JAPAN FINE CERAMICS CO., LTD. （JFC） List of Products and Services

It is a composite material made by impregnating aluminum into a SiC ceramic porous body. With the lightness of aluminum and the rigidity of iron, it is a material that also excels in thermal properties. Taking advantage of these features, our MMC was installed on the asteroid explorer "Hayabusa2." In addition, we also offer composite materials that are produced by adding reinforcing ceramic materials to aluminum using casting methods. Please refer to the comprehensive catalog below.

We have significantly reduced the cost of high-performance composite materials MMC through die casting manufacturing. ● Features of die-cast MMC 1. Lightweight: Comparable to aluminum 2. High rigidity: Greater than cast iron 3. Low thermal expansion: Two-thirds that of aluminum 4. High thermal conductivity: Greater than aluminum

Metal-ceramic composite material 'MMC' that combines the "lightness of aluminum" and the "rigidity of steel." It has high thermal conductivity and vibration-absorbing properties, making it suitable for complex shapes and large items! We are currently offering a comprehensive catalog of the composite material 'MMC,' which is ideal for replacing aluminum and steel! 【Features】 ■ Equivalent to aluminum, about 1/3 the weight of steel ■ Has rigidity comparable to iron and steel, resistant to bending ■ High thermal conductivity and heat dissipation ■ Minimal thermal shrinkage *For more details, please download the catalog or contact us.

It is a composite material in which metal silicon is impregnated into SiC ceramic porous bodies. By changing the ratio of SiC, it is possible to achieve a thermal conductivity that matches the needs. It has low thermal expansion and is attracting attention as an alternative material to various materials.

We have significantly reduced the cost of high-performance MMC using the die-casting method. ● Features of die-cast MMC 1. Low thermal expansion: 2/3 that of aluminum 2. High thermal conductivity: greater than aluminum 3. Lightweight and high rigidity: as light as aluminum with a Young's modulus greater than that of cast iron

It is a composite material in which aluminum is impregnated into a SiC ceramic porous body.

This is a composite material containing 30-40 vol% SiC ceramic particles in aluminum alloy. It is manufactured using sand casting and die casting methods. By adjusting the SiC content, we can provide materials that meet specific needs. In recent years, there has been a rapid adoption of this material due to the increasing size and speed of equipment. It is being adopted in various fields, including liquid crystal manufacturing equipment, semiconductor manufacturing equipment, and various inspection devices. We are also capable of developing other composite materials, so we kindly ask you to contact us for this opportunity.

We have prepared a φ450mm (18-inch) fixture for semiconductor equipment compatible with φ450mm (18-inch) wafers. Since standard Si wafers are still quite expensive and carry a risk of damage, those who are having difficulty using them freely are encouraged to contact us. Please try our composite materials as fixtures for transport tests and adhesion tests.

●Features of MMC - Lightweight: The lightness of aluminum - High rigidity: Higher rigidity than cast iron and stainless steel - Low thermal expansion: Less than 1/2 that of aluminum - High thermal conductivity: Better than aluminum - Vibration damping: Better than stainless steel, cast iron, and aluminum ⇒ Please watch the video. The left side of the screen shows MMC (SA301).

Our company consistently produces various ceramics and metal-ceramic composite materials (MMC), including silicon carbide (SiC) and silicon nitride (Si3N4), from raw material formulation to finishing processes. ● Excellent heat resistance, wear resistance, and corrosion resistance, which are our specialties: 　＜Silicon Carbide＞　＜Silicon Nitride＞ ● A super material that combines the lightness of aluminum with the rigidity of steel: 　＜Metal-Ceramic Composite Materials (MMC)＞ If you have any concerns regarding equipment design, component design, thermal design, etc., please feel free to consult us at this opportunity. We will propose the optimal solution from our extensive lineup. *For more details, please download the catalog or contact us.

Composite materials 'MMC (Metal Matrix Composites)' have achieved better physical properties by combining base metals and ceramic-based reinforcement materials. These materials can meet various customer demands, such as wanting to increase rigidity without changing shape or weight, wanting to reduce weight while maintaining rigidity, or needing materials with excellent heat dissipation. 【Features】 ■ Equivalent to aluminum, about 1/3 the weight of iron ■ Has rigidity comparable to iron and steel, and is resistant to bending ■ Good vibration damping properties ☞ Please refer to the video ■ Excellent thermal conductivity and heat dissipation ■ Minimal expansion and contraction due to temperature changes *For more details, please request materials or view the PDF data from the download.

