ゲミュージャパン List of Products and Services

In semiconductor manufacturing, especially in cleaning and etching, high-purity and highly corrosive fluids are always used. Additionally, the equipment that supplies these chemicals employs many valves, and the components are constantly subjected to damage. Continuous damage can lead to chemical leaks and various troubles, including: - Significant losses due to reduced semiconductor production capacity - Time losses during recovery operations - Harm to the workers These present various risks. A major factor in valve issues is the corrosion of stainless steel parts caused by highly corrosive chemicals. Over years of use, corrosion begins in stainless steel parts due to chemical permeation, which can lead to accidents caused by valve failures. GENÜ products are designed to address the challenges posed by highly corrosive chemicals: - Standard products use high-purity A4 (equivalent to SUS316L) stainless steel - An optional PFA coating for stainless steel By using our products, you can ensure safe and reliable operation over an extended period. Please feel free to contact us if you are facing any issues!

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• Resist Device
• CMP Equipment

In the supply of CMP slurry, disturbances in the flow within the supply loop can lead to the agglomeration of the slurry. To ensure that particles in the CMP slurry are evenly dispersed, the CMP tool filter is connected upstream to remove coarse particles. The flow optimization design of the GEMÜ valve block reduces the agglomeration of the medium relatively. This extends the lifespan of the filter, increases the replacement intervals, and leads to cost savings. The compatible product range of the GEMÜ PC50 iComLine multi-port valve block The advantage of the POU (Point of Use) box is its compactness, allowing it to be integrated into the intermediate layer of the system. This saves space within the cleanroom. Furthermore, the flow optimization design of the block helps prevent agglomeration of the medium. Depending on the structure of the system, various customization options are available.

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• Other semiconductor manufacturing equipment

GEMU® has provided high-purity plastic block valve solutions that have solved challenging issues in the wet areas of the global semiconductor industry. By minimizing liquid pooling, reducing footprint, and lowering the risk of piping leaks, we support stable semiconductor production. GEMU® has newly announced a modular type. The body, divided into multiple sections, is secured with several rods. This type of block valve offers: - Replaceable parts → Reduction in maintenance costs - A single design that allows for flexible customization of valves according to equipment needs - Individual model types for each part, making procurement easy. In many cases, if a block valve has even minor issues, the entire unit needs to be replaced, leading to high maintenance costs. This design addresses that problem. A single modular design is created during the manufacturing stage, and the number of valves can be adjusted according to customer requests, allowing for flexible designs to be created in a short time based on the situation. The design is handled by an experienced design team at our headquarters in Germany. Please feel free to contact us.

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• Other semiconductor manufacturing equipment

In the semiconductor industry, organic solvents such as isopropanol, acetone, and N-methylpyrrolidone (NMP) are used for the purposes of dissolving and cleaning substances. For example, in the lithography process, photoresist is removed with special solvents. Because these solvents have a low flash point and are conductive, stainless steel components are particularly suitable. GEMÜ offers an optimal product lineup of stainless steel valve components for this application area. - High Kv value - Design that minimizes contamination - Durable actuators and diaphragms GEMÜ valves are well-regarded for these features. They are widely used in semiconductor factories around the world, with over 20 years of proven experience. Semiconductor factories also have the following requirements: - Cleaning products - Explosion-proof compliance - Electro-polishing All of the above can be accommodated. We also handle a wide range of piping connection standards and actuators, allowing us to select the optimal products tailored to our customers' needs.

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• Resist Device

We introduce a fluoropolymer valve that supplies high-purity chemicals in large quantities for cleaning and etching processes in semiconductor production. We have launched a valve that accommodates pipe diameters of 1 1/4 to 2 inches, achieving stable large-volume supply. Despite the large pipe diameter, it realizes space-saving design and high Kv value. This supports stable semiconductor production in semiconductor factories around the world. Additionally, this valve can be used when high flow rates are required under tanks.

