Analytical Equipment Product List and Ranking from 224 Manufacturers, Suppliers and Companies

[Analysis Case] Ginseng - LC/MS/MS Analysis of Herbal Components

Simultaneous analysis of six types of ginsenosides (Rb1, Rc, Rd, Re, Rg1, Rg3)

The main component of Korean ginseng, which is widely used as a herbal medicine, is a saponin called ginsenoside. Ginsenosides are classified based on the way sugars are attached, and currently, about 30 types have been discovered. In this case, we will introduce an example of analyzing ginsenosides using LC/MS/MS. With LC/MS/MS, we confirmed that the double filtering effect of MRM allows for the separation of peaks from six structurally similar compounds, enabling simultaneous qualitative and quantitative analysis.

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[Analysis Case] Evaluation of H Concentration in IGZO Film

It is possible to evaluate the depth distribution of H in the IGZO film with high sensitivity.

IGZO films are materials that are being researched and developed as TFT materials for displays. The carrier concentration changes according to the hydrogen concentration in the IGZO film, leading to variations in electrical characteristics. Therefore, it is necessary to accurately measure the hydrogen concentration in the film for evaluating the device characteristics and reliability of devices using IGZO films. We will introduce a case study that evaluated the hydrogen concentration in IGZO films under different heating conditions using SIMS.

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[Analysis Case] Evaluation of Ti Diffusion into IGZO Film

Measurement avoiding the influence of high concentration layers using SSDP-SIMS.

IGZO films are materials that are being researched and developed as TFT materials for displays. There are concerns that the diffusion of metal elements into the IGZO film may degrade the TFT characteristics, so it is necessary to accurately measure the metal concentration within the film for evaluating the device characteristics and reliability using IGZO films. We will introduce a case where the Ti concentration in the IGZO film was evaluated from the opposite side of the metal electrode using SSDP-SIMS.

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[Analysis Case] Analysis of Microscopic Contaminants on Wafer Surface

Composition analysis of 30nm size is possible without processing.

AES analysis is a method for obtaining compositional information from the surface down to a depth of several nanometers, and it is an effective analysis for investigating the composition of contaminants and foreign substances that occur on the surface during the manufacturing process. Since it rarely detects information about the substrate or base material, it allows for a simple examination of only the abnormal areas, such as foreign substances, without preprocessing. Additionally, by conducting surface analysis, it is possible to obtain elemental distribution images. In this case study, we will present data evaluated using AES analysis regarding foreign substances present on a Si wafer.

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[Analysis Case] Simultaneous Analysis of 17 Free Amino Acids

High-sensitivity and selective amino acid analysis is possible using the OPA post-column method.

The OPA post-column method is a technique that reacts amino acids with the fluorescent reagent OPA after separation in a column and detects the fluorescence (Figures 1, 2). This method allows for high-sensitivity analysis compared to the ninhydrin method. The fluorescent reagent OPA selectively reacts with primary amines, making it less susceptible to interference from contaminants and enabling highly selective analysis. Proline is a secondary amino acid, but it can be converted into a primary amine by adding sodium hypochlorite to the reaction solution, allowing for measurement. This document presents a case study of simultaneous measurement of 17 amino acid components, including proline (Figure 3).

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[Analysis Case] Fluorescent X-ray Analysis Case of Metal Materials

As a metal composition evaluation, we recommend starting with elemental screening using XRF analysis.

When conducting elemental analysis, it is possible to establish an efficient evaluation plan by first using XRF analysis to non-destructively examine the elements contained in the target before moving on to detailed analysis. In this case, we present data from XRF analysis conducted on blades for metal cutting. By performing surface analysis over a wide range on the order of millimeters, we roughly examined the distribution of metallic elements in the material and estimated the metal composition by calculating the elemental composition from the XRF point analysis results of characteristic areas. Measurement method: XRF Product field: Manufacturing equipment, parts, daily necessities Analysis purpose: Composition evaluation, identification, composition distribution evaluation, failure analysis, defect analysis For more details, please download the materials or contact us.

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[Analysis Case] Analysis of Smartphone Sealants by Pyrolysis GC/MS

Analysis of UV-curable materials is possible through two-stage heating.

Using a two-stage heating method with thermal decomposition GC/MS, we analyzed the material of the sealing agent around the display of commercially available smartphones. By heating the sample at a low temperature (250°C) and measuring the gas components generated using GC/MS, we can detect residual monomers and low molecular weight additives (polymerization initiators, antioxidants). Subsequently, by heating at a high temperature (550°C), we can decompose the polymers and estimate their constituent components. This revealed that the sealing agent is made of a UV-curable material.

