ダルトン List of Products and Services

By combining with two-fluid cleaning, it is possible to remove strong adherents and fine particles. It is mainly used for cleaning after CMP. Example of equipment configuration: Loader ⇒ 1. Brush cleaning chamber ⇒ 2. Rinse drying chamber ⇒ Unloader 1. Brush cleaning chamber ⇒ Chemical shower → Double-sided brush cleaning → Pure water rinse 2. Rinse drying chamber ⇒ Two-fluid (N2 + pure) cleaning → MS shower (optional) → N2 blow drying

• Other cleaning machines

【Reduction of Environmental Impact】 - Only pure water is used for the cleaning solution. - The amount of pure water used is less compared to other products. 【High Cleaning Capability】 - Capable of cleaning residues and particles with a unique cleaning process. - Can generate warm air instantly. (From room temperature to 65°C in 3 seconds) - Allows for separate cleaning of the FOUP BOX and its lid. - Rapid cleaning of stubborn adhesives and particles is possible with the adoption of instant heating. - High-pressure cleaning enables the removal of contaminants with strong adhesion, such as resist. *Max approximately 10MPa (1500psi) can be adjusted in the recipe.

• Other semiconductor manufacturing equipment

By compactly organizing the necessary utility connections for the spin coater on the back side of the fume hood, the safety and workability of the workspace are improved.

• Draft chamber

Batch type: When the amount of waste liquid generated is about 10 to 150 liters per day, it can handle substances other than the components to be distilled and regenerated (residual materials) in both liquid and solid forms. (Batch type cannot operate continuously in an automated manner.)

• Distillation Apparatus

Continuous type: In cases where the wastewater generation amount is approximately 30 to 250 liters per day, if the amount of residue (substances other than the components to be distilled and regenerated) is small, whether in liquid or solid form (the continuous type can be operated automatically). *For more details, please download the PDF (catalog) or feel free to contact us.

• Distillation Apparatus

- It can be installed in accordance with devices such as etching and cleaning equipment. - Gases such as acids and alkalis are treated appropriately. - By properly processing with a scrubber, there is no impact on the ducts and equipment in the subsequent processes. Additionally, even if exhausted outdoors, there are no concerns for the surrounding environment or human health. *For more details, please download the PDF (catalog) or feel free to contact us.*

• Resist Device

We have stockers available for various applications. *For more details, please download the PDF (catalog) or feel free to contact us.*

• Other semiconductor manufacturing equipment

We have stockers available for various applications. *For more details, please download the PDF (catalog) or feel free to contact us.*

• Other semiconductor manufacturing equipment

We have stockers available for various uses.

• Other semiconductor manufacturing equipment

Can be embedded in automatic machines *Also available for fragile (such as GaAs) workpieces. *For more details, please download the PDF (catalog) or feel free to contact us.

• Drying Equipment

The anodizing device was traditionally a device that flowed current to form an oxide film, but the further developed porous silicon formation device is one that forms porous silicon by changing the chemical solution and current density used. *For more details, please download the PDF (catalog) or feel free to contact us.*

• Oxidation/Diffusion Device

We can also design and manufacture cleaning fixtures for large equipment. In the case of cassette cleaning, we can provide precision cleaning with integrated brushes. *For more details, please download the PDF (catalog) or feel free to contact us.*

• Other semiconductor manufacturing equipment

This is a fume hood that accommodates SUS specifications and PVC specifications through the use of chemical solutions, ensuring both user operability and safety. *For more details, please download the PDF (catalog) or feel free to contact us.*

• Resist Device

This is a device for processing sheet substrates used in LCD glass and touch panels. 【Features】 - Compatible with workpieces ranging from 100mm to 1000mm square (other sizes and shapes can be discussed separately) - By adding a swinging mechanism (horizontal swinging and spray nozzle pivoting), processing efficiency is improved - Cassette-to-cassette operation is also possible *For more details, please download the PDF (catalog) or feel free to contact us.

• Resist Device

Automatic Acid and Alkali Cleaning Device Compatible Work Sizes: φ2 to 12 inches. Please consult us for special sizes such as square substrates. The cleaning process is achieved by directly using two types of concentrated solutions through a two-fluid mixing nozzle. By adjusting the mixing ratio, it is possible to raise the temperature to the desired level using the reaction heat. 【Other Features】 ■ Capable of manufacturing devices with brush cleaning functions ■ Capable of manufacturing photo mask cleaning devices ■ Chemical supply and recovery unit can be integrated into the main device ■ Ozone water cleaning available as an option ■ Nanobubble cleaning available as an option You can conduct tests at our Tokyo Test Center. (Online support available) *For more details, please download the PDF (catalog) or feel free to contact us.