We have developed a composite material SA001 made of metallic silicon and aluminum. This super material is lighter than aluminum, has a higher Young's modulus than cast iron, and boasts a specific stiffness that is twice that of aluminum. Thanks to our joining technology, it can also accommodate hollow structures and built-in flow paths. ● Adoption achievements: Parts for high-precision 3D measuring machines, parts for semiconductor manufacturing equipment ● Application proposal: Temperature control plates for electrostatic chucks * By changing the material from aluminum to SA001, we can resolve the thermal expansion difference issue with alumina ESC.

1. We have developed a composite material, SA001, made of metallic silicon and aluminum. It is lighter than aluminum, has a higher Young's modulus than cast iron, and boasts a specific stiffness that is twice that of aluminum, marking the birth of a super material. ● Adoption achievements: Parts for high-precision 3D measuring machines, parts for semiconductor manufacturing equipment ● Application proposal: Temperature control plates for electrostatic chucks *By changing the material from aluminum to SA001, we have resolved the thermal expansion difference issue with alumina ESC. 2. Introduction of bonding technology for composite materials MMC Our unique bonding technology for composite materials MMC has made it possible to create hollow structures and integrated flow paths.

Metal ceramic composite material 'MMC' that combines the "lightness of aluminum" and the "rigidity of steel." It has high thermal conductivity, low thermal expansion, and the ability to absorb vibrations, making it suitable for complex shapes and large items! We are currently offering a comprehensive catalog of the composite material 'MMC' suitable for replacement of aluminum and steel! For features and application examples of MMC, please refer to the animation video. 【Features】 ■ Equivalent to aluminum, about 1/3 the weight of steel ■ Has rigidity comparable to iron and steel, resistant to bending ■ High thermal conductivity and heat dissipation ■ Minimal thermal shrinkage *For more details, please download the catalog or contact us.

Are you struggling with the heaviness of iron, the large deflection of aluminum? Are you having trouble with heat retention? Is the accuracy changing with temperature? MMC solves these problems. ● Features of MMC - High rigidity: Rigidity comparable to cast iron and steel - Lightweight: Weight comparable to aluminum alloys - Low thermal expansion: Less than half that of aluminum alloys - High thermal conductivity: Superior to aluminum alloys - Vibration damping: Vibration absorption properties better than stainless steel, cast iron, and aluminum alloys - Low electrical resistivity: Conductive! * By changing the combination of materials and their ratios, we can achieve properties that meet your needs. * In addition to composite materials, we also manufacture and sell various ceramics, providing support with a wide range of products.

By combining SiC ceramics with metallic silicon, we have achieved high thermal conductivity that surpasses ceramics and low thermal expansion comparable to silicon. Thermal conductivity that exceeds SiC and AlN! By changing the composite ratio, various properties can be realized. Surface treatment (plating) is possible, and it can also be used for electrostatic chucks. It can be made larger than ceramics. We also offer a combination of SiC and aluminum. For more details, please refer to the PDF catalog.

By combining SiC and aluminum, we have achieved an increase in fracture toughness while maintaining the wear resistance of ceramics. It is being adopted as a liner material in various crushing equipment. For more details, please download the catalog.

Metal-ceramic composite materials with the rigidity exceeding that of cast iron due to the lightweight of aluminum. Their excellent specific rigidity, high thermal conductivity, and low thermal expansion make them suitable for enclosures. We can meet diverse needs through die casting, gravity casting, and low-pressure casting. We are also capable of developing other composite materials, so please feel free to contact us regarding this opportunity.

"Metal ceramic composite material with rigidity exceeding that of cast iron due to the lightness of aluminum" Aluminum is light but bends. Iron does not bend but is heavy. This is a new material that solves the designer's dilemma. In addition to excellent specific rigidity, its outstanding thermal properties of low thermal expansion and high thermal conductivity make it suitable for movable stages. The adoption of MMC is progressing in high-speed moving parts of mountings and machine tools. It meets diverse needs through gravity casting, low-pressure casting, and die casting methods.