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[Analysis Case] Investigation of Contamination Causes on Silicon Wafers

Evaluation of contamination originating from gloves

In semiconductor device manufacturing, it is necessary to investigate what causes thin deposits that lead to defects in order to examine contamination processes. An analysis was conducted using TOF-SIMS on the deposits for which carbon was detected by EDX and quantified by XPS. When compared to the gloves used for standard samples in each process, similar trends were observed with gloves A and B. Furthermore, verification was performed by adhering the standard sample gloves to silicon wafers. As a result, it was found that they were similar to glove A. Adhering standard samples to silicon wafers for verification is an effective method.

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[Analysis Case] Analysis of Additive Components in Polymer Films

Surface and depth distribution evaluation of additives in the film using GCIB.

Food wrap films may use additives to ensure stability against thermal exposure during the manufacturing process and to impart plasticity. These additives are required to remain stable under cooking conditions without changing. In this case, we present the results of an investigation using TOF-SIMS to examine whether the state of one of the additives, Irgafos168, changes (bleeds out) before and after heating. *GCIB: Gas Cluster Ion Beam

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[Analysis Case] High-Precision Quantification of the sp2/(sp2+sp3) Ratio of DLC Films

High-precision analysis using XAFS

DLC (diamond-like carbon) films, which are widely used as coating materials in various fields, are composed of a mixture of carbon elements with sp3 hybrid orbitals corresponding to a diamond structure and carbon elements with sp2 hybrid orbitals corresponding to a graphite structure when viewed from a microscopic perspective. One indicator that determines the properties of DLC films is the sp2/(sp2+sp3) ratio. High-precision quantification of the sp2/(sp2+sp3) ratio in DLC films is possible using XAFS.

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[Analysis Case] Analysis of Evolved Gases during High-Temperature Heating in Air by Pyrolysis GC/MS

It is possible to track the thermal decomposition behavior in the presence of oxygen.

The decomposition behavior of materials when heated in a vacuum or in inert gases such as nitrogen can differ from that when heated in air. Therefore, when conducting gas emission analysis, it is desirable to heat the materials in an environment that closely resembles the actual conditions to which they are exposed. In this case, a comparison of the gases emitted during the pyrolysis of polystyrene at 550°C in helium and in air was conducted. Only hydrocarbon compounds were detected in helium, whereas reaction products with oxygen, such as benzaldehyde, were also detected in air.

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[Analysis Case] Residue Analysis of Cotton Swabs with Ethanol

Analysis of stains and cleaning residues that are not visible under an optical microscope is possible using TOF-SIMS.

In general, to remove dirt, a cotton swab may be dipped in ethanol and used for wiping. When the surface of a Si wafer was wiped with a cotton swab dipped in ethanol, an analysis was conducted using TOF-SIMS to determine what was distributed on the surface. The Si wafer wiped with the cotton swab showed stains that were not visible under an optical microscope, and it was found that these were due to the cotton swab. TOF-SIMS is effective for analyzing stains that are not visible under an optical microscope and for cleaning residues.

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[Analysis Case] Qualitative Analysis of Powder Contaminants

By combining techniques, it is possible to obtain multiple types of component information.

In the analysis of foreign substances, it is important to appropriately select the analytical methods based on the size of the foreign substance, the expected materials, and the condition of the substrate. By combining techniques such as optical microscopy, elemental analysis (XRF), and bonding state analysis (XRD, FT-IR), it is possible to gain insights into the multiple components contained in the powder. This document presents examples of qualitative analysis of powder foreign substances using the aforementioned methods.

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[Analysis Case] Evaluation of Composition Distribution in Bone Cross-Sections

Visualization of the composition distribution of mouse tibial cross-sections using TOF-SIMS.

To evaluate the component distribution in mouse tibia, we prepared tibial sections and conducted imaging analysis using TOF-SIMS. The distribution of components derived from mice, such as K, Ca, calcium phosphate, and phospholipids, was confirmed. Since TOF-SIMS identifies components based on the mass of molecular ions, it does not require labeling substances like fluorescent materials, allowing for distribution evaluation without the influence of labeling agents. This technique can be applied to drug dynamics analysis and research on Drug Delivery Systems (DDS), enabling imaging of drug distribution within organs.

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Analysis case: Evaluation of foreign substances present in resin.

Evaluation of foreign substances in resin is possible using TOF-SIMS through cross-section processing of the sample.

When evaluating organic foreign substances present in resin, it may be difficult to assess them in their original state depending on the sample and analysis conditions. Therefore, we will introduce a case where evaluation became possible by cross-sectioning the resin to expose the foreign substances at the surface. After exposing foreign substances measuring several tens of micrometers that were mixed into epoxy resin through cross-sectioning, we evaluated them using TOF-SIMS. We were able to identify the components of the foreign substances and confirm their distribution.

