フォンアルデンヌジャパン List of Products and Services

We provide hot wire sources for catalytic CVD and iCVD applications. Special linear energy sources are available for inline and dynamic film deposition processes. They consist of specially designed source flanges and quickly attachable wire components, which can reduce downtime of the wire components simply by replacing them on a unit-by-unit basis as needed. 【Features】 ■ Inorganic (e.g., SiH4) and organic (e.g., CxHy, plastic monomer precursors) materials can be used ■ Integrated gas distribution system ■ Continuous sheet, carrier, or roll-to-roll processes ■ Flexible operating positions: upward (limited), downward (limited), vertical ■ Adjustable wire spacing according to process requirements *For more details, please refer to the PDF document or feel free to contact us.

• Plasma Generator
• Ventilation and Exhaust

The "Linear PECVD Plasma Source" is a product similar to standard capacitively coupled plasma electrodes. It operates in an inline dynamic mode, where substrates, carriers, or webs continuously pass through the electrodes and are coated continuously. Even in cases where mechanical and electrical large-scale operations are required to uniformly coat large substrates in a stationary mode using CCP CVD, the Linear PECVD reduces spatial parameters to a one-dimensional task. It can be skillfully handled even when coating at VHF frequencies is anticipated for achieving higher coating speeds. 【Features】 ■ Capacitively coupled dynamic PECVD for continuously moving substrates ■ Continuous supply sheets, carriers, or roll-to-roll processes ■ Integrated gas distribution system on the side ■ Built-in process gas exhaust system ■ Flexible operating positions: upward, downward, vertical *For more details, please refer to the PDF document or feel free to contact us.

• Plasma Generator
• Ventilation and Exhaust

The "LOE" is a component that evaporates organic materials using heat from a sealed crucible. The thermal design optimized for handling delicate organic materials minimizes thermal impact on the vapor and the substrate. The vapor is supplied through a heated pipe leading to the substrate and is released onto the substrate from a linear nozzle array. All parts that come into contact with the organic vapor, especially the crucible and nozzle pipe, are made of a completely inert ceramic with respect to organic EL materials. The crucible and nozzle pipe are heated to temperatures exceeding the condensation point of the organic materials. 【Features】 ■ Deposition of small molecular weight organic materials ■ Deposition of solid or liquid precursors ■ Single deposition, co-deposition, triple deposition ■ Operates vertically or horizontally ■ Maximum substrate width of 1200mm *For more details, please refer to the PDF document or feel free to contact us.

• Evaporation Equipment

The "HCS" is a surface treatment component characterized by the integration of a hollow cathode and an anode. Electrons are confined between the potential drops of the deep groove walls of the cathode. This promotes gas ionization and increases plasma density. When plasma is pushed into the grooves, a very powerful and bright plasma is generated beneath the electrode plate. With a simple and scalable design, it achieves robust behavior and easy customization. In terms of high-density plasma processing, it is comparable to CCP and ICP, but at a lower cost than ICP. 【Features】 ■ Hollow cathode design, substrate-independent ■ High electron density and ionization efficiency promote high-density radicals ■ Scalable ion source for surface cleaning, activation, and etching purposes ■ Applicable to thin film coating due to specific component design ■ Usable for dynamic and static substrate transport *For more details, please refer to the PDF document or feel free to contact us.

• Ventilation and Exhaust
• Plasma Generator

Our online trimming and shimming software module is a web-based application that can quickly optimize the thickness uniformity of a single thin layer. After inputting the measured thickness profile and the current trim gas settings, new trim gas settings are proposed to improve uniformity. This enables applications with strict uniformity requirements, such as double or triple Low-E, and enhances production quality. 【Features】 ■ Adjust each layer to achieve excellent uniformity ■ Start uniformity adjustments after target changes ■ Pit-in correction when long-term deviations in film thickness uniformity occur *For more details, please refer to the PDF document or feel free to contact us.

• Other process controls

The "VA Process Master" is a tool for automated process settings and controlling all thin film systems. This tool adopts a new approach to process control, delivering excellent results without operator involvement. Additionally, it enables complete automatic drift correction for the sputtering process, improving product quality. Furthermore, this tool allows our customers to create complex recipes for attractive products. 【Features】 ■ Inline measurement analysis - Average values and uniformity of thin film thickness ■ Closed-loop control - Process power output - Reactive gas supply - Magnet bar (shim settings) *For more details, please refer to the PDF document or feel free to contact us.

• Other process controls

"VA PROCOS 2" is a modular process control system specially designed to stabilize reactive sputtering processes in sensitive transition modes. It is suitable for process adjustments using combinations of optical emission spectra, cathode voltage, oxygen partial pressure, and/or other PLC signals. Additionally, it can be used to stabilize product characteristics by adjusting the stabilization of plasma discharge and the supply of one or more reactive gases. 【Features】 ■ Improved film deposition rate ■ Special processing for "arc" event detection and response ■ Selection of action points ■ Automatic online balance adjustment ■ Configuration of PEM with thermally stable photomultiplier tubes *For more details, please refer to the PDF materials or feel free to contact us.

