KITZ SCT Corporation List of Products and Services

Introducing the APC Butterfly Valve [PCVA Series] equipped with AUTO PID control. This product is an integrated valve and controller type APC butterfly valve, suitable for use in vacuum exhaust lines for semiconductor manufacturing. In semiconductor manufacturing lines, minute fluctuations in temperature and pressure can significantly impact product quality, making high-precision control essential. AUTO PID control offers advantages in high-precision control, rapid response, long-term stability, and resistance to disturbances, contributing to the stabilization of required processes in semiconductor manufacturing. The APC Butterfly Valve [PCVA Series] equipped with AUTO PID control can automatically reach the specified target pressure, contributing to the optimization and efficiency of semiconductor manufacturing processes. Specifically, the following controls are possible: ■ Pressure Control: Automatically adjusts to the specified target pressure. ■ Target Change: Responds to changes in target pressure values during pressure control. ■ Flow Variation: Capable of pressure control for flow rates other than the learned flow rate. ■ Disturbance Impact: Converges to the target pressure even if the flow rate changes during target pressure control. ■ Position Shift Detection: Capable of detecting position shifts due to product adhesion or mechanical issues.

• valve
• Pipe Fittings

The "PFM Series" inherits the conventional specifications such as improved workability, a wide range of applications, and ease of use, while incorporating new features such as a new heater and button options for safety measures, enhancing welding quality, durability, operability, and safety. 【Features】 ■ Adopts a high-performance heater with rapid heating and uniform temperature, maintaining performance equivalent to the initial state even after long-term use. ■ Enables the shortest welding by using our PFA welding fittings TBN series. ■ Option to select a double switch mechanism for safety measures. ■ Easy operation following the operation guide displayed on the touch panel, with the ability to register multiple welding conditions. ■ Wide range of applications. ■ Various other options available. ■ Welding targets: TBN fittings, PFA tubes: 1/4” to 1-1/2”. ■ Power specifications: AC200-220V 50/60Hz 660VA. *KITZ SCT offers various proposals for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• Resin processing machine

Here are some examples of product usage: - The fluorine rubber O-rings used for piping connections are deteriorating due to the effects of plasma and high-temperature exhaust from the plasma CVD equipment. - We are using expensive centering rings, but the costs are high and it is a concern. - The centering rings in the vacuum equipment are deteriorating and corroding, causing odors to leak out, which is problematic. Do you have any such concerns? KITZ SCT offers comprehensive solutions for flow path issues. If you have any specific cases you are interested in, please contact us via Ipros or our company website. Website: https://www.kitzsct.com/contact/product

• Other semiconductor manufacturing equipment
• valve
• CVD Equipment

We are using all-metal valves in a supply process at 250℃, but we are dissatisfied with their durability. In a supply process at 200℃, we are using valves that cannot have their seats replaced, which means we have to replace the valves, leading to increased running costs. We are using valves rated for 200℃, but the drive components cannot withstand high temperatures, so we are only heating the body. The heat from the heater mounted on the body is dissipating from the drive side, and we are struggling with this issue... Do you have similar concerns? KITZ SCT offers comprehensive solutions for flow path issues. If you have any specific cases you are interested in, please contact us via Ipros or our company website. Website: https://www.kitzsct.com/contact/product

• Other semiconductor manufacturing equipment
• valve
• CVD Equipment

The high-purity gas valve series "ZD Series" and "ZD-K Series" (high-temperature replaceable valves) are diaphragm valves that allow for the detachable and replaceable exchange of the seat section and can be used in high-temperature environments. 【Features】 ■ Customers can replace the valve seat themselves! The seat section can be detached and replaced during valve cleaning, allowing for the reuse of the valve. This makes it suitable for applications where valves need to be cleaned or replaced, such as for material containers. *Note: After maintenance, the product warranty will be void. ■ Usable in high-temperature environments! Both the interior through which the fluid flows and the exterior are resistant to high-temperature environments. The "ZD Series" can be used in environments up to 200°C, while the "ZD-K Series" can be used in environments up to 250°C. ■ Improved durability through the adoption of PFA seats By changing from metal seats to PFA seats, durability performance is improved by approximately 16 times.* *Based on our performance comparison data. *Metal seat: 50,000 cycles, ZD-K Series PFA seat: 800,000 cycles. We offer various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

• valve

The high-purity gas valve series ZD and ZD-K (high-temperature replaceable valve) are diaphragm valves that allow for detachable and replaceable seat components and can be used in high-temperature environments. Customers can replace the valve seat themselves! - Suitable for applications such as cleaning and replacing valves for material containers. * Note: After maintenance, the product warranty will be void. - Usable in high-temperature environments! ZD series: up to 200°C, ZD-K series: up to 250°C. 【Features】 ■ Size: 1/4" 1/2" ■ Drive method: Automatic Manual (only ZD-K) KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