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[Analysis Case] Analysis of Discoloration Components in Fibers

It is possible to evaluate the organic and inorganic components on the fiber surface.

TOF-SIMS is a highly effective method for investigating the causes of foreign substances, contamination, and discoloration in various processes, as it allows for localized analysis of specific areas and simultaneous analysis of elemental composition and molecular information of organic and inorganic substances through the obtained mass spectrum. Additionally, it enables image analysis, making the visualization of molecular information of organic substances possible. This document summarizes the analysis results of discoloration in clean suits, which are textile products. From the qualitative results obtained by TOF-SIMS, it was inferred that the discolored areas may be due to sebum.

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[Analysis Case] Evaluation of Composition Distribution of Capsule-type Drugs

Imaging evaluation is possible from the overall view to local distribution.

TOF-SIMS allows mass imaging analysis of samples ranging from micrometers to centimeters in size. We conducted mass imaging analysis using TOF-SIMS on the cross-section of a capsule-type drug. We performed cross-section processing and present imaging examples focusing on the entire drug (approximately 7mm x 20mm) and a single granule inside it (approximately 500μm in diameter).

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[Analysis Case] Evaluation of Metal Element Concentration Near the Surface of Gallium Oxide Ga2O3 Film

High sensitivity analysis even in extremely shallow areas.

Gallium oxide (Ga2O3) has a wider bandgap than SiC and GaN, and possesses excellent physical properties, making it a material of interest for high-efficiency, low-cost power devices. Controlling the impurity concentration, which affects the characteristics, is crucial in wafer development. This document presents a case study of quantitative analysis of metal elements in the vicinity of Ga2O3 films. TOF-SIMS allows for highly sensitive evaluation even in very shallow regions.

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[Analysis Case] Composition Evaluation of Nozzle Surface and Inner Wall

It is possible to evaluate the compositional distribution of the convex and concave samples.

TOF-SIMS is an effective method for evaluating distribution, as it can simultaneously analyze elemental composition and molecular information of organic and inorganic substances, as well as perform imaging analysis. This document presents a case study analyzing the inner wall of a nozzle. The distribution of the nozzle surface and inner wall was confirmed, and the presence or absence of peaks at various locations was verified. Measurement method: TOF-SIMS Product field: Manufacturing equipment, parts, daily goods Analysis purpose: Composition distribution evaluation For more details, please download the document or contact us.

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[Analysis Case] Qualitative and Imaging Analysis of Micro Areas Using TOF-SIMS

Qualitative and imaging analysis of foreign substances in the sub-micrometer order and micro-regions is possible.

TOF-SIMS allows for simultaneous elemental analysis and molecular information analysis of organic and inorganic substances through mass spectra obtained by locally analyzing specific areas, making it effective for evaluating foreign substances and micro-regions. This document summarizes examples of analysis in sub-micron order micro-regions. Samples that were sputter-processed with FIB on layered structures were measured using TOF-SIMS. Evaluation of sub-micron order micro-regions has been achieved.

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[Analysis Case] Image Analysis of Micro Beer

It is possible to evaluate the distribution of micro-regions.

With the miniaturization of circuits, the design and development of micro vias for interlayer connections require an understanding of the quality of filling. TOF-SIMS is an effective method for evaluating the results, as it can simultaneously perform elemental analysis and analyze molecular information of organic and inorganic substances, as well as enable image analysis. This document presents a case study analyzing a sample with Cu filled in vias of approximately 0.5μm in diameter on a Si substrate. The analysis of positive ion results confirmed the distribution of Cu and Si. Measurement method: TOF-SIMS Product fields: LSI, memory, electronic components Analysis objectives: Composition distribution evaluation, failure analysis, defect analysis For more details, please download the document or contact us.

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[Analysis Case] Thermal Desorption Gas Analysis of Metal (Sn)

TDS analysis of low melting point metals

Sn is used as the main raw material for solder, which is also used in semiconductor manufacturing. The gases in the solder can cause void formation, so it is important to control the amount of encapsulated gas in the solder and its main raw material, Sn. The results of investigating the gases released by heating Sn to a temperature above its melting point using TDS analysis are shown below. By heating the sample above its melting point, it is possible to evaluate the surface-adsorbed components and the components of the encapsulated gas in the sample.

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[Analysis Case] Evaluation of "Water" in Quartz and Glass Using SIMS

Depth-direction analysis of hydrogen using 'heavy water (D2O) treatment'

We will introduce a case where the permeability of water (H2O) in glass materials was evaluated by measuring the distribution of deuterium (D). When hydrogen (H) is already present, it is difficult to distinguish whether the hydrogen is due to the influence of water. Therefore, treatment with heavy water (D2O) was performed, and the distribution of the stable isotope deuterium was measured in depth using SIMS. By examining the depth distribution of deuterium, it is possible to estimate how deep the water has penetrated.

