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XY stage Product List and Ranking from 40 Manufacturers, Suppliers and Companies | IPROS GMS

Last Updated： Aggregation Period:May 27, 2026～Jun 23, 2026
This ranking is based on the number of page views on our site.

XY stage Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:May 27, 2026～Jun 23, 2026
This ranking is based on the number of page views on our site.

  1. PI Japan Kanagawa//Electronic Components and Semiconductors
  2. シグマ光機 Tokyo//Testing, Analysis and Measurement
  3. MSAファクトリー Tokyo//Industrial Electrical Equipment
  4. 4 セルシステム Kanagawa//Industrial Electrical Equipment
  5. 5 フェローテックホールディングス Tokyo//Electronic Components and Semiconductors
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XY stage Product ranking

Last Updated： Aggregation Period:May 27, 2026～Jun 23, 2026
This ranking is based on the number of page views on our site.

  1. Parallel Kinematic Hexapod H-840 with a load capacity of 30 kg PI Japan
  2. PI Japan Co., Ltd. 6-axis stage PI Japan
  3. Comprehensive Feedback Backstage System Catalog (Atmosphere/Vacuum) シグマ光機
  4. Automatic stage horizontal plane Z-axis linear ball guide: KHE series 駿河精機
  5. 4 Large gantry-type XY stage ファインディバイス

XY stage Product List

151～180 item / All 187 items

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Folding aluminum standard stage

Folding aluminum standard stage

Lightweight and durable! No tools required for setup and storage, easy to assemble and set up.

We would like to introduce our "Folding Aluminum Standard Stage." We offer a lineup that includes the "Stage A Set" with 9 leg units and 15 tabletop pieces, the "Stage B Set" with 3 leg units and 18 tabletop pieces, and the "Stage C Set" with 16 leg units and 28 tabletop pieces. No tools are required for setup or storage, making assembly and installation easy. We can also create custom-made stages tailored to your specifications and size requirements. 【Lineup】 ■ Folding Aluminum Stage A Set ■ Folding Aluminum Stage B Set ■ Folding Aluminum Stage C Set ■ Folding Aluminum Stage D Set ■ Folding Aluminum Stage E Set *For more details, please refer to the related links or feel free to contact us.

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Ultra-thin Precision XY Stage 'CYAT-070'

Ultra-thin Precision XY Stage 'CYAT-070'

Ideal for retrofitting XY axes after the introduction of various devices! The adoption of LM guides enables long strokes. Transparent holes are also secured, making it usable for a wide range of applications.

The "CYAT-070" is an ultra-thin XY stage that achieves significant miniaturization through its integrated two-axis structure. It secures a full stroke with a transparent hole of φ30mm, making it suitable for use as a compact XY stage for microscopes. Due to its thin structure, it is ideal for retrofitting XY axes after the introduction of various devices. Additionally, the adoption of LM guides allows for a long stroke, expanding its range of applications. 【Features】 - Significant miniaturization achieved through the integrated two-axis structure - Total height of 70mm even with the addition of our Z-axis - Full stroke with a transparent hole of φ30mm, also usable as a compact XY stage for microscopes *For more details, please refer to the PDF document or feel free to contact us.

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Automatic XY Stage for Microscopes SCAN Series

Automatic XY Stage for Microscopes SCAN Series

This is a high-precision electric stage manufactured by Merzhauser in Germany. It is also recommended for integration into inspection devices as well as microscopes.

The automatic XY stage for microscopes from Germany's Merzhauser company was developed for applications that require automation of devices and high-precision positioning. It can be mounted on upright/inverted microscopes from most manufacturers. The minimum movement range is available from 75mm x 50mm, and the maximum movement range can be up to 600mm x 600mm. When combined with an electric Z focus drive, three-axis control is possible. By using the API & DLL for software creation, it can be easily integrated into original devices.

  • Other physicochemical equipment
  • Optical microscope
  • Defect Inspection Equipment
  • XY stage

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Industry-Academia Collaboration X-Y Stages

Industry-Academia Collaboration X-Y Stages

It's realized through industry-academic collaboration! High-precision X-Y stages are produced using stepping motors.

