[Analysis Case] Wide-area Quantitative Mapping using XPS
It is possible to evaluate the composition distribution in an area of up to 70×70mm.
This is an example of wide-area quantitative mapping using XPS. We evaluated organic residue on silicon wafers using the following procedure. To graph the amount (atomic concentration) rather than peak intensity, it is less affected by sample roughness and allows for data acquisition over a wide area. It is suitable for investigating organic and inorganic contamination, discoloration, surface treatments, etc., as it enables an overview assessment of the compositional distribution on the sample surface.
- Company:一般財団法人材料科学技術振興財団 MST
- Price:Other