スミックス Product Lineup

This is a macro inspection module specialized for detecting microscopic foreign substances on semiconductor wafers. It dramatically speeds up inspections that typically take a long time due to the narrow field of view of high-resolution cameras, using Sumix's unique "foreign substance inspection dedicated dark field optical system." 【Main Features】 ■ Reliable visualization of microscopic foreign substances (PSL) at the 0.1μm level ■ Identification of foreign substances without relying on resolution through the detection of Mie scattered light ■ Overwhelming tact time, scanning 12-inch wafers in as little as 7 seconds ■ Achievement of high S/N ratio with ultra-low noise line sensor cameras In conventional inspection equipment, it was common knowledge that "increasing sensitivity takes more time," but this module achieves both "high sensitivity and ultra-fast speed." It boasts inspection speeds approximately four times faster than industry-standard machines. *For more details, please refer to the catalog or feel free to contact us. *We are currently accepting requests for evaluations of the actual machine. The first sample evaluation will be provided free of charge.

Smix Corporation is a specialized manufacturer of "macro optical inspection" that brings innovation to the inspection processes in the semiconductor industry. We break the industry's common belief that "increasing resolution narrows the field of view and requires longer inspection times" with our unique optical systems and in-house developed line sensor cameras. We have achieved ultra-fast inspection, capturing 12-inch wafers in just 7 seconds, which is four times faster than the industry standard. 【Provided Solutions】 ■ "Dark field optical system" that captures 0.1μm foreign particles on wafers ■ "Off-axis optical system" that visualizes nano-level surface distortions ■ "Measurement correlation technology" that quantifies changes in film thickness and pattern size We offer these advanced optical technologies as "inspection modules" to contribute to the competitiveness of semiconductor and equipment manufacturers. *For more details, please refer to our catalog or feel free to contact us. *We are currently accepting requests for evaluations of the actual equipment. The first sample evaluation will be provided free of charge.