This is a heater for thin film experiments such as PVD and CVD, featuring excellent uniformity, heating characteristics, and controllability. RF/DC bias specifications are also available.
High vacuum compatible with a variety of heater material options.
Applicable for various vacuum thin film experiments such as PVD (sputtering, evaporation, EB, etc.), CVD, high-temperature vacuum annealing, and high-temperature sample analysis substrate stages. Custom-made solutions are available to meet various specifications.
【Features】
● Semi-custom product. Designed and manufactured according to your requirements.
● Easy replacement of spare heater wires.
● Easy installation and maintenance (M6 stud bolts, supports).
● Compatible with RF/DC bias and substrate rotation.
【Standard Accessories】
● Thermocouple: wire type with alumina insulating sleeve.
● Mounting stud bolts.
【Options】
● RF (150W)/DC (1KW) bias application.
● Non-standard heater wires (Nb, Mo, Pt/Re, WRe, etc.).
● Substrate holding clips.
● Mounting brackets.
● Substrate holders.
● Tapped holes for holder installation.
● Change of top plate material (PBN, quartz, carbon, Inconel, etc.).
● Additional thermocouples for overheating protection.
● Base flange, vacuum feedthrough.