• Resist Device

●Flaky, aggregated, or agglomerated substances can be disintegrated (crushed). ●Particle size can be regulated to make uniform the length of cylindrical granules. ●Compression-formed, sheet-shaped material can be crushed and dry-granulated. ●High yield can be achieved without causing overgrinding. ●Wet mass can be crushed and wet-granulated in a porous manner. ●GMP design ●All powder-cotact parts to the product can be easily disassembled and re-assembled. *For more details, please refer to the catalog or feel free to contact us.*

• Crusher

This is a particle-sphering machine based on a high-speed rolling motion system. The machine performs two roles̶particle length uniforming and particle sphering̶by setting parameters such as wetness, plasticity, retention time, rotation speed, and the groove spaces of the friction plate.

• Granulating Equipment

Huge advantages are incorporated into the machine’ s small body. *For more details, please contact us.

• Granulating Equipment

●This is suitable for the feasibility trails of the granulation for many different materials. The wet granules coming out of the screen in basket shape are dropped on the table. ●The pressure and extrusion blades are installed as standard. ●Safer and more-stable granulation than conventional manual pressing is possible. ●GMP design ●All powder-cotact parts to the product can be easily disassembled and re-assembled. ●The machine can be used to produce cylindrical granules with a diameter of 0.5 mm to 2 mm. *For more details, please contact us.*

• Granulating Equipment

The mixer and the fast-rotating chopper allow for precision mixing and fine granulation with a sharp particle size distribution. Simply replacing the mixer blades enables you to add a kneader function to the agitating and granulating machine. *For more details, please contact us.*

• Other powder equipment

● The warm-water circulating jacket is installed as standard.(The water bath and pump are optional.) ● The kneading blade is cantilever type. ● All powder-contacting parts can be easily assembled and disassembled without tools. ● The kneading vessel and blades are removable and can beeasily cleaned. *For more details, please refer to the catalog or feel free to contact us.*

• Other powder equipment

This tabletop hammer-type grinding machine is designed to carry out grinding experimentation in extremely small quantities (up to 100 g). The machine has the same grinding performance as large machines (periphery speed of hammers: 100 m/sec). Thanks to the direct-drive mechanism, the machine is quiet and compact. *For more details, please contact us.*

• Crusher

The machine features special blades on the two shafts lined up in the fixed twin-U-shape container, and the blades each rotate in the outward direction at a constant speed so as to cause the supplied raw material to move toward the center so that it is continuously mixed. In a moistening process, a dedicated system is used to moisten the raw material, which is then agitated and mixed. *For more details, please contact us.*

• Other powder equipment

The raw material is mixed and wetted (a separate moistening system is required) via the rotation of the special blades lined up on the parallel shafts inside the fixed twin-hemicycle container. Then, the machine exerts the same effects on the raw material as a batch-wise kneader, in order for it to undergo a series of kneading processes. Also, in wet extrusion granulation, it is generally necessary to reduce the voidage between powder particles and also to fill void spaces with water before applying pressure. The Continuous Kneader is suitable for such preprocessing. *For more details, please contact us.*

• Other powder equipment

The mixture is repeatedly compressed, pulled, and sheared via the strong rotation of the special agitating blades lined up in parallel inside the fixed container, such that the mixture is completely kneaded in a short time. The blades are sigma-shaped. The raw material is evenly and uniformly mixed and kneaded. *For more details, please refer to the catalog or feel free to contact us.*

• Other powder equipment

These machines can offer all kinds of raw material agitation and mixing, from the mixing of powders to the kneading of high-viscosity substances. These machines are particularly suitable for the mixing of substances with a high mixture ratio or with differences in specic gravity.

• Other powder equipment

The single unit performs processes from kneading and agitation and granulation, taking roles for two machines and thereby improving productivity. Replacing the blades allows the machine to perform kneading, thus it is suitable for preprocessing for extrusion granulation. For more details, please contact us.

• Other powder equipment

This is a high-speed agitating and mixing machine in which the raw material is circulated throughout the case by the mixing arms and strongly sheared and dispersed by the pin-type chopper. Thanks to its simple structure, there is little adhesion or residue. *For more details, please refer to the catalog or feel free to contact us.*

• Other powder equipment

This equipment has multi-chopper to increase the efficiency of mixing and granulation. By increasing the number of the choppers, the product yield can be simulated to small/labo. equipment.

• Granulating Equipment

●The processing capacity of this machine is much higher than other models. ●This machine has a low compression effect and stably produces soft granules. ●This machine has an overlapped double extractor (blades) with a special shape that extrudes smoothly and produces soft granules. ●This machine can stably manufacture granules with low nonuniformity (water content, shape, hardness, and color). ●This machine granulates all the provided raw materials, so production is effective with little loss. ●This machine can granulate with just adding a little water depending on the raw materials. ●The processing capacity of this machine is much higher than other models. ●As the application range widens, raw materials (thixotropy and dilatancy) that could not be granulated before can be granulated. For more details, please contact us.

