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  6. CVD device "Nano Carbon Deposition Device"

CVD device "Nano Carbon Deposition Device"

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last updated:May 26, 2020

片桐エンジニアリング
片桐エンジニアリング
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Three types of sedimentation devices are available! Please choose according to your needs.

We would like to introduce the "Nano Carbon Deposition Device" handled by Katagiri Engineering Co., Ltd. This product is a CVD device capable of synthesizing nano carbon materials. In addition to the "CND-050LP," we offer a large-area nano carbon deposition device, the "LCND-200," and a PN nano carbon deposition device, the "NCD-050W." You can choose according to your application. 【Features】 ■ Capable of synthesizing nano carbon materials ■ Three types in the lineup ■ Selectable based on application *For more details, please refer to the PDF document or feel free to contact us.

    CVD Equipment
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CVD device "Nano Carbon Deposition Device"

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  • Related Link - http://www.kk-eng.co.jp/product/NANO.htm

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【Specifications (Excerpt)】 < Nano Carbon Deposition Device (CND-050LP) > ■ Plasma Source - For hydrogen radical injection: RF 13.56MHz, 1KW, MHC - For main plasma: RF 13.56MHz, 1kW, CCP shower head ■ Chamber: SUS304, frame ■ Substrate Stage: 800℃, 2-inch substrate x 1 piece, upper and lower bellows < Large Area Nano Carbon Deposition Device (LCND-200) > ■ Plasma Source: RF 13.56MHz, 5kW, multi-hollow CCP shower head ■ Chamber: SUS304, frame ■ Substrate Stage: 800℃, 8-inch substrate x 1 piece < PN Nano Carbon Deposition Device (NCD-050W) > ■ Plasma Source - For hydrogen radical injection: Microwave 2.45GHz, 1KW, SWP - For main plasma: VHF 100MHz, 1kW, CCP shower head ■ Chamber: SUS304, frame ■ Substrate Stage: 800℃, 2-inch substrate x 1 piece, upper and lower bellows * For more details, please refer to the PDF document or feel free to contact us.

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CVD device "Nano Carbon Deposition Device"

CVD device "Nano Carbon Deposition Device"

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片桐エンジニアリング

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Since its establishment in 1991, KKE has received your generous support and cooperation, for which we are deeply grateful. Before the founding, I dedicated myself to technical operations. Drawing on what I learned during that time, KKE has grown together with all of you. Particularly, we have focused on "development, design, and manufacturing" in the field of vacuum technology without having standardized products, and we have had the pleasure of collaborating with industry, government, and academia. We have maintained a commitment to thoroughly engage in "development, design, and manufacturing" tailored to the specific requirements of our customers, making progress based on accurate judgments to meet their needs. Aiming to be a development-oriented company capable of responding to cutting-edge science and technology in the 21st century, we strive to contribute to society through "manufacturing" and to achieve happiness together with all of you. We look forward to your continued support for KKE.

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