Wafer transport device "PWT2020"
Transport in units of 5 sheets and 25 sheets is also possible! Equipped with error prevention sensors and an emergency stop button.
The "PWT2020" is a wafer transport device that utilizes clean robots. It minimizes contact with the cassette when lifting wafers for loading/unloading, preventing wear, dust generation, and damage to the wafer edges. Through wafer mapping, it detects loading errors such as misalignment and double stacking of wafers. 【Features】 ■ Space-saving ■ Static electricity countermeasure ■ Error monitoring with optical and mechanical sensors ■ Equipped with mapping sensors ■ Compatible with FOUP, FOSB, and H-Square metal cassettes ■ Suitable for Class 10 clean rooms *For more details, please refer to the PDF materials or feel free to contact us.
- Company:PHT
- Price:Other