List of Sputtering Equipment products

  • classification:Sputtering Equipment

106~120 item / All 215 items

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Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

  • small-mistcollector.png
  • air conditioning

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Resistance heating evaporation source for the multi-purpose vacuum deposition device HEX system.

  • Sputtering Equipment

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HEX-6 220x220.png

Modular Structure Vacuum Device - Multi-Purpose Vacuum Deposition Device HEX Series - High Expandability & High Maintainability

The 'True Modular Structure' changes the common understanding of vacuum devices. A compact vacuum device with a minimum installation area of 60cm square, which can be introduced with a minimal configuration and allows for flexible changes in structure according to shifts in research direction. Traditionally, vacuum devices had a fixed number and arrangement of ports upon installation, making changes impractical. However, the HEX system, featuring a hexagonal prism-shaped chamber, adopts a groundbreaking 'modular structure' that allows for the number and arrangement of ports to be freely changed by swapping out the panels that make up each side. This enables easy configuration changes and functional expansions, akin to assembling blocks, in response to changes in research direction. ◆ The 'Modular Structure' allows for flexible changes to the system configuration ◆ Supports sputtering, resistance heating deposition, electron beam deposition, and organic deposition ◆ Capable of simultaneous film deposition from multiple sources ◆ Supports sample rotation, heating, and water cooling ◆ Can be equipped with a film thickness monitor ◆ Compact design with a footprint of 60cm x 60cm ◆ Excellent expandability and maintainability ◆ Compatible with glove boxes *Please feel free to contact us for more details.

Multi-purpose vacuum deposition device for HEX system with 1-source and 4-source electron beam deposition sources.

  • Sputtering Equipment

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HEX-6 220x220.png

Modular Structure Vacuum Device - Multi-Purpose Vacuum Deposition Device HEX Series - High Expandability & High Maintainability

The 'True Modular Structure' changes the common understanding of vacuum devices. A compact vacuum device with a minimum installation area of 60cm square, which can be introduced with a minimal configuration and allows for flexible changes in structure according to shifts in research direction. Traditionally, vacuum devices had a fixed number and arrangement of ports upon installation, making changes impractical. However, the HEX system, featuring a hexagonal prism-shaped chamber, adopts a groundbreaking 'modular structure' that allows for the number and arrangement of ports to be freely changed by swapping out the panels that make up each side. This enables easy configuration changes and functional expansions, akin to assembling blocks, in response to changes in research direction. ◆ The 'Modular Structure' allows for flexible changes to the system configuration ◆ Supports sputtering, resistance heating deposition, electron beam deposition, and organic deposition ◆ Capable of simultaneous film deposition from multiple sources ◆ Supports sample rotation, heating, and water cooling ◆ Can be equipped with a film thickness monitor ◆ Compact design with a footprint of 60cm x 60cm ◆ Excellent expandability and maintainability ◆ Compatible with glove boxes *Please feel free to contact us for more details.

Easy discharge operation! Compact design with automatic matching for RF power supply.

  • Sputtering Equipment

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Reduce initial implementation costs and enable high performance through expansion! Upgrade according to the research stage.

  • Sputtering Equipment

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High-precision alignment (within 1μm of the target) is now possible in all directions of X-Y-Z-θx-θy-θz.

  • Sputtering Equipment
  • Semiconductor inspection/test equipment
  • Photomask

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The electron backscatter diffraction method (EBSD) is useful for evaluating the performance of aluminum sputter films and selecting substrate materials.

  • Other metal materials
  • Sputtering Equipment
  • Ceramics

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Supports work widths of 255, 350, 450, 550, 600, and 750 mm!

  • Sputtering Equipment
  • Food Packaging Machinery
  • Beverage Production Equipment

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Ideal for use in clean rooms! It is a fully automatic system for cleaning rolls.

  • Sputtering Equipment
  • Bag making machine/slitter
  • Special labels, etc.

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The ULT roll-to-roll web cleaner device stably removes dust even at a converting production line speed of 300m/min.

  • Sputtering Equipment
  • Bag making machine/slitter
  • Food Packaging Machinery

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Equipped with a heater stage (1000°C)! Usable for various applications from the development process to mass production.

  • Sputtering Equipment

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Introducing the ion beam sputtering device equipped with a maximum of 5 targets (220mm diameter) or 4 targets (300mm diameter)!

  • Sputtering Equipment

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Maximum 200mm diameter substrate! Double ring magnetron (Fraunhofer FEP)

  • Sputtering Equipment

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A multipurpose sputtering device specialized for surface treatment of three-dimensional shaped parts, the entire outer surface, both sides of flat substrates, and film formation on three-dimensional s...

  • Sputtering Equipment
  • Glass
  • fiber

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EUROVAC's VARIAN type low-cost 3keV ion gun

  • Plasma surface treatment equipment
  • Vacuum Equipment
  • Sputtering Equipment

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This device can clean adhesive rolls during maintenance more quickly and efficiently, addressing a challenge that has troubled customers across various industries!

  • Sputtering Equipment

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