ティー・ケイ・エス List of Products and Services

We handle the 'Star.500-EOSS(R)' from the German company FHR. The 'Star.500-EOSS(R)' is a magnetron sputtering system designed for optical filter film deposition. To minimize particles during film deposition, a sputter-up method is employed. It accommodates flat and curved substrates up to 200mm in diameter, and a substrate heating mechanism can also be integrated. 【Features and Benefits】 ■ Outstanding reproducibility of optical multilayer films ■ Excellent film thickness uniformity ■ Improvement in film quality and defect-free deposition achieved through the combination of a cylindrical sputter cathode and sputter-up ■ Long target life and minimized variations in deposition rate due to cylindrical targets ■ Fully automated process control *For more details, please download the PDF or contact us.

We will demonstrate our capabilities in the stable production of high-performance optical filters that require multilayering and high reproducibility, such as LiDAR applications, which are expected to see significant demand in the future. - Film formation that eliminates the effects of film quality changes due to target wear using a cylindrical cathode - Stable film formation of oxide films using a reactive ion source - Film formation of a wide range of multilayer films with up to four cathodes This is a device specialized for high-quality optical thin film deposition. Features: ■ Outstanding reproducibility of optical multilayer films ■ Excellent film thickness uniformity ■ Improvement of film quality and defect-free deposition through the combination of cylindrical cathodes and sputter-up ■ Continuous monitoring of the film formation state through in-situ monitoring ■ Fully automated process control *For more details, please refer to the PDF document or feel free to contact us.

The "DSU Series" is a sublimation purification device for high-purity organic materials developed based on "QUANTIpure Technology," which was created from accumulated process data in organic electronics research. It achieves both high yield and ultra-high purity through a unique purification system born from the redefinition of the sublimation purification process. Once the raw materials are loaded, the entire operation is controlled automatically, and no operator intervention is required until the purification is complete. We offer models that can handle not only small-scale purification of 5g but also large-scale purification of 10kg. All background tasks, such as preparation for operation and product recovery, can be completed by a single operator. 【Features】 ■ Wide range of needs from development to mass production ■ Temperature and pressure control through auto process control ■ Purification from 5g suitable for experiments and development to 10kg/run for mass production ■ Purity of 99.99% and yield of 98% (after the second purification) ■ Space-saving vertical design for installation ■ All tasks can be completed by one operator * You can view the product documentation (in English) via "PDF Download." Please feel free to contact us with any inquiries. * Related product videos can also be viewed at the bottom of this screen.

The "FHR.STAR-400x300SALD" is a high-speed deposition ALD (Spatial ALD) system designed for film deposition on substrates and textiles ranging from 200mm wafers to 400x300mm. It enables uniform film deposition on three-dimensional shapes up to 10mm thick for 400x300 substrates. Due to its faster deposition compared to conventional thermal ALD methods, it can be used for mass production of devices and is designed to accommodate in-situ ellipsometers and transmission spectrometers, allowing for more precise process control. With a cluster-compatible design, it can integrate transport chambers, load locks, and other process chambers as needed. We also offer equipment compatible with small-diameter wafers, so please inquire for more information. 【Features】 ■ Uniform film deposition on three-dimensional shapes up to 10mm thick (for 400x300 substrates) ■ Faster deposition compared to conventional thermal ALD methods ■ Usable for mass production of devices *You can download the English version of the catalog. *For more details, please refer to the PDF materials or feel free to contact us.

Achieving both stable film formation and cost reduction. This is a high-performance, high-quality "Magnetron Sputter Cathode" manufactured by American Angstrom Science. By adopting the patented Shaped Magnet technology, it utilizes a wide area of the target, making it less likely for changes in the sputtering state due to erosion to occur, thus achieving stable film formation and cost reduction for target replacement. 【Features】 ■ Shaped Magnet high-efficiency technology cathode: Achieves high film formation efficiency and stability ■ Reusable targets: Allows for the reuse of your existing targets, reducing costs ■ Balancing stable film formation and cost reduction: Minimal changes in sputtering state due to erosion, reducing target replacement costs ■ Compatible with existing sputtering equipment from various manufacturers: Can be adapted to other companies' equipment ■ High vacuum compatible: Usable in high vacuum environments suitable for a wide range of applications ■ Compatible with target sizes from φ1 inch to φ12 inches: Flexible selection of target sizes ■ Abundant optional features: Various options available, including shutters and tilt angles *For more details, please refer to the PDF document or feel free to contact us.