Our unique composite technology produces Metal Matrix Composites, which are composite materials with a carefully optimized blend of metal and ceramics. Using MMC, which is lightweight like aluminum yet does not deform like iron, as moving parts in equipment can dramatically change the performance of the device. The excellent thermal properties of low thermal expansion and high thermal conductivity will solve thermal issues in the equipment. Please consider adopting MMC.

A new product, SA151, has been added to our highly acclaimed aluminum-SiC composite material "SA series," known for its lightweight and high rigidity. ● The amount of ceramic reinforcement has been reduced compared to conventional products, containing 15 vol% SiC particles in the aluminum alloy. ● Achieving a Young's modulus of 105 GPa (1.5 times that of aluminum A5052) while maintaining the lightweight characteristics of aluminum. It offers better moldability (castability) and workability than traditional composites, making it more cost-effective. In addition to casting methods, extrusion molding is also possible. Please consider adopting SA151 for lightweight movable units, addressing rigidity issues in aluminum parts, and solving thermal problems.

I can't find a clue to solve the problem. I want something to overcome the wall. Our unique new material, "Metal Ceramic Composite Material (MMC)," will solve your "?" 【Main Features】 ■ Lightweight ■ High rigidity ■ High thermal conductivity ■ Low thermal expansion ■ Vibration damping ■ Wear resistance 【Adoption Effects】 ■ Increased speed and energy efficiency of devices due to lightweight components ■ Improved precision of devices due to increased component rigidity ■ Enhanced heat dissipation ■ Prevention of thermal deformation Our unique composite material brings many benefits, such as improved device performance, resolution of thermal issues, increased energy efficiency, and reduced assembly man-hours through the integration of cast method components, and is being adopted in various fields. *For details, please refer to the materials available for download via the PDF button. We also welcome inquiries and questions through the inquiry button.

The composite material MMC combines the lightweight properties of aluminum with the rigidity of steel, featuring high thermal conductivity and low thermal expansion. The composite material of SiC and Si is poreless and has a particle prevention effect, making it suitable for wafer chucks. 【Main Features】 ■ Lightweight ■ High Rigidity ■ High Thermal Conductivity ■ Low Thermal Expansion ■ Wear Resistance 【Adoption Effects】 JFC's unique composite material MMC (Metal Matrix Composites) brings numerous benefits, such as improved equipment performance and energy efficiency due to its lightweight and high rigidity, solutions to thermal issues from high thermal conductivity and low thermal expansion, and reduced assembly man-hours through the integration of parts using casting methods. It is being adopted in various fields. *For details, please refer to the materials available for download via the PDF button. We also welcome inquiries through the contact button.

The high-rigidity aluminum alloy MA101 was born by adding metal elements to aluminum. It has a higher specific rigidity than conventional aluminum and steel, contributing to the acceleration, high precision, and space-saving of devices. MA101 is a jointly developed product with Tajima Lightweight Metals Co., Ltd. We exhibited MA101 for the first time at the exhibition below. Many people visited during the event. Thank you very much. 【MA101 Exhibition Information】 9th Kansai Metal Japan (High-Function Metal Exhibition) Date: May 11 (Wednesday) to May 13 (Friday), 2022, 10:00 AM to 5:00 PM Venue: Intex Osaka Booth No. 22-4, Tajima Lightweight Metals Co., Ltd. (our partner company) *For details, please refer to the PDF data available via the download button.

With the new introduction of the "Zygo laser interferometer" and "ultra-precision surface grinding machine," we are now able to deliver ceramic parts and metal matrix composite (MMC) parts with even higher precision. We also meet the advanced demands of cutting-edge fields such as "semiconductors" and "space." We provide optimal solutions from our extensive lineup. Please feel free to consult with us. ■ Laser interferometer: Evaluates surfaces of up to 450mm x 1,000mm with nm precision, one of the largest in Japan. ■ Ultra-precision surface grinding machine: Ultra-high precision (below 1μm) with versatile shape processing (straight, flat, uneven, etc.).