• valve

Cleaning the valves used in material containers (canisters) leaves dirt inside. Canisters with welded valves require both the valve and the canister to be replaced, leading to increased running costs. Although we use valves with replaceable seats and diaphragms, the working hours and processes differ for each operator... Do you have such concerns? KITZ SCT offers various proposals for fluid-related issues in semiconductor manufacturing. If you have any cases of interest, please contact us via Ipros or our company website. Website: https://www.kitzsct.com/contact/product

• Other semiconductor manufacturing equipment
• valve
• CVD Equipment

Our company, KITZ SCT, a member of the KITZ Group, has been manufacturing and selling valves and piping materials for semiconductor manufacturing processes for over 20 years. This time, we would like to introduce examples of human errors in semiconductor manufacturing processes and their countermeasures. We are currently offering a summary of three particularly popular cases. ◎ Overview ◎ - Thought the valve was closed, but it was actually half-open - Accidentally opened a closed valve and allowed gas to flow - Experienced leaks because the valve was not closed during busy times or when performing unusual tasks... Do you have any concerns about accidents or troubles like these? We have compiled solutions by issue in a case study collection. ▼ The case study collection can be downloaded from the "PDF Download" button. ▼ If you would like to discuss project details, please contact us using the "Contact Us" link below.

• Other semiconductor manufacturing equipment
• valve
• CVD Equipment

Do you have any concerns such as wanting to heat the entire valve, needing a valve that can be placed in a constant temperature bath with the handle attached, or wanting a valve that ensures stable and reproducible gas flow? At KITZ SCT, we offer various solutions for fluid-related issues in semiconductor manufacturing. If you have any specific cases you are interested in, please contact us via Ipros or through our website. Website: https://www.kitzsct.com/contact/product/?utm_source=Ipros&utm_medium=web&utm_campaign=Arbooth

• Evaporation Equipment
• Other semiconductor manufacturing equipment
• valve

I want to implement measures against valve malfunction, but adding wires or locks decreases operability. Are there any valves equipped with a locking function for malfunction prevention that can be easily operated in emergencies? KITZ SCT offers various proposals for fluid-related issues in semiconductor manufacturing. If you have any concerns, please contact us through Ipros or our company website. Website: https://www.kitzsct.com/contact/product/?utm_source=Ipros&utm_medium=web&utm_campaign=Arbooth

• CVD Equipment
• Other semiconductor manufacturing equipment
• valve

Even with basic measures such as vibration isolation systems for pumps and flexible piping, are there issues where joints become loose due to vibrations from adjacent equipment? KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. If you have any specific cases you are interested in, please contact us through Ipros or our company website. Website: https://www.kitzsct.com/contact/product/?utm_source=Ipros&utm_medium=web&utm_campaign=Arbooth

• Other semiconductor manufacturing equipment
• valve
• Stainless steel container

Was there an issue where the valve attached to the raw material container was confirmed to be closed at the time of shipment, but became loose due to vibrations during transport? KITZ SCT offers various solutions for fluid-related concerns in semiconductor manufacturing. If you have any specific cases you are interested in, please contact us via Ipros or our company website. Website: https://www.kitzsct.com/contact/product/?utm_source=Ipros&utm_medium=web&utm_campaign=Arbooth

• Other semiconductor manufacturing equipment
• valve
• Stainless steel container

Are you spending valuable design time on layout considerations? The layout design has become more complex due to the increase in the diameter of the main piping. Additionally, various requirements have become stricter, making it difficult to design piping that takes into account constructability and maintainability. At KITZ SCT, we offer various proposals to address fluid-related concerns in semiconductor manufacturing. If you have any specific cases you are interested in, please contact us through Ipros or our company website. Website: https://www.kitzsct.com/contact/product/?utm_source=Ipros&utm_medium=web&utm_campaign=Arbooth

• Other semiconductor manufacturing equipment
• CVD Equipment
• Oxidation/Diffusion Device

During busy times or when operations that are not usually performed occur, operational mistakes are likely to happen. We will introduce examples of preventing accidents caused by human error by reducing the psychological burden on workers. KITZ SCT offers various proposals for fluid-related issues in semiconductor manufacturing. If you have any concerns, please contact us via Ipros or our company website. Website: https://www.kitzsct.com/contact/product/?utm_source=Ipros&utm_medium=web&utm_campaign=Arbooth

• Other semiconductor manufacturing equipment
• CVD Equipment
• Oxidation/Diffusion Device