The ion beam etching equipment manufactured by AVP Technology is a production device equipped with an ICP ion source, offering high uniformity, high etching rates, and excellent operational reproducibility and stability. Compared to other companies' IBE devices, it achieves stable operation, which is essential for manufacturing facilities, through its superior control system. The latest drive mechanism minimizes latency time, thereby improving productivity.

This is a high-speed ion beam sputtering (IBD) device that excels in the deposition of dielectrics such as Al2O3 and SiO2, which typically have low deposition rates in conventional magnetron sputtering, as well as ferromagnetic materials like Fe. By using a helicon plasma source as the ion source and a groundbreaking method that accelerates the high-density ions obtained from it through the application of bias voltage to the target, it achieves high-rate and highly directional film deposition. It also contributes to cost reduction in deposition processes using valuable and rare targets by efficiently utilizing the entire target surface. <Features> ■ High-speed, high-efficiency ion beam sputtering Optimal solution for dielectric and ferromagnetic targets ■ Helicon plasma ion source and target application Achieving both high-speed sputtering and low contamination Reduction of running costs through improved target utilization efficiency Maintenance reduction due to gridless structure Sputtering while keeping the substrate at low temperature through remote plasma configuration ■ Wafer processing Improved step coverage Composite film deposition using cluster tools ■ Excellent directionality Uniform film thickness can be achieved with a highly directional ion beam, resulting in excellent step coverage in film deposition.

Independent current control is performed for the ion source, target, and substrate. With independent control, not only the sputter rate but also various reactive sputtering processes such as oxide and nitride films can be freely controlled. This device strongly supports advanced material research and process development, enabling the deposition of difficult-to-deposit materials such as ferromagnetic films, Co-sputtering of metal and ceramic targets, and dielectric/insulating films from metal targets. Independent control of ion supply and sputter rate → Control of sputter rate, film quality, and crystal structure → Control of ionization rate of target materials High-directionality film deposition → High-directionality film deposition characteristic of ion beam sputtering Multi-target mechanism → Wide-ranging multilayer film deposition Independent control of multiple targets → Co-sputtering alloy deposition by controlling the sputter rate of each target → Multilayer deposition by switching targets Conformal film deposition through bias application control to the substrate → Conformal film deposition even under adverse conditions such as deep trenches and overhangs.

PlasmaQuest is a reputable company with a 25-year history in the development and sales of helicon-type high-density ion sources and related application products. The gridless helicon plasma source generates high-density plasma and continues to provide OEM supply to many equipment manufacturers. Utilizing this high-quality plasma source as an ion source, the groundbreaking "HiTUS" system applies bias to the target, enabling sputtering under various conditions and with different targets. It allows for sputtering of high magnetic targets and high dielectric targets, which are considered difficult with conventional magnetron sputtering devices, as well as co-sputtering using heterogeneous targets such as metals and ceramics, making it suitable for a wide range of applications. The company is equipped to flexibly respond to both research applications and production-scale equipment.

HiTUS Technology Independent current control is performed for the ion source, target, and substrate. With independent control, it becomes possible to freely control not only the sputter rate but also various reactive sputtering processes such as oxide films and nitride films. We strongly support advanced materials research and process development for applications that have been considered difficult with conventional sputtering equipment, such as ferromagnetic film deposition, co-sputtering of metal and ceramic targets, and dielectric/insulating film deposition from metal targets.

-TKS's Equipment Lifespan Extension Service- Many devices used in domestic semiconductor and electronic device manufacturing have been in operation for over 20 years since their introduction, and many essential devices are still in operation. However, it is not uncommon for modules and parts used in these devices to have already been discontinued. By using current products for the repair and regeneration of worn, degraded, or broken modules, we contribute to the stable operation of the equipment. Additionally, please consult us about domestic production of parts aimed at stable supply and cost reduction. -Extension of Lifespan through Servo Motor and Driver Replacement- Many servo motors are used in operating equipment, but the motor drivers and motors are updated and discontinued every few years even while the equipment is in operation. If a motor driver or motor used in long-operating equipment fails, the only options until now have been to search for used parts or repair them. In such cases, if "no used parts are available!" or "repair is not possible!", the options may be limited to using the equipment within a feasible range or ceasing operation and purchasing new equipment. Our company has sought solutions to such problems and has achieved results.

