The safety guidelines regarding semiconductor manufacturing equipment design cover a wide range of areas.
Regarding the safety evaluation of QSES, the "SEMI Standards" were first released in 1978 as safety guidelines for the design of semiconductor manufacturing equipment, and they have been revised multiple times to the present day. The scope of the SEMI Standards covers a wide range of areas, including materials, hardware and software, equipment, gases, process chemicals, and environmental health & safety (EHS), primarily detailing each "specification, guideline, testing method, terminology, and implementation method." Among these, the guidelines required when shipping semiconductor manufacturing equipment are S2 and S8, while for liquid crystal manufacturing equipment, they are S26 and S8.
**Features**
- Safety guidelines for the design of semiconductor and liquid crystal manufacturing equipment
- The current latest versions are S2 and S8, both from 2018
- The scope includes materials, hardware and software, equipment, gases, process chemicals, and environmental health & safety (EHS)
- Specifications, guidelines, testing methods, terminology, and implementation methods are detailed
- General guidelines required when shipping semiconductor and liquid crystal manufacturing equipment
- Safety guidelines for warning labels and manuals
*For more details, please download the catalog.*
- Company:キューセス
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