ゲミュージャパン List of Products and Services

By using GEMÜ's original customized integrated valves, which combine various valves and equipment, we can expect to achieve "reduction of dead space in piping," "simplification of complex piping," "minimization of leakage risks by reducing the number of fittings," and "reduction of manufacturing assembly labor," significantly contributing to increased productivity in the manufacturing process. We have a long track record in industries such as semiconductors, chemicals, and pharmaceuticals, where high-purity liquids and pure water are used. **Features of GEMÜ Customized Valves:** - It is possible to combine filters, flow/temperature/pressure sensors, and check valves into a unit. - Designed for fluid pathways suitable for highly viscous and complex compositions, such as CMP slurries. - Compatible with various materials such as PTFE, PVDF, PP, PVC, and SUS according to the process. - Custom products can be manufactured with equivalent specifications and dimensions for valves that have been discontinued by other companies.

This valve is ideal for the transfer of high-purity chemicals, such as flammable solvents used in semiconductor manufacturing processes and chemical plants. It can be manufactured in various designs to meet your requirements.

This is an electric control valve made of fluororesin equipped with a high-precision stepping motor. It allows for precise control of the valve opening using DC24V (power supply) and 4-20mA (analog signal), enabling flow control and back pressure control. Its smooth flow path makes it suitable for fluids with complex compositions, such as CMP slurries. It also supports small flow control of less than 1 l/min.

This is a fluororesin diaphragm valve (diaphragm valve) for chemical piping in semiconductor manufacturing equipment and chemical plants. It is compact and has high durability, capable of withstanding over 5 million open and close cycles. The flow path is smooth with a structure that minimizes dead space. It has a built-in auxiliary spring, which maintains sealing performance by pressing the diaphragm even if the resin deforms in low-temperature environments. It can also be manufactured with a maximum operating temperature specification of 180°C.

This is a fluororesin valve designed for chemical piping in semiconductor manufacturing equipment and chemical plants. It features a diaphragm valve structure with low resistance, making it ideal for viscous liquids such as CMP slurry. Due to its low-resistance design, it can offer flow capacity more than twice that of competitors in certain sizes. Additionally, the body shape minimizes liquid accumulation, reducing the risk of contamination.

This is a check valve (chuck valve) that prevents backflow of fluids in semiconductor manufacturing equipment and chemical piping. All wetted parts, such as springs, are made of PTFE and operate at low cracking pressure. It can seal without an O-ring, making it ideal for high-purity fluids.

The C30 model is equipped with a high-quality Teflon-coated stainless steel gauge. It features a metal-free structure primarily designed for the semiconductor and microelectronics industries. Since all wetted parts are made of PTFE or PFA, it is suitable for corrosive and corrosive fluids, as well as high-purity fluids. The three-layer diaphragm structure ensures reliable isolation between the process fluid and the sensor, guaranteeing stable measurements over the long term.

The C31 type is a high-quality pressure transmitter that operates with a pressure medium. It features a metal-free structure primarily designed for the semiconductor and microelectronics industries. Since all wetted parts are made of PTFE or PFA, it is ideal for corrosive and aggressive fluids, as well as high-purity fluids. The three-layer diaphragm structure ensures reliable isolation between the process fluid and the sensor, guaranteeing stable measurements over the long term.

The C38 type is a non-contact ultrasonic flowmeter for liquids. Since there are no moving parts or obstacles inside the measurement tube, there is almost no pressure loss and cleaning is easy. All wetted parts are made of PFA, and the electronic circuit section is completely covered with polypropylene, providing excellent corrosion resistance. It is ideal for erosive and corrosive fluids, as well as high-purity liquids. • Optimal for pulsating fluids with a measurement frequency of 250 times per second • Abundant PC software with analytical functions • Measurement error is ±0.5% • Digital input and output can be set individually • Standard equipped with an analog output cable • Process parameters can be programmed arbitrarily

PFA flare fittings and tubes that can be used in semiconductor manufacturing processes and chemical plant liquid supply applications. The base material of the PFA tube is a semiconductor-grade product compliant with SEMI F57, using DUPON 450HP. We offer over 1,000 variations of fittings, including flare fittings and conversion fittings with JIS threads, as well as reducers. Customized fittings designed to meet specific requirements can also be manufactured.

