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table Product List

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Vacuum-compatible positioning table <PT>

Vacuum-compatible positioning table <PT>

Our company conducts its own gas emission evaluations, so even when used in a high vacuum environment, there is minimal impact on other equipment within the chamber, allowing us to provide accurate specifications for vacuum applications.

  • Other semiconductor manufacturing equipment
  • Other physicochemical equipment
  • Analytical Equipment and Devices

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Vacuum-compatible positioning table <VT>

Vacuum-compatible positioning table <VT>

Our company conducts its own gas emission evaluations, so even when used in a high vacuum environment, there is minimal impact on other equipment within the chamber, allowing us to provide accurate specifications for vacuum applications.

  • Other semiconductor manufacturing equipment
  • Other physicochemical equipment
  • Analytical Equipment and Devices

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Positioning Table "PT100VST"

Thin! High vacuum compatible positioning table with a thickness of 25mm.

This product is a positioning table compatible with high vacuum (approximately 1×10^-5 Pa). It can be used in narrow and confined spaces with a minimum thickness of 25 mm for strokes up to 200 mm. Additionally, since our company conducts its own outgassing evaluation, there is minimal impact on other equipment within the chamber when used in a high vacuum environment, allowing us to provide precise specifications for vacuum applications. 【Features】 ■ Equipped with vacuum-compatible stepping motors ■ Equipped with vacuum-compatible photo sensors ■ Ideal for multiple installations, such as side-by-side arrangements *For more details, please refer to the catalog or feel free to contact us.

  • Vacuum Equipment

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Vacuum-compatible positioning table <MT>

Vacuum-compatible positioning table <MT>

Our company conducts its own evaluation of released gases, so even when used in a high vacuum environment, there is minimal impact on other equipment within the chamber, allowing us to provide accurate specifications for vacuum applications.

  • Other semiconductor manufacturing equipment
  • Other physicochemical equipment
  • Analytical Equipment and Devices

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Positioning table "VT125VST-XY"

High vacuum compatible! Highly compatible positioning table.

This product is a vacuum-compatible positioning table. Since our company conducts outgassing evaluations in-house, we can provide vacuum applications with specifications that accurately meet customer requirements. Additionally, the VT series has high compatibility and size variations equivalent to commercially available stages (for atmospheric use) from various manufacturers, allowing you to convert your existing atmospheric specification equipment to low outgassing specifications or make it vacuum-compatible without design changes. 【Features】 ■ Compatible with high vacuum (approximately 1×10^-5 Pa) ■ Uses vacuum-compatible stepping motors ■ Uses vacuum-compatible photo sensors ■ Vacuum-compatible grease can be selected optimally according to the customer's application *For more details, please refer to the catalog or feel free to contact us.

  • Vacuum Equipment
  • Other measurement and measuring equipment

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Positioning Table "MT12VST"

Compact and high rigidity! Ultra-small body positioning table.

This product is a positioning table compatible with high vacuum (approximately 1×10-5 Pa). Despite its ultra-compact body that fits in the palm of your hand, it achieves high rigidity by employing cross roller guides in the guidance system and precision ball screws (preloaded) in the transmission system, ensuring stable movement. Additionally, we offer options such as brackets that can be combined in multi-axis configurations like XY and XZ axes. 【Features】 ■ Clean-compatible products are also available ■ Compact & high rigidity ■ Uses vacuum-compatible stepping motors ■ Uses vacuum-compatible photo sensors ■ Vacuum-compatible grease is selected based on the customer's application *For more details, please refer to the catalog or feel free to contact us.

  • Vacuum Equipment

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