With the expansion of the semiconductor manufacturing equipment market, procurement issues related to ceramics have arisen. In particular, large alumina components have limited suppliers, and extended lead times are impacting equipment development schedules. The ceramic-metal composite material SA701 has slightly lower Young's modulus and bending strength compared to alumina, but it has high fracture toughness and is less prone to cracking, making it easy to handle. Its density is about 3/4 that of alumina, and it can be machined for direct threading, eliminating the need for metal bushings and enabling weight reduction. We encourage you to consider the adoption of metal-ceramic composite materials, which excel in producing larger components compared to alumina. *For more details, please refer to the materials available for download via the PDF button. We also welcome any questions or inquiries through the contact button.*

The manufacturing of hollow structures has become possible by joining MMCs together. It is possible to flow refrigerants or gases through the internal channels formed by the joining technology. MMCs, characterized by high thermal conductivity and low thermal expansion, experience minimal thermal deformation due to temperature changes, preventing adverse effects on the components they are integrated with. <Applications for Cooling Jackets> Prevention of arcing due to reduced thermal expansion differences with alumina ESC, improved etching rates due to high thermal conductivity and low thermal expansion. <Applications for Wafer Chucks> Stable measurements and expanded test temperature ranges due to high rigidity, high thermal conductivity, and low thermal expansion. 【Features of MMC】 ■ Weight comparable to aluminum, about 1/3 that of iron ■ Rigidity equivalent to that of iron and steel, resistant to bending ■ High thermal conductivity and heat dissipation ■ Minimal thermal shrinkage 【Joining Methods】 ● Brazing: Joining using a filler material with a lower melting point than the base material. ● Diffusion bonding: Joining by closely adhering materials and diffusing the atoms at the bonding interface. *Joining of dissimilar materials is also possible (consultation for joinable materials is available). *There is also a track record of joining multiple sheets. For more details, please download the catalog or contact us.

<JGC Group Exhibition Overview> Since its founding, the JGC Group has contributed to various fields, including EPC (Engineering, Procurement, Construction) for plants and factories, particularly in oil refining and natural gas, as well as in diverse businesses such as the manufacturing of catalysts and fine ceramics. In the semiconductor field, we support the semiconductor industry from multiple angles, focusing on "design and construction of semiconductor-related factories," "components for semiconductor manufacturing equipment," and "materials for semiconductor materials." <JFC Exhibits> In the Japan Fine Ceramics corner, we will introduce products and application examples related to semiconductors. ● Guide beams made of metal-ceramic composite materials ● Large trays, stages, and pin chucks made of SiC ● Ceramic substrates and thin-film metallized substrates ● Solid electrolytes, Li-ion sensing films, SOFC/SOEC cells, pressure sensors for hydrogen environments <Exhibition Dates/Venue> ● Dates: December 13 (Wednesday) to 15 (Friday), 2024, 10:00 AM - 5:00 PM ● Venue: Tokyo Big Sight, East Hall 5, Booth No. 6032 ● JGC Holdings Booth, Japan Fine Ceramics *This exhibition requires prior registration (free admission).

■MMC Adoption Effects Changed the cooling jacket from aluminum to composite material MMC (SA701) - Reduced thermal expansion difference with alumina ESC → Thermal expansion rate equivalent to alumina 7x10^-6/K - Improved thermal conductivity → 15% increase over aluminum (thermal conductivity: 160W/m·K) *Internal flow paths will be formed in the cooling jacket using MMC bonding technology. ■Development Information Currently developing SiC/Si-Al composite materials. Minimizing the thermal expansion difference with the next-generation "Aluminum Nitride ESC." ■High-Precision Processing New equipment has been added to high-precision processing technology, enabling the provision of larger MMC products with even higher precision. ○ Introduction of a laser interferometer (manufactured by Zygo) boasting one of the largest measurement ranges in Japan ○ Introduction of an ultra-high precision surface grinding machine (manufactured by Nagase Integrex) ◆ Exhibiting as the JGC Group at "SEMICON Japan 2025" ◆ Dates: December 17 (Wed) - 19 (Fri), 2025, 10:00-17:00 Venue: Tokyo Big Sight (West Hall 1) Booth: JGC Holdings (Booth No. W1165) We will showcase technology development for composite materials, ceramics, and the semiconductor, environmental, and energy sectors. We look forward to your visit.