• Other process controls

"LION" is a component suitable for pre-treatment and surface modification. It removes hydrocarbons through argon processing and can add oxygen if necessary. The ion beam is strongly focused and has high energy. It is an ideal device for inline film deposition systems that require physical etching, and due to its simple and robust design, the ion source can be easily scaled up. The main applications are large-area glass film deposition and metal foil deposition. 【Features】 ■ Removes hydrocarbons through argon processing and can add oxygen if necessary ■ Available in an external version with adjustable angle and a flange-mounted version ■ Robust and scalable design ■ High-energy, strongly focused beam ■ Pre-treatment of various types of substrate materials *For more details, please refer to the PDF materials or feel free to contact us.

• Electron beam lithography equipment

Our components can be used in packages as drop-in magnetic lids or as side-mounted process units for a wide range of applications. Gas introduction designs as nozzles or binary channels, available in single or multi-segment configurations. A toolbox with various magnetic field designs and end block types. Gas introduction designs tailored to your process needs. Setup dependent on the application can be done without restrictions. 【Features】 ■ Field-proven technology in various application areas ■ Offers process lids with built-in pumps ■ A wide range of flat and rotary cathode designs to accommodate various types of applications ■ Gas introduction designs as nozzles or binary channels, available in single or multi-segment configurations ■ Multi-anode solutions and magnetron designs that meet high-temperature process conditions for horizontal, vertical, and R2R film applications *For more details, please refer to the PDF document or feel free to contact us.

• Other machine elements

We offer flat-panel magnetrons for high-end technology applications. To date, we have sold over 350 large flat-panel magnetrons for various types of applications. Please use them for modifications and applications in new film deposition equipment. Additionally, we provide fully assembled process lids, both with and without pumps. This product series consists of three types of magnetrons: WSM, high-efficiency flat-panel magnetron HU-WSM, and Planar XT for large area flat-panel applications, as well as SSM and HU-SSM for small area applications. 【Features】 ■ Standard WSM & SSM Body - Simple target design - Target utilization rate of 30% with WSM (4500 kWh for 30mm Ag) - Film deposition uniformity <±1.0% ■ High Utilization Efficiency Flat-Panel HU-WSM & HU-SSM Body - Target lifetime of 6000 kWh (for 30mm Ag) - Extended target lifetime - Improved target utilization efficiency *For more details, please refer to the PDF document or feel free to contact us.

• electromagnet

The "Magnet Bar" is a component for rotary magnetrons that has excellent magnetic field uniformity. The development focuses on target erosion, layer uniformity, process stability, and the strength of the magnetic field according to the application. It also accommodates various end blocks. This product is available in a wide range of magnetic field strengths and lengths. Additionally, inspections are conducted in-house for quality control. 【Features】 ■ Optimization of film uniformity ■ High target utilization efficiency ■ Uniform thin film characteristics across the entire substrate width ■ Reduction of process voltage ■ Maximum process power (limited by target material and bonding) *For more details, please refer to the PDF document or feel free to contact us.

• electromagnet

Our company has over 50 years of experience in building systems for industrial production and research and development. Leveraging this specialized know-how, we have supplied hundreds of vacuum deposition systems for relatively small substrates to our customers. With our modular systems, we can provide customized solutions for wafer-based products, three-dimensional shaped products, substrates with a deposition width of less than 1,000 mm in batch processes, drum-type deposition devices, cluster-type, or inline systems. 【Other Businesses (Partial)】 ■ Glass deposition for building materials and mobility ■ Thin-film solar cells ■ Crystalline solar cells ■ Flexible substrates ■ Special applications *For more details, please refer to the PDF materials or feel free to contact us.

• Wafer

Air transport continues to grow, and accordingly, the demands for reducing fuel consumption, decreasing exhaust emissions, and quieting engines are becoming increasingly significant. Modern turbines must withstand combustion temperatures and temperature fluctuations that are far higher than those of traditional designs. Our TUBA is the appropriate system concept for turbines. Additionally, in the automotive market, electric vehicles benefit from our expertise, PVD processes, and film deposition systems, providing battery and fuel cell manufacturers with cost-effective, ideal solutions for large-scale production. [Other Businesses (Partial)] ■ Glass coating for building materials and mobility ■ Thin-film solar cells ■ Crystalline solar cells ■ Flexible substrates ■ Modular process systems *For more details, please refer to the PDF materials or feel free to contact us.

• Electron beam lithography equipment

Our FOSA and FOBA web coating systems can be customized for various applications, including polymer films with touch contacts for displays, antistatic, anti-reflective, Low-E coated films, and carbon coatings for high-performance lithium-ion batteries. We supply vacuum coating systems for roll-to-roll processes, ranging from small-scale to widths of over 2 meters. This system deposits coatings on various types of substrates such as polymer films, metal foils, and flexible glass, and is used in markets for window films, flexible electronics, and batteries. [Other Businesses (Partial)] ■ Glass coating for building materials and mobility ■ Thin-film solar cells ■ Crystalline solar cells ■ Special applications ■ Modular process systems *For more details, please refer to the PDF materials or feel free to contact us.