✅Request Details We received a request from Ibaraki University for the repair of a foreign-made point counter. It only operates in the X direction. Therefore, we created a stage that moves in both the X and Y directions. ✅Key Innovations By using a stepping motor, we enabled step movements in increments of 0.1 mm within a sample movement range of 22 mm x 22 mm. Additionally, we developed a point counter program linked to a computer. It's accurately measured the volume ratios of bubbles and debris particles in microscopic observation research. This allows researchers to work continuous. ✅Results - High-precision positioning The use of a stepping motor allows for high-precision positioning without the need for sensors. - Slim design Its slim design allows it to be used with a rotating stage of a polarizing microscope without interfering with operation.

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  • Other measurement, recording and measuring instruments
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【Mekatoro Communication No. 18】<Product Introduction> VCM Moving Coil Type

【Mekatoro Communication No. 18】<Product Introduction> VCM Moving Coil Type

A detailed explanation of moving coil type actuators!

At Shin Denko Mechatronics, we publish "Mechatronics Communication" with the aim of fostering better communication with our customers. In issue No. 18, we introduce VCM (moving coil type) products. We will explain the features of the actuators while comparing them to solenoids and motors. [Contents] ■ Principles and comparison with solenoids ■ Drive mechanisms ■ Drive circuits ■ Application examples *For more details, please refer to the PDF document or feel free to contact us.

  • Actuator
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Air bearing stage

Air bearing stage

Air Stage LBT Series

Air Stage LBT Series Compatible with Class 1 clean rooms Stroke range from 50 mm to 500 mm Encoders can be selected from 1 µm to 0.05 µm depending on the application Straightness and flatness are 0.5 µm/300 mm Pitching and yawing are ±2 arc seconds Delivery is possible in a fully assembled state from a condition without coils, magnets, or encoders There is a wealth of overseas delivery records for semiconductor inspection equipment, and this is the first introduction in Japan. Standardization enables low costs and short delivery times. There is also a lineup of XY stages.

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  • Semiconductor inspection/test equipment
  • Linear motor
  • XY stage

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10nm feedback stage system (precision positioning device)

10nm feedback stage system (precision positioning device)

Positioning with 10nm resolution! Excellent reproducibility, stage with a stroke of 20 to 200mm.

■High Resolution and Reproducibility The built-in motor driver in the controller allows the stage to operate with a resolution of 10nm, and the optical linear encoder integrated into the stage reads the position for feedback control, resulting in high resolution and excellent reproducibility. ■Long Stroke It can move up to 200mm. This enables precise positioning and sample retraction with a single stage. ■Control The controller is equipped with several communication interfaces, allowing the stage to be controlled by inputting command strings from a PC or similar device. ■Movable Type In addition to linear motion, we also offer lifting types and micro-rotation options. For more details, please download the catalog or contact us.

  • Other microscopes
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Submicron feedback stage system (precision positioning device)

Submicron feedback stage system (precision positioning device)

Positioning with sub-micron resolution! Excellent reproducibility with built-in encoder, stage with a stroke of 20 to 400 mm.

■High Resolution and Reproducibility The built-in motor driver in the controller allows the stage to operate with sub-micron resolution, and the optical linear encoder integrated into the stage reads the position and performs feedback control, resulting in high resolution and excellent reproducibility. The stage controller operates at a resolution of either 100nm (0.1μm) or 50nm (0.05μm). ■Long Stroke It can move up to a maximum of 400mm. This enables precise positioning and sample retraction with a single stage. ■Control The controller is equipped with several communication interfaces, allowing the stage to be controlled by inputting command strings from a PC or similar device. ■Movable Type In addition to linear motion, we also offer lift types and micro-rotation options. For more details, please download the catalog or contact us.

  • Other microscopes
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Vacuum-compatible 10nm feedback stage system

Vacuum-compatible 10nm feedback stage system

For positioning applications within a vacuum chamber, it features built-in linear encoders for positioning with a resolution of 10nm and a maximum movement range of 100mm.

A precision positioning device (feedback stage system) that achieves a resolution of 10nm and a reproducibility of ±20nm with an integrated optical linear encoder. It can be used in a vacuum chamber with a vacuum level of up to 10^-4 Pa. Compared to positioning devices that use piezo technology, it is utilized in a wide range of applications due to its "low cost," "easy control," and "large stroke capability." The stroke ranges from 20mm to 100mm. If you are facing challenges with positioning, please feel free to contact us. ■ For more details, please download the catalog or contact us.

