List of Piezoelectric Devices products

Reduce the workload from handling heavy objects! Here are five case studies that solved customer challenges! We are also accepting free consultations and tests tailored to your work!

• Other conveying machines

We can accommodate high resistance over 10,000 ohms, with diameters ranging from approximately 30 mm to 8 inches, and we also offer thinning and chip processing arrangements!

• Other semiconductors
• Processing Contract
• Wafer

Ideal for microscope sample positioning with a maximum stroke of 1800µm and excellent accuracy provided by capacitive sensors.

• Other machine elements
• Piezoelectric Devices
• Cartesian Robot

Ideal for cell manipulation and live cell observation. Achieves stable XY positioning with sub-nanometer precision.

• Other machine elements
• Piezoelectric Devices
• Cartesian Robot

Zero-friction flexure guide integrated structure. Improved calibration accuracy with high reproducibility nano-positioning.

• Other industrial robots
• Piezoelectric Devices
• Actuator

Piezo stage with an opening that achieves nano-level adjustments.

• Actuator
• Piezoelectric Devices
• encoder

Nano-level scanning supporting high magnification observation. Z-chip tilt piezo stage with a 66mm aperture.

• Actuator
• Piezoelectric Devices
• encoder

Achieving nano-level Z-chip tilt control. High-precision piezo stage with a 66mm aperture.

• Actuator
• Piezoelectric Devices
• encoder

PIMars XYZ Nano Stage that achieves sample positioning for microscopes with nanometer precision.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

PIMars precision nano stage that achieves probe positioning with sub-nanometer accuracy.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner ideal for transmitted light optical systems.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

Achieving high-precision positioning in semiconductor manufacturing. Quick and accurate alignment operations.

• Actuator
• Piezoelectric Devices
• encoder

Ideal for the field of nanotechnology. A linear stage that achieves both high generation power and sub-nanometer precision.

• Other machine elements
• Actuator
• Piezoelectric Devices

Linear stage for achieving high-precision positioning in cell observation.

• Other machine elements
• Actuator
• Piezoelectric Devices

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner for semiconductor manufacturing equipment.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

For nano-precision scanning of microscope samples. Achieving stable positioning with 0.1nm resolution and high linearity.

• Actuator
• Piezoelectric Devices
• encoder

Sub-nanometer resolution positioning with a 90 µm stroke and 1000 N pressing force, with a microsecond response.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Ultra-high rigidity × sub-nanometer resolution, long lifespan due to moisture resistance.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Motion angle: ±5 mrad (optical ±10 mrad), dynamic & high resolution & high-speed operation due to a resonance frequency of 10 kHz.

• Other industrial robots
• Piezoelectric Devices
• Actuator

Innovating nano positioning with a holding force of up to 800N and a resolution of 5nm.

• Actuator
• Piezoelectric Devices
• Other machine elements

Stroke up to 13mm, ideal for fine adjustments of mirrors and optical elements.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Inertial drive + incremental sensor for long-term stable fine-tuning control.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

3000 N pressing force / 700 N pulling force, 90 µm movement with sub-nanometer resolution, µs response.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

A stroke of 100 µm, a system resolution of 0.4 nm, and a resonance frequency of 560 Hz even at a load of 210 g.

• Actuator
• Piezoelectric Devices
• encoder

15–38 µm stroke, 0.1 nm resolution, compact high-speed response piezo stage

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

High-speed piezo stage with a maximum stroke of 35 µm, a resolution of 0.1 nm, and a load capacity of 10 N.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Reproducibility ±1nm, XY axis 100 µm + Z axis 10 µm stroke, optimal for transmitted light with a 50 mm aperture.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

A high dynamic system with a center opening that suppresses vibration to the limit. It achieves a linear stroke of 100 x 100 μm.

• Actuator
• Piezoelectric Devices
• encoder

Built-in actuator with a maximum speed of 12 mm/s and a driving force of 50 N for nano-positioning operations.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Innovating semiconductor manufacturing with sub-nanometer resolution positioning.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Stabilizing nano-level measurements with 0.1nm resolution and high linearity.

• Actuator
• Piezoelectric Devices
• encoder

Easy nano positioning with 0.1nm resolution and high stability control.

• Actuator
• Piezoelectric Devices
• encoder

0.1 nm resolution and 0.02% linearity. Improved manufacturing and measurement accuracy with sub-nanometer Z-axis control.

• Actuator
• Piezoelectric Devices
• encoder

100 µm × 3 axes. A compact XYZ piezo stage that achieves optical alignment with nanometer precision.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

Compact XYZ piezo stage with 100 µm × 3-axis for supporting nanoscale position control.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

A 100 µm × 3-axis nanopositioner supporting the focus and position control of fine laser processing.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

High-resolution piezo actuator for achieving nano-level positioning.

• Actuator
• Piezoelectric Devices
• encoder

Compact actuator with high holding force, ideal for fine adjustment of mirrors and optical elements.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Long-term stabilization of microscope focus with inertial drive and position feedback.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Compact linear stage suitable for micromanipulation.

• Linear motor
• Actuator
• Piezoelectric Devices

Provides sub-nanometer resolution. 0.1nm resolution and high linearity vertical positioning.

• Actuator
• Piezoelectric Devices
• encoder

For fine position correction of semiconductor devices. 100 µm × 3-axis nanopositioner.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

A compact XYZ piezo stage with a size of 100 µm × 3 axes that supports high magnification observation with nanometer resolution.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

High-resolution piezo actuators that achieve nano-level positioning.

• Actuator
• Piezoelectric Devices
• encoder

High-thrust piezo actuators that achieve nano-level positioning.

• Actuator
• Piezoelectric Devices
• encoder

High-thrust piezo actuators that achieve nano-level positioning.

• Actuator
• Piezoelectric Devices
• encoder

Long-distance nanopositioning PiezoWalk® drive. High resolution and compact design.

• Actuator
• Linear motor
• Piezoelectric Devices