A platform that allows you to directly measure and research the elements you want! It can be tailored to meet customer needs!
The "Cluster Vacuum Deposition System" consists of an evaluation chamber equipped with an automatic sample transport system, a sample exchange chamber, a sample storage chamber, and a sputtering chamber, as well as analytical instruments for dielectric constant and magnetic measurements, and Hall measurement devices.
Additionally, the central automatic sample transport chamber connects to each deposition chamber and the analysis chamber. It automatically transports samples in a vacuum, facilitating the entire process from sample fabrication to evaluation.
Furthermore, all chambers can be connected in a high vacuum environment, allowing the system to operate without exposing the samples to the atmosphere from fabrication to evaluation.
【Features】
■ Composed of an evaluation chamber equipped with analytical instruments
■ Central automatic sample transport chamber
- Automates the process from sample fabrication to evaluation, advancing efficiently
■ All chambers
- Can be connected in a high vacuum environment
- Operates without exposing samples to the atmosphere from fabrication to evaluation
*For more details, please refer to the PDF document or feel free to contact us.
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