  • Other microscopes
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Submicron Feedback Stage FS-3200X/XY

Submicron Feedback Stage FS-3200X/XY

"Precision positioning device" with high resolution, high positioning repeatability, and excellent position holding capability after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 200mm with a resolution of either 50nm or 100nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. Equipped with a slowdown sensor, it minimizes the impact during stops at the stroke end. (*1) In combination with the feedback stage controllers FC-414 or FC-114.

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Vacuum-compatible submicron feedback stage, lift type

Vacuum-compatible submicron feedback stage, lift type

Usable in a vacuum! Positioning stage for the Z-axis with built-in linear encoder and sub-micron resolution!

This is a high-resolution Z-axis positioning stage equipped with an optical linear scale. It achieves a stroke of either 5mm or 10mm with a resolution of either 50nm (*1) or 100nm (*2). It has been treated for outgassing and can be used in a vacuum. Thanks to its unique design, it minimizes changes in the tilt of the table surface, which is common in Z-axis configurations, and is equipped with a self-developed linear scale and proprietary feedback control circuit, providing high resolution, excellent positioning repeatability, and position retention after positioning. (*1) Combination with feedback stage controller FC-411 (*2) Combination with feedback stage controller FC-111

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Vacuum-compatible 10nm feedback stage with 20mm operation.

Vacuum-compatible 10nm feedback stage with 20mm operation.

High-performance positioning stage with a built-in linear encoder operating at 10nm resolution, usable in a vacuum.

This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be directly introduced into a vacuum chamber. It has a built-in optical linear encoder, and based on the position information detected by the encoder, it performs full closed-loop control, resulting in high-precision repeatability in positioning. It can achieve positioning with a 20mm stroke and a resolution of 10nm.

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Vacuum-compatible submicron feedback stage with 40mm operation.

Vacuum-compatible submicron feedback stage with 40mm operation.

High-resolution positioning stage with built-in encoder for use in a vacuum.

The built-in optical linear encoder detects the position of the stage and performs full closed-loop control, resulting in high resolution and excellent position reproducibility. Since it is driven by a stepping motor and ball screw, it has excellent position holding capability. Due to the use of components that are less likely to outgas in the vacuum chamber, the stage can be placed inside the vacuum chamber. It can operate within a range of 40mm and can be controlled with a resolution of "50nm" or "100nm" (depending on the controller).

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Vacuum-compatible submicron feedback stage with 20mm operation

Vacuum-compatible submicron feedback stage with 20mm operation

Feedback stage with submicron resolution usable in a vacuum.

The built-in optical linear encoder detects the position of the stage table and feeds the position information back to the controller, resulting in high resolution and excellent position reproducibility. Since it is driven by a stepping motor and ball screw, it has excellent position retention. As a countermeasure against outgassing, lubricants, wires, and motors have been replaced with vacuum-compatible products, allowing for use within a vacuum chamber. It can operate within a range of 20mm and can be controlled with a resolution of "50nm" or "100nm" (depending on the controller).

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Vacuum-compatible submicron feedback stage, micro-rotation type

Vacuum-compatible submicron feedback stage, micro-rotation type

Usable in a vacuum! Stage for adjusting rotation direction

It is equipped with an optical linear encoder, allowing it to detect the position of the movable parts of the stage, which enables the controller to perform closed-loop control based on that position information, resulting in excellent position reproducibility. The resolution can be operated at "0.00005" or "0.0001" resolution, depending on the controller. It has been treated for outgassing, making it usable in a vacuum.

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Feedback Stage System Comprehensive Catalog (Atmosphere/Vacuum) 5th Edition

Feedback Stage System Comprehensive Catalog (Atmosphere/Vacuum) 5th Edition

Achieve nanometer resolution, high reproducibility, and high retention with linear encoders! Custom manufacturing is also available.

