Atomic Force Microscope "Park NX-Wafer"
Automatic defect inspection function, low noise, high throughput! Introducing an accurate atomic force microscope!
The "Park NX-Wafer" is an atomic force microscope that performs defect imaging and analysis fully automatically, improving productivity in defect inspection by 1,000% through AFM measurement techniques. It is a low-noise atomic force profiler for accurate and high-throughput CMP profile measurements. It measures sub-Å surface roughness with extreme accuracy, minimizing variation between chips. 【Features】 ■ Fully automated AFM solution for defect imaging and analysis ■ Up to 1,000% increase in productivity for defect review ■ Achieves accurate and high-throughput CMP measurements with a low-noise atomic force profiler ■ Extremely accurate sub-Å surface roughness measurement, minimizing variation between chip-to-chip ■ Atomic force profiler *For more details, please refer to the PDF document or feel free to contact us.
- Company：パーク・システムズ・ジャパン
- Price：Other