By using a helicon plasma source as the ion source, this groundbreaking method accelerates high-density ions obtained from it by applying a bias voltage to the target, achieving high-rate and highly directional film deposition. Independent current control for the ion source, target, and substrate allows for precise control of not only the sputtering rate but also various reactive sputtering processes such as oxide and nitride films. It enables high-rate film deposition of materials that are difficult to deposit with conventional equipment, such as ferromagnetic materials and dielectric/insulating films from metal targets. <Features> ■ High-speed, high-efficiency ion beam sputtering Optimal solution for dielectric and ferromagnetic targets ■ Helicon plasma ion source and target application Achieves both high-speed sputtering and low contamination Reduces running costs by improving target utilization efficiency Low maintenance due to gridless structure Sputtering while keeping the substrate at low temperatures through remote plasma configuration ■ Single wafer processing Improved step coverage Composite film deposition using cluster tools ■ Excellent directionality High-directionality ion beams enable uniform film thickness deposition, resulting in excellent step coverage in film formation.

In the semiconductor industry, achieving ultra-high purity of materials is essential to maximize device performance. Particularly in organic EL and organic semiconductor materials, the presence of impurities is a significant factor in performance degradation. Our ultra-high purity, high-yield sublimation purification equipment achieves a purity of 99.99% and a yield of 98% (after the second purification), addressing the challenge of enhancing the purity of semiconductor materials. 【Application Scenarios】 - Purification of organic EL materials - Purification of organic semiconductor materials - Purification of other semiconductor materials requiring high purity 【Benefits of Implementation】 - Improved device performance - Cost reduction through increased yield - Strengthened competitiveness through the supply of high-quality materials

In the thin film process of the display industry, the purity and yield of organic materials are crucial to ensuring high-quality display performance. In particular, impurities in organic materials that affect the uniformity and durability of thin films can lead to reduced yield and performance degradation of the products. Our ultra-high purity and ultra-high yield sublimation purification equipment achieves both high purity and high yield, strongly supporting the thin film process in display manufacturing. 【Usage Scenarios】 - Manufacturing of organic EL displays - Manufacturing of organic thin-film solar cells - Development of high-performance display materials 【Effects of Implementation】 - Improved yield through stable supply of high-purity materials - Reduction in material costs - Enhanced product performance through high-quality thin film formation

In the solar cell industry, the improvement of conversion efficiency is always sought after. Particularly in organic solar cells, the purity of materials greatly influences performance. Impurities hinder charge movement and lead to decreased efficiency. Our ultra-high purity, ultra-high yield sublimation purification equipment contributes to improving solar cell efficiency by providing high-purity organic materials. 【Application Scenes】 - Research and development of organic solar cells - Manufacturing processes for solar cell materials - Production of high-performance solar cells using high-purity materials 【Effects of Introduction】 - Improvement in solar cell conversion efficiency due to high-purity materials - Cost reduction through improved yield - Effective use of installation area due to space-saving design

In the organic EL display industry, the purity of luminescent materials greatly affects product performance. In particular, factors such as color reproduction and lifespan are easily influenced by impurities in the materials, making it essential to secure high-purity materials for manufacturing high-quality products. Impurities can also lead to decreased efficiency and accelerated degradation of devices. Our ultra-high-purity sublimation purification equipment achieves both high purity and high yield, contributing to the improvement of luminescent material quality. 【Application Scenarios】 - Purification of luminescent materials in organic EL display manufacturing - Procurement of high-purity materials during the research and development phase - Cost reduction through improved yield 【Effects of Implementation】 - Enhanced device performance with high-purity materials - Reduced material costs due to high yield - Optimization of installation space through space-saving design

In the pharmaceutical industry, advanced purification of raw materials is essential for manufacturing high-quality pharmaceuticals. In particular, contamination with impurities can compromise product quality and potentially affect safety. Our ultra-high-purity organic material sublimation purification equipment achieves both high purity and high yield, optimizing the purification process in pharmaceutical manufacturing. 【Application Scenarios】 - Purification of pharmaceutical active ingredients - Purification of intermediates - Small-scale purification in research and development 【Benefits of Implementation】 - Manufacturing of high-quality pharmaceuticals - Cost reduction through improved yield - Increased efficiency in research and development

In the fragrance industry, securing high-purity raw materials that influence product quality is crucial. In particular, to enhance the persistence and safety of fragrances, raw materials with minimal impurities are required. Impurities can lead to the degradation or alteration of scents. Our ultra-high purity and ultra-high yield sublimation purification equipment enables the refinement of high-purity fragrance raw materials, contributing to the improvement of product quality. 【Application Scenarios】 - Research and development of fragrances - Purification of perfume and cosmetic ingredients - Production of food flavorings 【Benefits of Implementation】 - Improvement in fragrance quality - Yield enhancement - Cost reduction