This is the comprehensive catalog for our high-resolution positioning devices for atmospheric use and vacuum-compatible high-resolution positioning devices (feedback stage systems) that we design, manufacture, and sell. It covers specifications, configurations, prices, and more for feedback stages, feedback stage controllers, cables, and options. We also accept orders for custom and special products. Please feel free to consult us. 【Features of Atmospheric Systems】 We develop, manufacture, and sell compact positioning devices with built-in linear scales. They are used in semiconductor-related equipment, communication-related applications, and optical systems for advanced research. 【Features of Vacuum-Compatible Systems】 Since our establishment, we have leveraged the know-how gained from producing custom products to provide high resolution and high precision reproducibility for vacuum applications. *You can view the comprehensive catalog by downloading the PDF. Please feel free to contact us via the inquiry form for any requests. Additionally, the link below introduces examples of custom product manufacturing.

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Frictionless High-Precision XY Stage for Wafer Inspection V-P01

Frictionless High-Precision XY Stage for Wafer Inspection V-P01

High-speed and high-precision wafer inspection is achieved by V-P01.

In the semiconductor industry, wafer inspection requires the detection of minute defects with high precision. The accuracy of the inspection is a crucial factor that influences product quality and yield. Especially as wafers become larger and more densely packed, faster and more accurate positioning becomes essential. The V-P01 achieves high-precision positioning and high-speed scanning through linear motor drive, contributing to the efficiency of wafer inspection. 【Usage Scenarios】 - Automated Optical Inspection (AOI) of wafers - Precision scanning of wafer surfaces - Positioning of fine patterns 【Benefits of Implementation】 - Reduction in inspection time - Improvement in inspection accuracy - Enhancement of yield

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  • Cartesian Robot
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Optical Use: Smooth Operation at Low Speeds - High Precision XY Stage V-P01

Optical Use: Smooth Operation at Low Speeds - High Precision XY Stage V-P01

XY stage that improves the precision and efficiency of lens adjustment.

In the optical industry, lens adjustment requires high precision in positioning and stability. To maximize the performance of lenses, micron-level fine-tuning is essential. Misalignment can cause image distortion and a decrease in resolution, directly affecting product quality. The V-P01 addresses these challenges through linear motor drive. 【Application Scenes】 - Lens polishing and assembly processes - Optical measuring instruments - Inspection devices 【Benefits of Implementation】 - Quality improvement through high-precision positioning - Increased work efficiency due to high speed and acceleration - Improved yield through stable operation

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[V-P01] Smooth and Stable Control High-Precision XY Stage for Research and Development

[V-P01] Smooth and Stable Control High-Precision XY Stage for Research and Development

XY stage supporting high-speed and high-precision experiments.

In experimental research and development, precise positioning and stable operation are essential. Particularly when observing fine structures or performing precise machining, a stage with high positional accuracy is required. A stage with low positional accuracy may compromise the reproducibility of experimental results or fail to provide accurate data. The V-P01 achieves high-precision positioning and stable operation through linear motor drive, enhancing the quality of experiments in research and development. 【Application Scenes】 - Microscopic observation - Precision machining - AOI inspection - Scanning 【Effects of Implementation】 - Improved experimental accuracy through high-precision positioning - Increased experimental efficiency due to high speed and acceleration - Assurance of reproducibility through stable operation

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  • Cartesian Robot
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XY stage U-723 equipped with ultrasonic piezo motor for optical adjustment.

XY stage U-723 equipped with ultrasonic piezo motor for optical adjustment.

For high-precision positioning in optical applications. Compact size, 10 nm resolution, self-locking when powered off.

In the optical industry, precise positioning adjustments of lenses and mirrors significantly affect system performance. Particularly in situations requiring minute adjustments, high-precision positioning capability is essential. Low adjustment accuracy can lead to misalignment of the optical axis and focus, resulting in decreased system performance. The U-723 achieves a compact design with a 22mm range of motion and 10nm resolution, enabling precise positioning adjustments in optical systems. 【Application Scenarios】 - Adjustment of microscope objective lenses - Alignment of laser processing machine optical axes - Sample positioning in optical measurement instruments 【Benefits of Implementation】 - Improved optical performance through high-precision positioning - Space-saving design leading to overall equipment miniaturization - Enhanced safety through position retention when the power is off

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  • Linear motor
  • Piezoelectric Devices
  • Actuator
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Self-Lock Stage SLX Series for Electronic Component Manufacturing

Self-Lock Stage SLX Series for Electronic Component Manufacturing

High-precision self-locking stage to prevent positional displacement.