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GEMU fluoropolymer valves for semiconductor manufacturing are actively used in chemical and CMP slurry supply equipment in semiconductor factories around the world. Among them, our control valves are also used as pressure relief valves. The pressure relief valve releases pressure on the secondary side to maintain a constant pressure on the primary side, especially to ensure stable supply of chemicals. Maintaining a consistent supply of chemicals, particularly for CMP, is a crucial point for maintaining wafer quality. Therefore, we can offer three types of control valves: - iComLine C50 + GEMU 1434μPos Positioner: Suitable for small flow control, allows for quick ON/OFF operation. - iComLine C53 Electric Control Valve: A valve with finer control, proven performance in CMP applications. - CleanStar C60 + GEMU 1434μPos Positioner: Optimal for CMP, also allows for ON/OFF operation. All of these can be controlled with 4-20mA, and you only need to prepare the valve; no additional components like precision regulators are necessary. Control is possible via a PLC control panel. By managing from the control panel, it also makes it easy to detect anomalies.

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• Other semiconductor manufacturing equipment

The GEMÜ iComLine C58 is a high-purity 3/2-way process valve that switches between two outlets from a supply source. It can also operate in the reverse flow direction. The operation is air-operated. By using this valve, you can achieve: - A reduction in the number of valves previously used for branching, allowing for switching with just this one unit while minimizing connections. - Compact equipment design. Additionally, it features: - A position indicator for visual confirmation of opening and closing. - A leak port for when leaks occur. - Clearance from various durability tests, ensuring excellent safety and fault detection. It uses high-purity PTFE and is effective in semiconductor manufacturing equipment and chemical supply systems related to semiconductor production.

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GEMÜ supports the miniaturization of equipment and facilities for semiconductor factories and chemical plants for semiconductors. The GEMÜ iComLine P35 has achieved industry-leading miniaturization. Through the miniaturization of valves, it has realized: - Improved semiconductor productivity through minimized footprint - Enhanced maintainability within equipment and facilities - Reduced maintenance time - Cost benefits from reduced material usage Even with its compact size, the valve maintains high specifications for pressure resistance and flow rate! Additionally, the mounting of this valve is designed to allow for a neat horizontal arrangement, facilitating a cleaner piping design. By incorporating it into block valves, it further enhances miniaturization with optimal piping. This is a new valve that realizes the saying "time is money" in semiconductor production!

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• Other semiconductor manufacturing equipment

We sell PVDF diaphragm valves equipped with high chemical resistance. They are used in applications that require chemical resistance, such as lines handling strong acidic and alkaline chemicals and semiconductor manufacturing equipment. The features of our products include a liquid-contact part made of PVDF and an outer layer made of highly chemical-resistant reinforced PP in a dual-layer structure. This design achieves: - Reduced use of PVDF resin - Short delivery times - Low-cost production - Chemical resistance equivalent to PVDF Additionally, there are benefits regarding maintenance and various controls, such as: - Easy replacement of the diaphragm - A linear flow path structure that achieves a high Kv value - A structure that minimizes liquid accumulation - Standard equipped position indicator, with options for limit switches and positioners for flow adjustment We offer manual, pneumatic, and electric options. Cleaning options are also available, catering to high purity (for semiconductor manufacturing lines). Furthermore, our block valve solutions enable compact equipment design and improved maintenance.

• Pure water production equipment
• Chemicals
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A new pressure gauge coated with non-metallic all-fluoropolymer has been introduced. It is resistant to damage even when exposed to chemicals from the outside, and all wetted parts are made of fluoropolymer. This eliminates system troubles caused by pressure gauge failures, stabilizes production, and prevents production losses due to production stoppages. Additionally, by replacing pressure gauge products that have repeatedly failed due to external chemicals, the frequency of replacements is reduced. The internal sensor is covered with PTFE and does not come into contact with the fluid. The flow path is designed to be straight, allowing for minimal pressure loss when installing the pressure gauge and enabling easy flow and accurate measurement even with highly viscous fluids. (A connection type with fittings is also available.) As of 2025, the measurement range is 0 to 6 bar, but there are plans to support other ranges in the future. It can be combined with our block valve solutions to propose a more compact system solution.