GEMÜ's multi-port block valves are designed and manufactured one by one to meet the customer's specifications, fully customized. With a space-saving design using a manifold, the number of connection points is minimal, which also reduces the risk of leaks. ★ Advantages of Multi-Port Block Valves 1. There is no dead leg, so there is no concern about liquid accumulation. 2. The piping space for the valves is reduced by more than 50%. 3. It can reduce the labor and material costs associated with piping.

A new pressure gauge coated with non-metallic all-fluoropolymer has been introduced. It is resistant to damage even when exposed to chemicals from the outside, and all wetted parts are made of fluoropolymer. This eliminates system troubles caused by pressure gauge failures, stabilizes production, and prevents production losses due to production stoppages. Additionally, by replacing pressure gauge products that have repeatedly failed due to external chemicals, the frequency of replacements is reduced. The internal sensor is covered with PTFE and does not come into contact with the fluid. The flow path is designed to be straight, allowing for minimal pressure loss when installing the pressure gauge and enabling easy flow and accurate measurement even with highly viscous fluids. (A connection type with fittings is also available.) As of 2025, the measurement range is 0 to 6 bar, but there are plans to support other ranges in the future. It can be combined with our block valve solutions to propose a more compact system solution.

GEMÜ supports the miniaturization of equipment and facilities for semiconductor factories and chemical plants for semiconductors. The GEMÜ iComLine P35 has achieved industry-leading miniaturization. Through the miniaturization of valves, it has realized: - Improved semiconductor productivity through minimized footprint - Enhanced maintainability within equipment and facilities - Reduced maintenance time - Cost benefits from reduced material usage Even with its compact size, the valve maintains high specifications for pressure resistance and flow rate! Additionally, the mounting of this valve is designed to allow for a neat horizontal arrangement, facilitating a cleaner piping design. By incorporating it into block valves, it further enhances miniaturization with optimal piping. This is a new valve that realizes the saying "time is money" in semiconductor production!

The GEMÜ iComLine C58 is a high-purity 3/2-way process valve that switches between two outlets from a supply source. It can also operate in the reverse flow direction. The operation is air-operated. By using this valve, you can achieve: - A reduction in the number of valves previously used for branching, allowing for switching with just this one unit while minimizing connections. - Compact equipment design. Additionally, it features: - A position indicator for visual confirmation of opening and closing. - A leak port for when leaks occur. - Clearance from various durability tests, ensuring excellent safety and fault detection. It uses high-purity PTFE and is effective in semiconductor manufacturing equipment and chemical supply systems related to semiconductor production.

In the supply of CMP slurry, disturbances in the flow within the supply loop can lead to the agglomeration of the slurry. To ensure that particles in the CMP slurry are evenly dispersed, the CMP tool filter is connected upstream to remove coarse particles. The flow optimization design of the GEMÜ valve block reduces the agglomeration of the medium relatively. This extends the lifespan of the filter, increases the replacement intervals, and leads to cost savings. The compatible product range of the GEMÜ PC50 iComLine multi-port valve block The advantage of the POU (Point of Use) box is its compactness, allowing it to be integrated into the intermediate layer of the system. This saves space within the cleanroom. Furthermore, the flow optimization design of the block helps prevent agglomeration of the medium. Depending on the structure of the system, various customization options are available.

In semiconductor manufacturing, especially in cleaning and etching, high-purity and highly corrosive fluids are always used. Additionally, the equipment that supplies these chemicals employs many valves, and the components are constantly subjected to damage. Continuous damage can lead to chemical leaks and various troubles, including: - Significant losses due to reduced semiconductor production capacity - Time losses during recovery operations - Harm to the workers These present various risks. A major factor in valve issues is the corrosion of stainless steel parts caused by highly corrosive chemicals. Over years of use, corrosion begins in stainless steel parts due to chemical permeation, which can lead to accidents caused by valve failures. GENÜ products are designed to address the challenges posed by highly corrosive chemicals: - Standard products use high-purity A4 (equivalent to SUS316L) stainless steel - An optional PFA coating for stainless steel By using our products, you can ensure safe and reliable operation over an extended period. Please feel free to contact us if you are facing any issues!

We introduce a fluoropolymer valve that supplies high-purity chemicals in large quantities for cleaning and etching processes in semiconductor production. We have launched a valve that accommodates pipe diameters of 1 1/4 to 2 inches, achieving stable large-volume supply. Despite the large pipe diameter, it realizes space-saving design and high Kv value. This supports stable semiconductor production in semiconductor factories around the world. Additionally, this valve can be used when high flow rates are required under tanks.