ゲミュージャパン List of Products and Services

By using GEMÜ's original customized integrated valves, which combine various valves and equipment, we can expect to achieve "reduction of dead space in piping," "simplification of complex piping," "minimization of leakage risks by reducing the number of fittings," and "reduction of manufacturing assembly labor," significantly contributing to increased productivity in the manufacturing process. We have a long track record in industries such as semiconductors, chemicals, and pharmaceuticals, where high-purity liquids and pure water are used. **Features of GEMÜ Customized Valves:** - It is possible to combine filters, flow/temperature/pressure sensors, and check valves into a unit. - Designed for fluid pathways suitable for highly viscous and complex compositions, such as CMP slurries. - Compatible with various materials such as PTFE, PVDF, PP, PVC, and SUS according to the process. - Custom products can be manufactured with equivalent specifications and dimensions for valves that have been discontinued by other companies.

This is an electric control valve made of fluororesin equipped with a high-precision stepping motor. It allows for precise control of the valve opening using DC24V (power supply) and 4-20mA (analog signal), enabling flow control and back pressure control. Its smooth flow path makes it suitable for fluids with complex compositions, such as CMP slurries. It also supports small flow control of less than 1 l/min.

This valve is ideal for the transfer of high-purity chemicals, such as flammable solvents used in semiconductor manufacturing processes and chemical plants. It can be manufactured in various designs to meet your requirements.

This is a check valve (chuck valve) that prevents backflow of fluids in semiconductor manufacturing equipment and chemical piping. All wetted parts, such as springs, are made of PTFE and operate at low cracking pressure. It can seal without an O-ring, making it ideal for high-purity fluids.

PFA flare fittings and tubes that can be used in semiconductor manufacturing processes and chemical plant liquid supply applications. The base material of the PFA tube is a semiconductor-grade product compliant with SEMI F57, using DUPON 450HP. We offer over 1,000 variations of fittings, including flare fittings and conversion fittings with JIS threads, as well as reducers. Customized fittings designed to meet specific requirements can also be manufactured.

All materials for the tube, float, and union are made of PVDF, which has excellent corrosion resistance, making it ideal for high-purity fluids. Custom-made graduated tubes can be produced to match the type of fluid and your desired scale.

The C38 type is a non-contact ultrasonic flowmeter for liquids. Since there are no moving parts or obstacles inside the measurement tube, there is almost no pressure loss and cleaning is easy. All wetted parts are made of PFA, and the electronic circuit section is completely covered with polypropylene, providing excellent corrosion resistance. It is ideal for erosive and corrosive fluids, as well as high-purity liquids. • Optimal for pulsating fluids with a measurement frequency of 250 times per second • Abundant PC software with analytical functions • Measurement error is ±0.5% • Digital input and output can be set individually • Standard equipped with an analog output cable • Process parameters can be programmed arbitrarily

This is a fluororesin valve designed for chemical piping in semiconductor manufacturing equipment and chemical plants. It features a diaphragm valve structure with low resistance, making it ideal for viscous liquids such as CMP slurry. Due to its low-resistance design, it can offer flow capacity more than twice that of competitors in certain sizes. Additionally, the body shape minimizes liquid accumulation, reducing the risk of contamination.

This is a fluororesin diaphragm valve (diaphragm valve) for chemical piping in semiconductor manufacturing equipment and chemical plants. It is compact and has high durability, capable of withstanding over 5 million open and close cycles. The flow path is smooth with a structure that minimizes dead space. It has a built-in auxiliary spring, which maintains sealing performance by pressing the diaphragm even if the resin deforms in low-temperature environments. It can also be manufactured with a maximum operating temperature specification of 180°C.

The C30 model is equipped with a high-quality Teflon-coated stainless steel gauge. It features a metal-free structure primarily designed for the semiconductor and microelectronics industries. Since all wetted parts are made of PTFE or PFA, it is suitable for corrosive and corrosive fluids, as well as high-purity fluids. The three-layer diaphragm structure ensures reliable isolation between the process fluid and the sensor, guaranteeing stable measurements over the long term.