• Pressure
• CMP Equipment
• Other semiconductor manufacturing equipment

I want to control steam exceeding 200℃... I want to flow corrosive fluids... The 514, which uses metal bellows, is suitable for controlling high-temperature hazardous fluids. The maximum operating temperature is 300℃, and since all wetted parts are made of stainless steel, it can also be used for special corrosive fluids! The gland packing of the drive part (actuator part) is made of "metal bellows," allowing it to handle high-temperature fluids as well. It can be used in angle seat valve type and globe valve type.

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[Question] What is the recommended torque for maintenance of a diaphragm valve? [Answer] The tightening torque varies depending on the size and material of the diaphragm. If the tightening is too strong, it can deform the diaphragm or cause it to wear out more easily, leading to leaks. Please download the diaphragm valve torque table for reference! *The values listed in the data are reference values for appropriate torque to preserve the diaphragm.*

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The demand for cultivation devices and single-use equipment is increasing, and there is significant attention on pinch valves that crush tubes for use. Among those who choose GEMU pinch valves, the following voices are heard: - The point that human errors are less likely to occur during tube replacement - Preference for electric pinch valves that are not solenoid-operated - Quick delivery times - Cost-effective, etc. GEMU, a valve manufacturer that has developed alongside the global pharmaceutical industry and has provided primarily aseptic diaphragm valves for many years, is also recognized worldwide for its pinch valves, which are used in single-use equipment without leaks. Three types of actuators are available: 1. Electric 2. Air-operated stainless steel actuator 3. Air-operated plastic actuator They can be selected according to the application. Control valves (proportional control) using pinch valves are also available. Please check the materials and consult separately.

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● Open/close function or built-in positioner ● Capable of achieving linear characteristics and equal percentage characteristic control curves ● Parameter setting possible via IO Link ● End position programming on-site or remotely via electrical signal input ★ ● Quick and reliable tube replacement ● Easy replacement of inserts and compressors according to various tube sizes on the same actuator ● Optimized compressor minimizes load on the tube ● Can be mounted in various ways to equipment using mounting flange or female threads on the body

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●Simple and intuitive operability ●Minimizes strain on the tube ●Lightweight ●Quick and safe tube replacement ●Easily interchangeable inserts for different tube sizes ●High quality and long lifespan ●Multiple actuator and body configurations available ●Positioners and process controllers are available as options

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The inner surface of the valve body is lined with PFA, providing high chemical resistance. We offer a wide range of options, including mechanical and electric handle locks and proximity switches.

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The interior of the valve body is lined with PFA, providing high chemical resistance. We offer a wide range of options, including mechanical and electric handle locks and proximity switches.

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●Simple and intuitive operability ●Minimizes stress on the tube ●Lightweight ●Quick and safe tube replacement ●Easily interchangeable inserts for different tube sizes ●High quality and long lifespan ●Multiple actuator and body configurations available ●Positioners and process controllers are available as options

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In the rapidly growing market for single-use equipment worldwide, the "Single-Use Diaphragm Valve" significantly enhances fluid control quality. It enables flow control that was not possible with traditional pinch valves (which crush the tube)! 【Features】 - Fluid control capability - Reduction of dead legs - Improved product safety - Equipped with proven actuators - Compatible with various actuation methods, including pneumatic and electric For more details, please refer to the materials or contact us.

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We have developed the world's first single-use diaphragm valve, which enables precise fluid control just like conventional valves. 【Features】 ● The valve body can be removed from the actuator after one use and discarded, reducing cleaning and sterilization time, as well as validation time! (Ideal for processes that require quick and frequent operation) ● As a disposable product, it avoids cross-contamination. ● It can reduce capital investment since it functions as a unit. ● Equipment can be scaled down. ● Various valve body shapes are available, including straight, right angle, and T-type. ● Autoclave-compatible actuator.

