Used with dedicated cathode (4) - Substrate heating stage Max 800℃ (SiC-coated heater can achieve Max 1000℃) - MFC x 3 systems (Ar, O2, N2) for reactive sputtering - Main chamber RIE etching stage RF300W - LL chamber <30W low-power controlled soft etching - Unique "Soft-Etching" technology reduces substrate damage through substrate bias - Touch panel or Windows PC operation: All operations can be performed via touch panel/PC without dispersing control. - Equipment installation dimensions: 1,960(W) x 1,100(D) x 1,700(H) mm - Multi-chamber configurations are also possible. ● Mixed specifications for resistance heating deposition, organic material deposition, EB deposition, PECVD, etc., can also be configured.
Maximum operating temperature 2000℃ Semi-automatic control Ultra-high temperature experimental furnace (carbon furnace, tungsten metal furnace) Compact and space-saving experimental furnace
- Heating device
- Annealing furnace
- Electric furnace
Multi-functional Sputtering System 【MiniLab-S060】
4 cathodes with Φ2 inch mounted Simultaneous film formation: 3-component simultaneous film formation (RF 500W or DC 850W) + HiPIMS (PulseDC 5KW) x 1 Power distribution and configuration settings for 4 cathodes can be freely changed from the HMI screen using the plasma relay switch 3 MFC systems (Ar, O2, N2) for reactive sputtering RIE etching stage RF 300W (main chamber) + <30W soft etching (LL chamber) Substrate heating: Max 500℃, 800℃, or 1000℃ (C/C or SiC coat) Substrate rotation and vertical movement (automatically controlled by stepping motor) APC automatic control: Upstream (MFC flow adjustment) or downstream (automatic valve opening adjustment on the exhaust side) Dimensions: 1,120(W) x 800(D) ● Mixed specifications for resistance heating deposition, organic material deposition, EB deposition, PECVD, etc. are also possible.
6 to 8 inch ultra-high temperature wafer annealing equipment, a high-performance machine that widely supports various purposes from research and development to small-scale production.
- Annealing furnace
- Heating device
- Electric furnace
【MiniLab-125】 Multi-target sputtering system (compatible with Φ8") equipped with a 1000℃ heater stage (SiC coating)! Compact size!
Multifunctional Multi-Sputtering Device (Compatible with Φ8inch Substrates) - Triple-source simultaneous deposition + Single-source Pulse DC sputtering - Flexible arrangement of RF500W and DC850W power supplies to the three-source cathodes (Source 1, 2, 3) - Equipped with a 5KW Pulse DC power supply → Used with dedicated cathode (4) - Substrate heating stage Max 800℃ (SiC-coated heater can achieve Max 1000℃) - MFC x 3 systems (Ar, O2, N2) for reactive sputtering - Main chamber RIE etching stage RF300W - LL chamber <30W low-power controlled soft etching - Unique "Soft-Etching" technology reduces substrate damage through substrate bias - Touch panel or Windows PC operation: All operations can be performed via touch panel/PC without dispersing control. - Equipment installation dimensions: 1,960(W) x 1,100(D) x 1,700(H) mm - Multi-chamber configurations are also possible. ● Mixed specifications for resistance heating deposition, organic material deposition, EB deposition, PECVD, etc., can also be configured.
Maximum operating temperature 2000℃ Semi-automatic control Ultra-high temperature experimental furnace (carbon furnace, tungsten metal furnace) Compact and space-saving experimental furnace
- Heating device
◇◆◇ nanoPVD-S10A Magnetron Sputtering Device ◇◆◇
This is an RF/DC magnetron sputtering device for research and development. Despite its high performance and multifunctionality, it fits into the limited space of a laboratory with its compact size and easy operation via a 7-inch front touch panel. ● Achievable pressure: 5x10^-5 Pa (*fastest 30 minutes up to 1x10^-4 Pa!) ● Film uniformity: ±3% ● Various options: up/down rotation, heater, cathode for magnetic materials, and more ● 3-source cathode + 3 MFC systems, with additional RF/DC power supply, allowing for versatile applications such as multilayer films and simultaneous deposition. - Insulating films - Conductive films - Compounds, etc. 【Main Features】 ◉ Compatible substrates: 2" (up to 3 sources) or 1" (1 source) ◉ 2" cathode x up to 3 sources ◉ Easy operation via touch panel with PLC automatic program control ◉ MFC high-precision APC automatic process pressure control ◉ Up to 3 MFC systems ◉ USB port for Windows PC connection, capable of creating and saving recipes for up to 1000 layers and 50 films. Live data logging on PC. ◉ Vacuum system: TMP + RP (*dry pump option) ◉ Substrate rotation, up/down elevation, heating (Max 500℃) ◉ Quartz crystal film thickness monitor/controller