Batch-type plasma processing device WPA-600S
A sequencer that is low-cost yet equipped with high performance, capable of managing various assembly conditions and offering excellent cost performance.
We have adopted a compact power matching method, achieving faster plasma matching. By reducing the matching time, we have minimized charge-up damage to the device during plasma ignition. Additionally, we have achieved space-saving design with only the PUMP outside of the main unit.
- Company:エスクラフト
- Price:Other