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We are proposing the "PFA Lining Diaphragm," which can be supplied in a short delivery time, to customers using PFA lining piping! In recent times, the procurement of fluoropolymer materials has been significantly disrupted worldwide, and we often hear about difficulties in sourcing PFA lining diaphragms. Amid this situation, inquiries about PFA lining diaphragms from GEMU, a global supplier of diaphragm valves, have been increasing. **Features of GEMU PFA Lining Diaphragm:** - All wetted parts are made of PFA and PTFE, suitable for high-purity chemicals and corrosive fluids. - The diaphragm is designed for high durability, capable of withstanding long-term use. - Spark tests are conducted on all lots, providing measures against electrostatic breakdown. - Various actuators, including electric, manual, and automatic, can be installed. - Material selection is available according to application, including SUS and resin. - Options with various feedback switches and controllers for flow control are also available. - The thickness of the PFA lining is around 3mm, designed to be strong against permeation.

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Our company, GEMÜ Japan, is a global supplier of process fluid control equipment (such as valves). ~ Introducing "Valves for Electrolyte/Slurry Applications"! ~ We offer "SUS sanitary valves" that are well-suited for slurries and also suitable for handling electrolytes, as well as "all-fluoropolymer valves" that accommodate low metal content. Additionally, we can manufacture GEMÜ's original customized integrated valves that combine various valves and equipment. 【Benefits of Adoption】 ◆ Reduction of dead space in piping ◆ Simplification of complex piping ◆ Minimization of leakage risks by reducing the number of fittings ◆ Reduction of manufacturing assembly labor ⇒ This greatly contributes to increasing the productivity of our customers' manufacturing processes. *For more details, please view the catalog from [PDF Download] or feel free to [Contact Us].

• Secondary Cells/Batteries

By using GEMÜ's original customized integrated valves, which combine various valves and equipment, we can expect to achieve "reduction of dead space in piping," "simplification of complex piping," "minimization of leakage risks by reducing the number of fittings," and "reduction of manufacturing assembly labor," significantly contributing to increased productivity in the manufacturing process. We have a long track record in industries such as semiconductors, chemicals, and pharmaceuticals, where high-purity liquids and pure water are used. **Features of GEMÜ Customized Valves:** - It is possible to combine filters, flow/temperature/pressure sensors, and check valves into a unit. - Designed for fluid pathways suitable for highly viscous and complex compositions, such as CMP slurries. - Compatible with various materials such as PTFE, PVDF, PP, PVC, and SUS according to the process. - Custom products can be manufactured with equivalent specifications and dimensions for valves that have been discontinued by other companies.

• Other semiconductor manufacturing equipment

This is a check valve (chuck valve) that prevents backflow of fluids in semiconductor manufacturing equipment and chemical piping. All wetted parts, such as springs, are made of PTFE and operate at low cracking pressure. It can seal without an O-ring, making it ideal for high-purity fluids.

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This valve is ideal for the transfer of high-purity chemicals, such as flammable solvents used in semiconductor manufacturing processes and chemical plants. It can be manufactured in various designs to meet your requirements.

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The "GEMÜ Sampling Bottle" was born from the application of GEMÜ's block valve technology. Since the valve can be removed from the piping and transported along with the sampling bottle, the possibility of contaminating the liquid is extremely low, and the safety of the operator can also be maintained! Additionally, GEMÜ's block valve technology enables the reduction of piping space and achieves a dead leg of zero. It can be individually adapted to existing equipment, making it usable for any application (please check the detailed information section for individual adaptation examples).

