Equipped with a substrate driving mechanism, it is capable of rotating, swiveling, and moving the substrate horizontally! The heating heater uses carbon material.
The "Ceramic Coating Device" is a device that coats substrates with ceramic in a high vacuum state.
It can raise the chamber temperature to nearly 1200°C. Additionally, a significant feature is that it is equipped with a substrate drive mechanism, allowing the substrate to rotate, pivot, and move horizontally.
An electron gun (JEOL 16KW electron gun) is used as the evaporation source, and the crucible section can be controlled for elevation and rotation to accommodate ingot-shaped evaporation materials.
For film formation control, it has a shutter mechanism, and it is also possible to set the opening and closing time and the number of repetitions for the motion.
【Features】
■ Coats substrates with ceramic in a high vacuum state
■ Can raise the chamber temperature to nearly 1200°C
■ Equipped with a substrate drive mechanism, allowing for rotation, pivoting, and horizontal movement of the substrate
■ Uses an electron gun (JEOL 16KW electron gun) as the evaporation source
■ The crucible section can be controlled for elevation and rotation to accommodate ingot-shaped evaporation materials
*For more details, please refer to the PDF document or feel free to contact us.
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