The C31 type is a high-quality pressure transmitter that operates with a pressure medium. It features a metal-free structure primarily designed for the semiconductor and microelectronics industries. Since all wetted parts are made of PTFE or PFA, it is ideal for corrosive and aggressive fluids, as well as high-purity fluids. The three-layer diaphragm structure ensures reliable isolation between the process fluid and the sensor, guaranteeing stable measurements over the long term.

GEMÜ's multi-port block valves are designed and manufactured one by one to meet the customer's specifications, fully customized. With a space-saving design using a manifold, the number of connection points is minimal, which also reduces the risk of leaks. ★ Advantages of Multi-Port Block Valves 1. There is no dead leg, so there is no concern about liquid accumulation. 2. The piping space for the valves is reduced by more than 50%. 3. It can reduce the labor and material costs associated with piping.

We sell PVDF diaphragm valves equipped with high chemical resistance. They are used in applications that require chemical resistance, such as lines handling strong acidic and alkaline chemicals and semiconductor manufacturing equipment. The features of our products include a liquid-contact part made of PVDF and an outer layer made of highly chemical-resistant reinforced PP in a dual-layer structure. This design achieves: - Reduced use of PVDF resin - Short delivery times - Low-cost production - Chemical resistance equivalent to PVDF Additionally, there are benefits regarding maintenance and various controls, such as: - Easy replacement of the diaphragm - A linear flow path structure that achieves a high Kv value - A structure that minimizes liquid accumulation - Standard equipped position indicator, with options for limit switches and positioners for flow adjustment We offer manual, pneumatic, and electric options. Cleaning options are also available, catering to high purity (for semiconductor manufacturing lines). Furthermore, our block valve solutions enable compact equipment design and improved maintenance.

A new pressure gauge coated with non-metallic all-fluoropolymer has been introduced. It is resistant to damage even when exposed to chemicals from the outside, and all wetted parts are made of fluoropolymer. This eliminates system troubles caused by pressure gauge failures, stabilizes production, and prevents production losses due to production stoppages. Additionally, by replacing pressure gauge products that have repeatedly failed due to external chemicals, the frequency of replacements is reduced. The internal sensor is covered with PTFE and does not come into contact with the fluid. The flow path is designed to be straight, allowing for minimal pressure loss when installing the pressure gauge and enabling easy flow and accurate measurement even with highly viscous fluids. (A connection type with fittings is also available.) As of 2025, the measurement range is 0 to 6 bar, but there are plans to support other ranges in the future. It can be combined with our block valve solutions to propose a more compact system solution.

We are proposing the "PFA Lining Diaphragm," which can be supplied in a short delivery time, to customers using PFA lining piping! In recent times, the procurement of fluoropolymer materials has been significantly disrupted worldwide, and we often hear about difficulties in sourcing PFA lining diaphragms. Amid this situation, inquiries about PFA lining diaphragms from GEMU, a global supplier of diaphragm valves, have been increasing. **Features of GEMU PFA Lining Diaphragm:** - All wetted parts are made of PFA and PTFE, suitable for high-purity chemicals and corrosive fluids. - The diaphragm is designed for high durability, capable of withstanding long-term use. - Spark tests are conducted on all lots, providing measures against electrostatic breakdown. - Various actuators, including electric, manual, and automatic, can be installed. - Material selection is available according to application, including SUS and resin. - Options with various feedback switches and controllers for flow control are also available. - The thickness of the PFA lining is around 3mm, designed to be strong against permeation.

GEMÜ supports the miniaturization of equipment and facilities for semiconductor factories and chemical plants for semiconductors. The GEMÜ iComLine P35 has achieved industry-leading miniaturization. Through the miniaturization of valves, it has realized: - Improved semiconductor productivity through minimized footprint - Enhanced maintainability within equipment and facilities - Reduced maintenance time - Cost benefits from reduced material usage Even with its compact size, the valve maintains high specifications for pressure resistance and flow rate! Additionally, the mounting of this valve is designed to allow for a neat horizontal arrangement, facilitating a cleaner piping design. By incorporating it into block valves, it further enhances miniaturization with optimal piping. This is a new valve that realizes the saying "time is money" in semiconductor production!