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It is a fully automatic sampling device for liquids such as WFI and pure steam. Since compressed air is used as the refrigerant, water piping is unnecessary! It is a compact, portable device. 【Features】 - Fully automatic sampling process - Individual setting of sampling volume - Monitoring of pressure and temperature - Only air and power supply are needed on-site - Ensures operator safety - Ideal for clean rooms For more details, please refer to the materials or contact us.

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We will create single-use components that do not yet exist, fully customized! 【Examples of parts】 - Mixer - Distribution plate - Fitting - Sensor block - Sensor holder - Multi-wave lock, etc. If you are using single-use equipment, please take a look at our catalog "Single-Use Components through Complete Customization." Alternatively, feel free to contact us.

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GEMÜ (GEMU) manufactures "multi-functional block valves" that are designed and produced one by one to meet the customer's specifications in a fully customized manner. 【Features】 1. Eliminates concerns about liquid accumulation by minimizing dead legs. 2. Reduces valve piping space by over 50%. 3. Significantly reduces piping labor and material costs. 4. Greatly reduces validation workload. If you are using diaphragm valves, please check the detailed information below.

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GEMÜ's multi-port block valve is designed and manufactured one by one to meet the customer's specifications, fully customized. (Diaphragm valve) 【Features】 1. No concern for liquid accumulation due to zero dead leg 2. Valve piping space can be reduced by over 50% 3. Reduces piping effort and material costs 4. Validation is only required for the block

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We propose a single-use unit (flow path assembly) that can be assembled with existing equipment. 【Features】 - Fully customizable - Ready for operation immediately after installation - Reduced risk of cross-contamination - Lower total production costs - Reduced manufacturing downtime - Quick and easy setup - Reduced cleaning costs If you are looking for information on safety and quality management, please refer to the materials or contact us.

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PFA flare fittings and tubes that can be used in semiconductor manufacturing processes and chemical plant liquid supply applications. The base material of the PFA tube is a semiconductor-grade product compliant with SEMI F57, using DUPON 450HP. We offer over 1,000 variations of fittings, including flare fittings and conversion fittings with JIS threads, as well as reducers. Customized fittings designed to meet specific requirements can also be manufactured.

• Pipe Fittings

【Features】 ● Made of robust aluminum, durable even under harsh conditions such as high temperature and high pressure (special models can withstand up to 300℃) ● Compared to globe valves, it has less pressure loss due to differences in flow path structure, increasing flow rate by 1.3 to 1.5 times ● Characterized by high durability, capable of withstanding over 1 million open and close cycles ● Simple flow path minimizes liquid accumulation and suppresses corrosion ● Easy to maintain

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This is a valve that combines the functionality of a "sanitary valve" designed for aseptic applications and a "control valve" capable of precise flow control in very small amounts. It accommodates flow rates from 80 l/h to 12,500 l/h, depending on specifications. 【Features】 - CIP/SIP capable - Compatible with linear or equal percentage characteristics - Sealed isolation between fluid and actuator - ATEX explosion-proof specifications available as an option

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**Contents of this Catalog** More than half a century ago, when we first debuted our products, creating compact valves became one of GEMU's major missions. From that aspiration, we developed valves that reduce material usage by 50% compared to conventional valves and created block valves that innovate piping structures. Today, we believe that these efforts have borne fruit, contributing to the compactness of equipment and ultimately to energy savings in factories. This is likely why about 80% of the global pharmaceutical industry uses GEMU valves. This catalog introduces how GEMU valves are utilized in various processes across different industries. If you are considering the use of sanitary valves in process industries, please take a look or feel free to contact us.

• Other semiconductor manufacturing equipment

"We solve your filling machine problems." The filling process quickly fills containers with liquid one after another. The valves used in this process particularly require durability and ease of maintenance. The "filling-specific valve" was developed with these performance characteristics in mind. By redesigning from diaphragm valves, we can achieve equipment with significantly higher filling efficiency. Due to its sanitary performance, it can be used not only for food but also in pharmaceutical and chemical applications. For more details, please contact us.