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[Analysis Case] Degassing Evaluation of Plating Samples

Thermal Desorption Gas Analysis of Ni/Au Plating (TDS)

If the plating film contains gas, it may cause defects such as peeling, blistering, and bubbles within the film. To investigate the gas contained in the plating film, TDS, which can measure the gas released by heating the sample in a high vacuum, is effective. The results of TDS analysis on a sample with Ni/Au plating on SUS material are presented. The release of H2, HCN, H2S, and HCl from the plating film was confirmed. Additionally, quantitative values were calculated.

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[Analysis Case] Evaluation of Transdermal Absorption of Indomethacin in Three-Dimensional Cultured Human Skin

Visualization of the distribution of active ingredients applied to cultured skin using TOF-SIMS.

TOF-SIMS identifies components from the mass of molecular ions, eliminating the need for labels such as fluorescent substances, allowing for imaging without their influence. Additionally, cross-sectional imaging enables the evaluation of distribution in the depth direction. In this study, a gel formulation of indomethacin was applied to three-dimensional cultured human skin, visualizing the distribution of the permeated active ingredient. As a result, it was found that indomethacin is concentrated on the surface side of the stratum corneum. Furthermore, depth profile analysis observed a gradual penetration towards the cell layers.

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[Analysis Case] De-gassing Analysis of Hydrogen Terminal Wafers

The hydrogen in the outermost single atomic layer can be evaluated using TDS.

TDS is a method that heats the sample, ionizes the released gases, and performs mass analysis. It can analyze the mass-to-charge ratio (m/z) from 2 to 199 in high vacuum (1E-7 Pa). In this case, we will introduce an example of TDS analysis conducted on a Si chip treated with hydrogen termination. The TDS was able to capture the desorption of hydrogen from the hydrogen-terminated surface.

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[Analysis Case] Elemental Analysis of Wire Bonding Interface

By using a combination of processing, elemental analysis of the interface is possible.

AES analysis is a method for obtaining compositional information and elemental distribution at the very surface (to a depth of a few nanometers). By combining it with cross-sectional processing, similar information can also be obtained within layered structures and at structural interfaces. This allows for the evaluation of alloy layers, elemental diffusion, and segregation, making it effective for failure analysis and defect investigation of devices. Below, we present a case where a cross-section was prepared using IP processing to evaluate the state near the bonding interface of wire bonding, followed by assessment through AES analysis.

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[Analysis Case] Evaluation of Material Structure of Organic EL (OLED)

It is possible to identify components for each layer, pixel by pixel.

To improve the reliability of organic EL, which is expected to expand in demand in the future, detailed structural analysis, state analysis, and identification of degradation causes will become increasingly important. We will introduce examples of evaluating layer structures and materials using TOF-SIMS and LC/MS. With TOF-SIMS, we were able to evaluate the layer structure and the component information of each layer. We conducted analyses of the components revealed by TOF-SIMS using LC/MS and a fluorescence detector, allowing us to assess the emission wavelength and understand the structure of the components. Thus, the combination of TOF-SIMS and LC/MS enables detailed evaluations.

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[Analysis Case] Transdermal Absorption Evaluation Using Three-Dimensional Cultured Human Skin

Distribution evaluation and quantitative analysis of the same sample are possible.

In recent years, the development of alternative methods to animal testing has progressed in the efficacy and safety testing of pharmaceuticals and cosmetics, with particular attention being paid to testing methods using three-dimensional cultured human skin. In this case study, a permeation test of indomethacin was conducted using a Franz cell, and TOF-SIMS and LC/MS/MS measurements were performed on the same skin sample. LC/MS/MS was used to quantify skin concentration and skin permeation, while TOF-SIMS was used to evaluate the component distribution within the skin. Measurement methods: TOF-SIMS, LC/MS, cryo-processing, cutting Product fields: Biotechnology, pharmaceuticals, cosmetics Analysis objectives: Composition distribution evaluation, safety testing For more details, please download the materials or contact us.

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[Analysis Case] Evaluation of the Thermal Treatment Temperature Dependence of Organic Films by TDS

You can confirm the changes in degassing due to differences in the baking temperature of the sample using TDS.

TDS can evaluate the temperature dependence of the desorption of inorganic and organic gases that are released with increasing temperature. Therefore, it is effective for assessing the degassing of samples based on the baking temperature. The results of TDS analysis after baking the resist film at 50°C and 200°C are shown. It was confirmed that the degassing peaks detected up to 200°C after "baking at 50°C" were not detected after "baking at 200°C."

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