List of Stepper products

  • classification:Stepper

1~15 item / All 53 items

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Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

  • small-mistcollector.png
  • air conditioning

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Maximum 50W ultra-high output. LED irradiator as a replacement for mercury lamps. Usable for UV curing, semiconductor inspection equipment, and more.

  • Stepper
  • Other semiconductor manufacturing equipment

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SEMICON Japan 2024 Exhibition

Event Date: December 11 (Wednesday) to December 13 (Friday), 2024 Venue: Tokyo Big Sight, East Exhibition Hall, Hall 7 Featured Products: - Mask aligners, peripheral exposure, high-output LED irradiation devices for steppers - Semiconductor surface inspection equipment - High-spectral camera capable of video recording - Compact spectrometer - LPP-EUV light source - Laser-excited white light source (190–2500nm) - Ultra-high sensitivity CCD camera for VUV and X-ray regions - Plasma source - SC light source (supercontinuum light source)

High-output, high-stability LED light source device. High-power UV output up to 15W, mercury-free, with selectable built-in LEDs.

  • Stepper
  • Other semiconductor manufacturing equipment

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SEMICON Japan 2024 Exhibition

Event Date: December 11 (Wednesday) to December 13 (Friday), 2024 Venue: Tokyo Big Sight, East Exhibition Hall, Hall 7 Featured Products: - Mask aligners, peripheral exposure, high-output LED irradiation devices for steppers - Semiconductor surface inspection equipment - High-spectral camera capable of video recording - Compact spectrometer - LPP-EUV light source - Laser-excited white light source (190–2500nm) - Ultra-high sensitivity CCD camera for VUV and X-ray regions - Plasma source - SC light source (supercontinuum light source)

A high-output, high-stability LED light source device capable of mounting multiple modules of the same wavelength. Maximum high-power UV output of 80W, mercury-free.

  • Stepper
  • Other semiconductor manufacturing equipment

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SEMICON Japan 2024 Exhibition

Event Date: December 11 (Wednesday) to December 13 (Friday), 2024 Venue: Tokyo Big Sight, East Exhibition Hall, Hall 7 Featured Products: - Mask aligners, peripheral exposure, high-output LED irradiation devices for steppers - Semiconductor surface inspection equipment - High-spectral camera capable of video recording - Compact spectrometer - LPP-EUV light source - Laser-excited white light source (190–2500nm) - Ultra-high sensitivity CCD camera for VUV and X-ray regions - Plasma source - SC light source (supercontinuum light source)

Wafer size post-process projection exposure equipment MRS adopts UV-LED light source as the standard light source (enabling reduction of running costs without sacrificing productivity!)

  • MRS.jpg
  • MR S.jpg
  • Stepper

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LED/LD hybrid wave lens: high speed, high production capacity, and high cost performance.

  • 7.jpg
  • 8.jpg
  • Stepper

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High-speed high-resolution laser exposure device

  • Electron beam lithography equipment
  • Other semiconductor manufacturing equipment
  • Stepper

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High-speed semiconductor mask laser drawing device 'ULTRA'

  • Electron beam lithography equipment
  • Photomask
  • Stepper

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High-speed pattern generator

  • Electron beam lithography equipment
  • Other semiconductor manufacturing equipment
  • Stepper

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High-speed maskless aligner capable of fine drawing at 0.6μm.

  • Photomask
  • Stepper

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High-performance laser lithography equipment for research and development.

  • Electron beam lithography equipment
  • Other semiconductor manufacturing equipment
  • Stepper

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