• Filling and bottling machines

【Features】 ● Durable for over 10 million cycles of opening and closing ● GEMU's unique "plug-type diaphragm" technology ● No pockets or liquid traps, offering higher cleanliness compared to bellows types ● Designed with minimal dead leg in accordance with hygiene guidelines ● Easy cartridge replacement enables quick and simple maintenance

• Filling and bottling machines

【Features】 ● Durable for over 10 million cycles of opening and closing ● GEMU's unique "plug-type diaphragm" technology ● Excellent positioning accuracy (approximately ±20μm reproducibility for a total stroke of 6mm) ● Ultra-fast operating speed (up to 200-300mm/s) ● Fill curves can be freely programmed ● Easy cartridge replacement enables quick and efficient maintenance

• Filling and bottling machines

An essential component of sanitary piping design is the "diaphragm valve." At GEMU, we have been advancing the research and development of diaphragm valves for over half a century, with strong connections to the European pharmaceutical industry. During this time, we have focused on developing unique sealing systems and improving the mixing ratios of raw materials. Currently, we hold a significant share in the global pharmaceutical industry, achieving approximately 80% market share in the European market. A summary is available in the downloadable materials. Please take a look.

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【Features】 ● Equipped with a stainless steel actuator that is suitable for various environments ● Achieves high sealing performance even with fluids containing particles ● Compatible with aseptic processes in pharmaceuticals, food, and biotechnology (CIP/SIP capable, autoclave compatible) ● Supports handling of ultra-pure fluids in the semiconductor, microelectronics, and fine chemicals sectors ● Customizable in various materials and specifications ● Minimizes liquid accumulation in flow paths, eliminating corrosion ● Compatible with various connection standards (ASME, ANSI, DIN, ISO, etc.) ● Compact design allows installation in tight spaces ● Optional ATEX explosion-proof specifications available

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【Features】 ● Achieves high sealing performance even with fluids containing particles ● Compatible with aseptic processes in pharmaceuticals, food, and biotechnology (CIP/SIP capable) ● Supports handling of ultra-pure fluids in the semiconductor, microelectronics, and fine chemicals fields ● Customizable in various materials and specifications ● Minimizes liquid accumulation in flow paths, eliminating corrosion ● Equipped with chemical-resistant plastic actuators ● Compatible with various connection standards (ASME, ANSI, DIN, ISO, etc.) ● Optional ATEX explosion-proof specifications available

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GEMÜ manual diaphragm valves (diaphragm valves) are made with chemical-resistant plastic/stainless steel handles, making them suitable for sterile processes in pharmaceuticals, food, and biotechnology. They are fully compatible with CIP/SIP and autoclave processes!

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This is an electric control valve made of fluororesin equipped with a high-precision stepping motor. It allows for precise control of the valve opening using DC24V (power supply) and 4-20mA (analog signal), enabling flow control and back pressure control. Its smooth flow path makes it suitable for fluids with complex compositions, such as CMP slurries. It also supports small flow control of less than 1 l/min.

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GEMÜ Manual Stainless Steel Diaphragm Valve The "653 BioStar" features a heat-resistant and chemically resistant plastic handwheel! The "654 BioStar" is equipped with a stainless steel handwheel! ● Ideal for inert and corrosive liquids and gases ● Chemical-resistant plastic handle ⇒ CIP/SIP compatible, autoclave compatible ● Unaffected by fluids containing particles ● Various options available (proximity switch installation, handle lock, stroke limiter, etc.) Please check the materials for more details.

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【Features】 ● Achieves high sealing performance even with fluids containing particles ● Chemical-resistant plastic handle (CIP/SIP compatible, autoclave compatible) ● Supports ultra-high purity fluid handling in semiconductor, microelectronics, and fine chemical fields ● Customizable in various materials and specifications ● Minimizes liquid accumulation in the flow path, eliminating corrosion occurrence ● Compact design allows installation in narrow spaces ● Stepless adjustment of minimum flow rate with seal adjuster

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