In the cosmetics industry, the purity and yield of raw materials are crucial for ensuring product quality and safety. Especially when extracting natural-derived ingredients and high-functional components, it is essential to prevent the contamination of impurities and maximize the recovery of active ingredients. Improper refining can lead to a decline in product quality and increased costs. Our ultra-high purity sublimation refining equipment achieves both high purity and high yield, contributing to the improvement of the quality of cosmetic raw materials. [Usage Scenarios] - Extraction of natural-derived ingredients and high-functional components - Small-scale refining in research and development - Securing high-purity raw materials in mass production systems [Effects of Implementation] - Stable supply of high-quality cosmetic raw materials - Reduction of raw material costs - Increased efficiency in research and development

In the electronic materials industry, improving the purity of materials that influence product performance is essential. Particularly in semiconductors and organic EL materials, the contamination of impurities can lead to decreased yield and performance degradation, necessitating a stable supply of high-quality materials. Our ultra-high purity and ultra-high yield sublimation purification equipment achieves both high purity and high yield, contributing to the improvement of electronic material quality. 【Usage Scenarios】 - Purification of semiconductor materials - Purification of organic EL materials - Development of high-functionality materials 【Effects of Implementation】 - Improvement of product yield through enhanced material purity - Enhancement of product performance through stable supply of high-quality materials - Reduction of material costs

In the optical components industry, the purity of materials is crucial for maximizing product performance. In particular, the contamination of impurities that affects light transmittance can lead to a decrease in transparency and potentially compromise product quality. Our ultra-high purity, ultra-high yield sublimation purification equipment contributes to the improvement of optical component transparency. 【Application Scenarios】 - Optical lenses - Displays - Various filters 【Benefits of Implementation】 - Improved material purity - Enhanced transparency - Increased product quality

In the field of space development, reducing the weight of rockets and satellites is an important challenge. Weight reduction allows for lower launch costs and the ability to carry more equipment. Therefore, the use of high-purity, lightweight organic materials is essential. Our ultra-high purity, ultra-high yield sublimation purification equipment enables the refinement of high-purity organic materials, contributing to weight reduction in space development. 【Application Scenarios】 - Rocket components - Satellite components - Space station components 【Benefits of Implementation】 - Manufacturing of lightweight, high-performance components - Cost reduction - Improved reliability

In the fuel cell industry, the performance of catalysts significantly affects the efficiency and lifespan of products. In particular, securing high-purity catalyst materials is essential for improving fuel cell performance. Contamination by impurities can lead to a decrease in catalytic activity and deterioration of durability. Our ultra-high purity, ultra-high yield sublimation purification equipment achieves both high purity and high yield, contributing to the improvement of fuel cell catalyst quality. 【Application Scenarios】 - Research and development of fuel cell catalyst materials - Mass production of fuel cell catalysts - Quality control of high-purity catalyst materials 【Effects of Implementation】 - Improved catalyst performance - Increased efficiency of fuel cells - Reduction in material costs

In the sensor industry, improving material purity is essential to achieve high sensitivity. Particularly in sensors that capture weak signals, the presence of impurities can create noise and potentially degrade performance. Our ultra-high purity sublimation purification equipment provides high-purity organic materials, contributing to the enhancement of sensor performance. 【Application Scenarios】 - Development of high-sensitivity sensors - Purification of organic EL display materials - Purification of optical sensor materials 【Effects of Implementation】 - Increased sensor sensitivity - Reduced noise - Improved product reliability

In the semiconductor industry, improving the purity of materials that influence product performance is essential. Contamination by impurities can lead to reduced product yield and performance degradation, making a stable supply of high-quality materials necessary. Our ultra-high purity, ultra-high yield sublimation purification equipment achieves both high purity and high yield, contributing to the improvement of semiconductor material quality. 【Application Scenarios】 - Purification of semiconductor materials - Purification of organic EL materials - Development of high-functionality materials 【Effects of Implementation】 - Improvement of product yield through enhanced material purity - Enhancement of product performance through stable supply of high-quality materials - Reduction of material costs

In the display industry, improving the purity of thin film materials that influence product performance is essential. Particularly in organic EL displays, the contamination of impurities can lead to reduced yield and performance degradation, making a stable supply of high-quality materials necessary. Our ultra-high purity sublimation refining equipment achieves both high purity and high yield, contributing to the improvement of display quality. 【Application Scenarios】 - Refining organic EL display materials - Developing thin film materials 【Benefits of Implementation】 - Improved product yield due to enhanced material purity - Enhanced product performance through stable supply of high-quality materials - Reduction in material costs