• Granulating Equipment

●Wet extrusion for larger particle diameter through Frontal Die ●Plate ●Higher compression at extrusion compare to EXD type Capable of using as Radial extruder EXD by exchanging theextrusion attachment *For more details, please refer to the catalog or feel free to contact us.*

• Granulating Equipment

●The history of wet extrusion granulator was started from this machine ●Cylindrical granule from small to medium diameter can be produced through Radial Screen ●All powder-contact parts to the product can be easily disassembled and re-assembled ●Available in Heating/ Cooling Jacket ●GMP design is available For more details, please contact us.

• Granulating Equipment

While still wet, the cylindrical granules that are produced by the wet extrusion granulation are driven by the rotation of the friction plate (1), and moved in the direction of the resultant force (2) by the rolling force of the friction plate and the centrifugal force. When colliding with the external wall, the granules loses force and return towards the inner circumference. They are again driven by the friction plate and collides with the external wall, which results in the repetition of eddying flow (3) (rotation of granules and revolution of layers) throughout the entire circumference. *For more details, please refer to the catalog or feel free to contact us.*

• Granulating Equipment

A new system that takes advantage of the adhesive and coherent property of powder. In the world of powders and grains, the development of finer raw material powder continues to progress, aiming for high function and high added value. On the other hand, as finer powder becomes more adhesive, it is more difficult to handle, so improving the handling aspect is also strongly desired as a solution to such problems that arise because of the adhesive characteristic of fine raw materials. By thinking from a totally different angle and taking advantage of the adhesive and coherent property of fine powder itself, we succeeded in designing and developing a completely new system that granulates without binder. This is a new type of a granulator system that will surely change the current state and future of granulation. *For more details, please refer to the catalog or feel free to contact us.*

• Granulating Equipment

●This machine has high adaptability to high-mix manufacturing and diverse physical properties. ●High content uniformity can be maintained for a long time. ●Granulation technology ensures high quality tablets. ●Low cost and high yield; manufacturing cost can be reduced. ●Fully automatic control by means of PAT and various sensors. ●No need for scale-up: energy saving, and shorten a period of the product development. ●Capacity: ～ 10 kg/h *For more details, please refer to the catalog or feel free to contact us.*

• Granulating Equipment

D-200 model: Model type into which raw materials are fed vertically Raw materials that are less-flowable can also be processed. ●Changing the disintegration and particle size regulation part enables the machine to function as both a conventional disintegrating device and a particle size-regulating device. ●The range of the particle size is quite narrow, thus high yield can be achieved. ●The 360-degree opening screen and the fast-rotating knives provide high performance. ●The rotation speed, the number and shape of knives, and the opening of the screen can be easily adjusted.

• Crusher

P model: Model type into which raw materials are fed diagonally ●Changing the disintegration and particle size regulation part enables the machine to have both functions as a conventional disintegrating device and a particle size-regulating device. ●The range of the particle size is quite narrow, thus high yield can be achieved. ●The 360-degree opening screen and the fast-rotating knives provide high performance. ●The rotation speed, the number and shape of knives, and the opening of the screen can be easily adjusted. *For more details, please download the PDF or feel free to contact us.*

• Crusher

Adjustments of amplitude have allowed for the development of an excellent design for precision classification (one-stage two-classification, two-stage three-classification).

• Other processing machines

This machine facilitates the feeding of blocks of raw material or aggregated raw material into another machine. *For more details, please download the PDF or feel free to contact us.*

• Crusher

Single rotor and mixing blade are provided in the chamber horizontally. After dry mixing, the liquid shall be added to form wet mass which is then disintegrated into fine granules by the pins on the rotor rotating at high speed. This is most suitable for the applications of the powder metallurgy and ceramic. *For more details, please refer to the catalog or feel free to contact us.*

• Granulating Equipment

This is a tabletop fluid bed drying machine for testing and research. *For more details, please refer to the catalog or feel free to contact us.*

• Drying Equipment

卓上型　片面タイプ サイド実験台の上に載せて使用する、機器用フード

• Draft chamber

We offer storage solutions that cater to various needs. *For more details, please download the PDF (catalog) or feel free to contact us.*

• Other semiconductor manufacturing equipment

We remove impurities adhering to the inner walls of the cylinder through heating and vacuum extraction. The cylinder size and the number of units processed simultaneously can be customized. We can propose automatic or manual machines according to your budget. 【Features】 ■ Uniform heating of the cylinder is possible (Max 200℃). The temperature inside the furnace is approximately ±1%. ■ Simultaneous cooling of the safety valve of the cylinder is possible during heating (to prevent damage to the safety valve due to heat). * For more details, please download the PDF (catalog) or feel free to contact us.

• Semiconductor inspection/test equipment

By using a plate heater with polished technology and special surface treatment on the bottom surface of the vapor generation tank, it is possible to uniformly boil the HFE within the vapor generation tank and generate uniform vapor inside the tank. *For more details, please download the PDF (catalog) or feel free to contact us.

• Drying Equipment