The GEMÜ iComLine C58 is a high-purity 3/2-way process valve that switches between two outlets from a supply source. It can also operate in the reverse flow direction. The operation is air-operated. By using this valve, you can achieve: - A reduction in the number of valves previously used for branching, allowing for switching with just this one unit while minimizing connections. - Compact equipment design. Additionally, it features: - A position indicator for visual confirmation of opening and closing. - A leak port for when leaks occur. - Clearance from various durability tests, ensuring excellent safety and fault detection. It uses high-purity PTFE and is effective in semiconductor manufacturing equipment and chemical supply systems related to semiconductor production.

In the semiconductor industry, organic solvents such as isopropanol, acetone, and N-methylpyrrolidone (NMP) are used for the purposes of dissolving and cleaning substances. For example, in the lithography process, photoresist is removed with special solvents. Because these solvents have a low flash point and are conductive, stainless steel components are particularly suitable. GEMÜ offers an optimal product lineup of stainless steel valve components for this application area. - High Kv value - Design that minimizes contamination - Durable actuators and diaphragms GEMÜ valves are well-regarded for these features. They are widely used in semiconductor factories around the world, with over 20 years of proven experience. Semiconductor factories also have the following requirements: - Cleaning products - Explosion-proof compliance - Electro-polishing All of the above can be accommodated. We also handle a wide range of piping connection standards and actuators, allowing us to select the optimal products tailored to our customers' needs.

GEMU fluoropolymer valves for semiconductor manufacturing are actively used in chemical and CMP slurry supply equipment in semiconductor factories around the world. Among them, our control valves are also used as pressure relief valves. The pressure relief valve releases pressure on the secondary side to maintain a constant pressure on the primary side, especially to ensure stable supply of chemicals. Maintaining a consistent supply of chemicals, particularly for CMP, is a crucial point for maintaining wafer quality. Therefore, we can offer three types of control valves: - iComLine C50 + GEMU 1434μPos Positioner: Suitable for small flow control, allows for quick ON/OFF operation. - iComLine C53 Electric Control Valve: A valve with finer control, proven performance in CMP applications. - CleanStar C60 + GEMU 1434μPos Positioner: Optimal for CMP, also allows for ON/OFF operation. All of these can be controlled with 4-20mA, and you only need to prepare the valve; no additional components like precision regulators are necessary. Control is possible via a PLC control panel. By managing from the control panel, it also makes it easy to detect anomalies.

In the supply of CMP slurry, disturbances in the flow within the supply loop can lead to the agglomeration of the slurry. To ensure that particles in the CMP slurry are evenly dispersed, the CMP tool filter is connected upstream to remove coarse particles. The flow optimization design of the GEMÜ valve block reduces the agglomeration of the medium relatively. This extends the lifespan of the filter, increases the replacement intervals, and leads to cost savings. The compatible product range of the GEMÜ PC50 iComLine multi-port valve block The advantage of the POU (Point of Use) box is its compactness, allowing it to be integrated into the intermediate layer of the system. This saves space within the cleanroom. Furthermore, the flow optimization design of the block helps prevent agglomeration of the medium. Depending on the structure of the system, various customization options are available.

In semiconductor manufacturing, especially in cleaning and etching, high-purity and highly corrosive fluids are always used. Additionally, the equipment that supplies these chemicals employs many valves, and the components are constantly subjected to damage. Continuous damage can lead to chemical leaks and various troubles, including: - Significant losses due to reduced semiconductor production capacity - Time losses during recovery operations - Harm to the workers These present various risks. A major factor in valve issues is the corrosion of stainless steel parts caused by highly corrosive chemicals. Over years of use, corrosion begins in stainless steel parts due to chemical permeation, which can lead to accidents caused by valve failures. GENÜ products are designed to address the challenges posed by highly corrosive chemicals: - Standard products use high-purity A4 (equivalent to SUS316L) stainless steel - An optional PFA coating for stainless steel By using our products, you can ensure safe and reliable operation over an extended period. Please feel free to contact us if you are facing any issues!

We introduce a fluoropolymer valve that supplies high-purity chemicals in large quantities for cleaning and etching processes in semiconductor production. We have launched a valve that accommodates pipe diameters of 1 1/4 to 2 inches, achieving stable large-volume supply. Despite the large pipe diameter, it realizes space-saving design and high Kv value. This supports stable semiconductor production in semiconductor factories around the world. Additionally, this valve can be used when high flow rates are required under tanks.