• Glass

Based on our experience of installing over 150 deposition systems for manufacturers of crystalline and thin-film solar panels, we have accumulated exceptional process know-how. With our modular XEA|nova wafer deposition system, which can be customized according to customer needs, we have already been widely accepted in the heterojunction technology (HJT) market. We will continue to develop new high-efficiency cell concepts made possible by high productivity and high-precision thin-film deposition technology. 【Other Businesses (Partial)】 ■ Glass deposition for building materials and mobility ■ Thin-film solar cells ■ Flexible substrates ■ Special applications ■ Modular process systems *For more details, please refer to the PDF materials or feel free to contact us.

• Other electronic parts

Our film deposition systems continue to set the standard for thin-film solar cells. PIA|nova and XENIA are advanced automated equipment platforms that adopt a modular approach for depositing back electrode layers, transparent conductive films (TCO), and various types of absorber layers such as CIGS and CdTe technologies. Through long-standing partnerships with thin-film solar cell manufacturers and the experience accumulated in the deposition of large glass substrates, we are driving down production costs while simultaneously improving conversion efficiency. 【Other Businesses (Partial)】 ■ Glass deposition for building materials and mobility ■ Crystalline solar cells ■ Flexible substrates ■ Special applications ■ Modular process systems *For more details, please refer to the PDF document or feel free to contact us.

• Other electronic parts
• Wafer

Our company supplies film deposition systems to major glass manufacturers around the world. Building material glass thin films significantly reduce energy consumption, contributing to environmental protection. In this way, solar control films prevent buildings from becoming hot inside during the summer, reducing air conditioning costs. On the other hand, in winter, low-emissivity (Low-E) coatings almost completely prevent heat loss from the glass surface to the outdoors, resulting in minimal heating energy loss. As a result, up to 80% of the energy used for heating and cooling buildings can be saved. 【Other Businesses (Partial)】 ■ Thin-film solar cells ■ Crystalline solar cells ■ Flexible substrates ■ Special applications ■ Modular process systems *For more details, please refer to the PDF materials or feel free to contact us.

• Glass
• others

The "FOBA" that we handle is a compact system for coating flexible packaging films in a roll-to-roll manner. Using proven electron beam (EB) deposition technology, it rapidly forms functional layers on resin films and thin metal foils. It is ideal from the perspective of mass production and accommodates applications requiring one or two layers of EB-deposited film. We offer a rich lineup including "FOBA 600," "FOBA 1600," and "FOBA 2800," allowing for an expansion (selection) of the coating width from 600mm to a maximum of 2800mm, thereby improving productivity. 【Features】 ■ Highest level of productivity: Achieves up to 50% increase in deposition rate with an acceleration voltage of 50kV. ■ Excellent product quality: A 5-driven roller winding system with high roller parallelism and closed-loop process control. ■ Quick and easy maintenance: An integrated station with pre-loaded crucibles and rapid exchange to new substrate rolls. *For more details, please refer to the PDF document or feel free to contact us.

• Other processing machines

We would like to introduce our "Vacuum Coating Technology & Equipment." The carbon-based multilayer film structure is optimized to achieve low ICR (interfacial contact resistance), excellent substrate adhesion, and corrosion resistance simultaneously. The ICR, corrosion resistance, and stack performance of this layer stack are comparable to gold (the reference material). Please feel free to contact us when you need assistance. 【Film Deposition Equipment】 ■ High-throughput electron beam evaporation and sputter deposition of carbon, metals, oxides, etc., on metal substrates ■ Surface activation and cleaning through plasma pretreatment ■ Equipment for research and development, small-scale production, and manufacturing that processes metal foils (R2R) and embossed separators (S2S) *For more details, please refer to the PDF materials or feel free to contact us.

• Other processing machines

Our company develops and manufactures advanced deposition equipment for forming thin film functional layers on materials such as glass, metal foils, wafers, polymer films, and flexible glass. With many years of experience in the solar cell industry, we provide high productivity deposition systems to the world's leading companies in crystalline and thin-film solar panels. Our deposition contributes to the manufacturing of high-performance, lightweight, and flexible components, which are applied in medical, automotive, lighting, industrial electronics, and home appliances. Please feel free to contact us if you have any inquiries. 【Products】 ■ Large-area deposition system for building materials glass "GC330H" ■ High productivity modular device for glass deposition in solar cells "XENIA" ■ Modular system platform for deposition silicon wafers in the photovoltaic field "XEA|nova(R)", among others *For more details, please download the PDF or feel free to contact us.

• Wafer processing/polishing equipment
• Circuit board processing machine
• others