In the manufacturing of electronic components, precise positioning is required. Mirac Optical's "Self-Lock Stage SLX Series" achieves high positioning accuracy by incorporating a patented self-locking mechanism. 【Application Scenarios】 - Inspection and measurement of precision parts - Positioning in automated lines - High-precision machining processes - Applications requiring long-term fixation 【Benefits of Implementation】 - Prevention of product defects due to misalignment - Improved work efficiency - Enhanced machining accuracy through precise positioning - Increased accuracy in inspection and measurement

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Vacuum-compatible 5nm feedback stage system

Vacuum-compatible 5nm feedback stage system

For positioning applications within a vacuum chamber, built-in linear encoder enables positioning with a resolution of 5nm and a maximum movement range of 50mm.

An ultra-high-resolution positioning device (feedback stage system) has achieved a resolution of 5nm and a reproducibility of ±10nm for optical linear encoders. It can be used in a vacuum chamber with a vacuum level of 10^-4 Pa. Compared to positioning devices that utilize piezo technology, it is utilized in a wide range of applications due to its "low cost," "easy control," and "large stroke capability." The available strokes are "20mm," "40mm," and "50mm." If you are facing challenges with positioning, please feel free to contact us. ■ For more details, please download the catalog or contact us.

  • Other microscopes
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Vacuum-Compatible Submicron Feedback Stage System

Vacuum-Compatible Submicron Feedback Stage System

For positioning applications within a vacuum chamber, positioning with sub-micron resolution, maximum movement range of 100mm.

A precision positioning device (feedback stage system) has achieved reproducibility with sub-micron resolution (0.1μm or 0.05μm) using an optical linear encoder built into the stage. It can be used within a vacuum chamber with a vacuum level of 10^-4 Pa. Compared to positioning devices that utilize piezo technology, it is widely used due to its "low cost," "easy control," and "large stroke capability." The stroke ranges from 20mm to 100mm. If you are facing issues with positioning, please feel free to contact us. For more details, please download the catalog or contact us.

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10nm Feedback Stage FS-3150X/XY

10nm Feedback Stage FS-3150X/XY

"Precision positioning device" with high resolution, excellent positioning reproducibility, and strong position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 150mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-511.

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10nm Feedback Stage FS-3200X/XY

10nm Feedback Stage FS-3200X/XY

"Precision positioning device" with high resolution, excellent positioning repeatability, and strong position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 200mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. Equipped with a slowdown sensor, it minimizes the impact during stops at the stroke end. (*1) In combination with the feedback stage controller FC-514.

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Vacuum-compatible 5nm feedback stage, 50mm operation.

Vacuum-compatible 5nm feedback stage, 50mm operation.

High-performance positioning stage with 5nm resolution, high reproducibility, and high retention that can be used in a vacuum.

This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. It features a built-in linear scale developed in-house, allowing for a slim and lightweight design, as well as high-precision repeat positioning performance through full closed-loop control. It can operate with a 50mm stroke at a resolution of 5nm.

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Vacuum-compatible 5nm feedback stage, 40mm operation

Vacuum-compatible 5nm feedback stage, 40mm operation

High-performance positioning stage with 5nm resolution and 40mm travel, usable in a vacuum.

This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. It has a built-in linear scale developed in-house, providing high-precision repeat positioning performance through full closed-loop control. It can operate with a 40mm stroke at a resolution of 5nm.

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Vacuum-compatible 10nm feedback stage, 40mm operation

Vacuum-compatible 10nm feedback stage, 40mm operation

High-performance positioning stage operating in a 40mm range with 10nm resolution for vacuum applications.

This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. It features full closed-loop control based on the positional information from an integrated optical linear encoder, providing high-precision repeatability in positioning performance. It can operate with a 40mm stroke at a resolution of 10nm.

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Vacuum-compatible 10nm feedback stage, 100mm operation

Vacuum-compatible 10nm feedback stage, 100mm operation

Long stage with built-in linear encoder capable of 10nm resolution, usable in a vacuum.

This is a vacuum-compatible feedback stage equipped with outgassing countermeasures. It can be directly introduced into a vacuum chamber. It has a built-in optical linear encoder, and based on the position information detected by the encoder, it performs full closed-loop control, providing high-precision repeat positioning performance. With a movement range of 100mm, it allows for sample movement and precise positioning with a single unit, making it effective when a wide range of data (such as spectra) is required.

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