List of Inspection Equipment and Devices products

Reduce the workload from handling heavy objects! Here are five case studies that solved customer challenges! We are also accepting free consultations and tests tailored to your work!

• Other conveying machines

Ideal for micro-machining! Achieves deburring of holes and double-sided machining in one pass, which was difficult with conventional tools!

• Other machine tools

The lower inversion axis allows for vacuum suction of wet wafers! Double-arm clean robot.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

Full-axis 2P stepping motor specifications! Link-type single-arm clean robot.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

Reduce manufacturing costs by increasing the sheet metal ratio and simplifying the structure! Link-type clean robot.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

The hand can be rotated 180 degrees with a stepping motor drive! Link-type clean robot.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

The motor can be equipped with a reduction gear! The controller is a 5-axis specification clean robot.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

High rigidity design enables high-speed transport of third-generation glass substrates! Double-arm clean robot.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

Support for transporting 3rd generation glass substrates! Double-arm clean robot equipped with various sensors.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

High rigidity design enables high-speed transport of glass substrates! ISO Class 2 clean robot.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

Low power consumption under 100W! The transport arm adopts a unique compact and lightweight multi-stage sliding mechanism.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

Significantly contributes to the reduction of CO2 emissions during operation! Ultra-compact clean robot.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

Reduce manufacturing costs with a super simple structure! 4-inch wafer compatible edge grip specification aligner.

• Other inspection equipment and devices
• Other conveying machines

Using a 2-phase stepping motor! Compatible with 5, 6, and 8-inch silicon wafer aligners.

• Other inspection equipment and devices
• Other conveying machines

Equipped with fiber sensors! Tabletop sorter device compatible with 6 and 8-inch aligners.

• Other inspection equipment and devices
• Other conveying machines

Selection of transfer patterns is possible by recipe selection! Tabletop 8-inch wafer compatible sorter device.

• Other inspection equipment and devices
• Other conveying machines

Macro observation of wafer surfaces is also possible! Desktop-type microscope loader compatible with 5 and 6-inch wafers.

• Other inspection equipment and devices
• Substrate transport device (loader/unloader)