In the solar cell industry, the improvement of conversion efficiency is always sought after. To efficiently convert sunlight into electrical energy, it is important to enhance the purity of materials and minimize the incorporation of impurities. Impurities can be a factor that degrades the performance of solar cells. Our ultra-high purity sublimation purification equipment achieves a stable supply of high-purity materials and contributes to the improvement of solar cell efficiency. 【Usage Scenarios】 - Purification of solar cell materials - Development of high-efficiency solar cells 【Effects of Implementation】 - Improvement of conversion efficiency through enhanced material purity - Enhancement of product performance through stable supply of high-quality materials - Reduction of material costs

In the LED industry, improving the purity of materials is essential to enhance the luminous efficiency of products. Particularly for materials that influence the performance of LEDs, the presence of impurities can lead to a decrease in luminous efficiency, making a stable supply of high-quality materials indispensable. Our ultra-high purity sublimation purification equipment achieves both high purity and high yield, contributing to the improvement of LED luminous efficiency. 【Application Scenarios】 - Purification of LED materials - Development of high-brightness LEDs - LED displays 【Effects of Implementation】 - Improvement in luminous efficiency due to increased material purity - Enhancement of product performance through stable supply of high-quality materials - Reduction in material costs

In the optical fiber industry, high purity of materials is required to minimize transmission loss. In particular, it is crucial to limit the contamination of impurities to the utmost in order to suppress the attenuation of optical signals. Our ultra-high purity sublimation purification equipment enables a stable supply of high-purity materials, contributing to the reduction of loss in optical fibers. 【Application Scenarios】 - Purification of optical fiber materials - Performance enhancement of optical communication systems 【Benefits of Implementation】 - Reduction of transmission loss due to improved material purity - Enhancement of system performance through stable supply of high-quality materials - Long-term cost reduction

In the sensor industry, improving the purity of materials is essential to achieve high sensitivity. Particularly in sensors that capture minute signals, the presence of impurities can create noise and potentially degrade performance. Our ultra-high purity sublimation purification equipment contributes to the enhancement of sensor sensitivity through the stable supply of high-purity materials. 【Application Scenarios】 - Purification of high-sensitivity sensor materials - Development of micro-signal detection sensors - Manufacturing of environmental measurement sensors 【Effects of Implementation】 - Improved sensor performance due to enhanced material purity - Improved yield through the stable supply of high-quality materials - Realization of high-precision measurements through noise reduction

In the battery industry, extending the lifespan of products is an important challenge. In particular, the repeated charging and discharging can lead to the degradation of electrode materials and the decomposition of electrolytes, resulting in decreased performance. Therefore, a stable supply of high-quality materials is required. Our ultra-high purity, ultra-high yield sublimation refining equipment contributes to the longevity of batteries by supplying high-purity materials. 【Application Scenarios】 - Refinement of lithium-ion battery materials - Development of all-solid-state battery materials - Research on next-generation battery materials 【Effects of Implementation】 - Improved battery performance due to enhanced material purity - Extended battery lifespan through stable supply of high-quality materials - Suppression of degradation in battery materials

In the compound semiconductor industry, improving the purity of materials that influence product performance is essential. The contamination of impurities can lead to a deterioration in product performance, so a stable supply of high-quality materials is required. Our ultra-high purity sublimation purification equipment achieves both high purity and high yield, contributing to the improvement of compound semiconductor quality. 【Application Scenarios】 - Purification of semiconductor materials - Purification of organic EL materials - Development of high-functionality materials 【Effects of Implementation】 - Improvement in product yield due to increased material purity - Enhancement of product performance through stable supply of high-quality materials - Reduction in material costs

In the organic EL display industry, there is a demand for products that are high in brightness and have a long lifespan. In particular, the purity of organic EL materials greatly affects brightness and lifespan, making a stable supply of high-quality materials essential. Contamination with impurities can lead to reduced brightness and accelerated degradation. Our ultra-high purity sublimation purification equipment provides high-purity materials and contributes to the enhancement of brightness in organic EL displays. 【Usage Scenarios】 - Purification of organic EL materials - Development of high-brightness displays 【Benefits of Implementation】 - Improvement in brightness due to enhanced material purity - Enhanced product performance through stable supply of high-quality materials - Reduction in material costs

In the quantum dot display industry, vibrant color reproduction and high display quality are required. In particular, the purity of quantum dot materials significantly affects color reproduction, and the presence of impurities can lead to a decrease in color purity and display unevenness. Our ultra-high purity sublimation purification equipment ensures a stable supply of high-purity materials, contributing to the improvement of color reproduction in quantum dot displays. 【Application Scenarios】 - Quantum dot display manufacturing - Color reproduction evaluation - Development of high-performance materials 【Effects of Implementation】 - Improvement in color purity - Enhancement of display quality - Improvement in yield