We confirmed that the valve attached to the device was closed at the time of shipment, but due to vibrations during transportation, the valve handle became loose. Although we manage the valve handle with a lock, the time taken by operators to unlock it is an issue. Are there any challenges regarding preventing loosening during equipment transportation? KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. If you have any specific cases of interest, please contact us through Ipros or our website. Website: https://www.kitzsct.com/contact/product/?utm_source=Ipros&utm_medium=web&utm_campaign=Arbooth

• Other semiconductor manufacturing equipment
• CVD Equipment
• Oxidation/Diffusion Device

Are there issues such as the raw material container valve, which was tightly closed at the time of shipment, becoming loose due to vibrations during transport, or workers accidentally removing caps or plugs without noticing that the handle is partially open, leading to challenges in preventing loosening and human error during the transport of raw material containers? KKITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. If you have any specific cases of interest, please contact us via Ipros or our company website. Website: https://www.kitzsct.com/contact/product/?utm_source=Ipros&utm_medium=web&utm_campaign=Arbooth

• Other semiconductor manufacturing equipment
• valve
• Stainless steel container

Are you facing issues such as thinking you have closed the valve when it is actually in a partially open state, or that confirming the valve closure and performing tasks takes time and effort? KITZ SCT offers various solutions for fluid-related concerns in semiconductor manufacturing. If you have any specific cases you are interested in, please contact us via Ipros or through our company website. Website: https://www.kitzsct.com/contact/product/?utm_source=Ipros&utm_medium=web&utm_campaign=Arbooth

• CVD Equipment
• Oxidation/Diffusion Device
• Other semiconductor manufacturing equipment

As a member of the major valve manufacturer KITZ Group, our company believes that timely proposals in the ever-evolving electronics industry are what create value for our customers. We are committed to new product development and service enhancement, aiming for growth together with our customers. Are you facing troubles caused by the accumulation of by-products in the later stages of CVD or MOCVD and the earlier stages of abatement equipment? At KITZ SCT, we offer various proposals to address fluid-related concerns in semiconductor manufacturing. If you have any specific cases of interest, please contact us via Ipros or through our company website. Website: https://www.kitzsct.com/contact/product/?utm_source=Ipros&utm_medium=web&utm_campaign=Arbooth

• CVD Equipment
• Oxidation/Diffusion Device
• Other semiconductor manufacturing equipment

We would like to introduce our "Magnetic Proximity Switch for Open/Close Indication." The "IVB," "IVBL," and "IVBH" series of air cylinder valves (NC, NO, DA) can be equipped with magnetic proximity switches to detect the open and close states of the valves. We offer a lineup of contactless switch "PE33L3" and contact switch "PD31L3." They have an impact resistance of 294 m/s², with a response time and recovery time of less than 1 ms. 【Lineup】 ■ Contactless Switch "PE33L3" ■ Contact Switch "PD31L3" *KITZ SCT provides various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

• valve
• switch
• switch

The "UXG/LG Series" is a rectangular gate valve developed for partitioning between the reaction chamber and transfer chamber of semiconductor vacuum equipment. The body is made of aluminum and is operated by a double-acting air actuator. The heater-equipped version features not only external heating from a built-in external heater in the fixed body but also has a heater inside the movable valve body, allowing for heating from both the outside and inside, which provides excellent uniform heating performance. 【Features】 ■ Significantly extends maintenance intervals ■ Allows individual temperature settings for internal and external areas ■ Non-sliding structure that minimizes particle generation during valve opening and closing operations ■ Equipped with a latch lock mechanism to maintain valve closure ■ Offers various materials for the gate's O-ring, including fluororubber, KALREZ, and Chemraz *KITZ SCT provides various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings

The "TBN Series" is a leak-free, clean, lightweight, and compact resin welded joint. It has no sliding parts on the inner surface of the connection, which excels in particle characteristics, and provides a complete seal through butt welding of the joint and tube end faces, eliminating the need for re-tightening and concerns about liquid leakage. Additionally, by extending the tube section, it allows for direct installation of sleeve press-fit type joints, achieving reduced construction time and compact piping design. 【Features】 ■ Leak-free, clean, lightweight, and compact ■ Easy to achieve the shortest welding ■ Direct press-fitting of sleeves possible ■ "Piping kits" with TBN joints and PFA tubes are available *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings

The "PCA Series" is a valve capable of opening and closing, slow exhaust, and pressure regulation. The newly developed seat ring mechanism eliminates issues such as twisting and detachment of the O-ring attached to the flapper. Additionally, the flapper seal section is grease-free, making it less likely to contaminate the reaction chamber. By adopting the seat ring mechanism, we have reduced stress on the O-ring and achieved high durability. 【Features】 ■ Capable of opening and closing valves, slow exhaust, and pressure regulation ■ Pressure adjustment possible from low vacuum to high vacuum ■ Utilizes a newly developed seat ring mechanism ■ High durability: 3 million cycles of full open and full close operation ■ Reduction of internal by-products through unique heating ■ Excellent adaptability to processes with high by-product generation *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings

The "IVWF Series" is a shut-off valve with a simple structure that can be installed in the vacuum exhaust line of semiconductor vacuum equipment. Its simple design features compactness and lightweight, making valve installation easy. The structure of the throttle valve allows for reproducibility of the opening degree through the scale of the micrometer handle, and fine adjustments can be made using a differential screw mechanism. 【Features】 ■ Compact and lightweight ■ Easy valve installation ■ Solves installation space issues with minimal spacing dimensions ■ Can be set to any opening degree with fixed screws ■ Allows for fine adjustments using a differential screw mechanism *KITZ SCT offers various solutions for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings

The 『IVBH-C015』 is a digital temperature controller for L-type vacuum bellows seal hot valves. This product can simultaneously heat two channels of heaters: an internal heater and an external heater. The control temperature range is from room temperature to a maximum of 180℃, and the input power supply is compatible with both AC100V and AC200V. 【Main Specifications (Excerpt)】 ■ Control Temperature Range: Room Temperature to Max 180℃ ■ Applicable Temperature Sensor: Type K Thermocouple ■ Applicable Heater Ratings: ・AC100V Internal Heater 400W / External Heater 400W ・AC200V Internal Heater 800W / External Heater 800W ■ Input Power Supply: Compatible with AC100V/200V *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

• valve
• Pipe Fittings
• controller

"FCDT" is a WET-type valve that can handle fluids at 200°C. The automatic valve comes standard with an indicator (open/close display), while the manual valve features a LOTO (lock) mechanism for safety measures. Additionally, the manual valve adopts a step toggle operation method that allows for three levels of opening settings, enabling not only full open but also intermediate openings (two levels). [Features] ■ Compatible with fluids at 200°C ■ Automatic valve comes standard with an indicator (open/close display) ■ Manual valve features a LOTO (lock) mechanism for safety measures ■ Manual valve adopts a step toggle operation method that allows for three levels of opening settings, enabling not only full open but also intermediate openings (two levels) *KITZ SCT offers various proposals for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

• valve
• Pipe Fittings

The "FCDN Series" is a valve that is clean, easy to use, and has high sealing performance against back pressure. It includes a range of products such as "manual valves and automatic valves with manual operation" made of fluororesin, which are compatible with ultra-pure fluids, as well as "automatic valves with flow adjustment" and "automatic valves with bypass" that allow for customizable full flow rates. Please choose according to your application. 【Product Lineup (Excerpt)】 ■ FCD Manual Valve ■ FCD Automatic Valve ■ FCD Automatic Valve (with various functions) - Automatic valve with flow adjustment - Automatic valve with bypass - Automatic valve with flow adjustment + bypass *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings

The "BRW Series" is a vacuum flange ball valve that allows for disassembly, cleaning, and replacement of packing. Both manual and automatic valves are available. It uses high-performance, heat-resistant Hyper-Tite PTFE for the ball seat, making it suitable for use at fluid temperatures up to 200°C. The full-bore structure effectively reduces high conductance and the accumulation of by-products, making it suitable for exhaust lines of CVD equipment, among others. #By-product countermeasures 【Features】 ■ The full-bore structure suppresses high conductance and the accumulation of by-products. ■ Suitable for exhaust lines of CVD equipment and similar applications. ■ Uses high-performance, heat-resistant Hyper-Tite PTFE for the ball seat. ■ Usable at fluid temperatures up to 200°C. ■ Allows for disassembly, cleaning, and replacement of packing. *KITZ SCT offers various solutions for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings

The WET series resin valve "FCDN series" is a clean and easy-to-use valve with high sealing performance against back pressure. The "automatic valve with flow adjustment + bypass" is a composite valve that serves three functions: flow setting, air-driven opening and closing, and ensuring a bypass flow path. Valve sizes are available in 1/4", 3/8", 1/2", 3/4", and 1", with fluid temperatures ranging from 5 to 100°C and ambient temperatures from 0 to 60°C. 【Specifications (excerpt)】 ■ Fluid temperature: 5 to 100°C ■ Ambient temperature: 0 to 60°C ■ Pressure resistance: 1.0 MPa ■ Seat leakage: 0 cm3/min (under water pressure) ■ Drive method: N.C./N.O./double acting *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings

The "FCDN series" is a valve that is clean, easy to use, and has high sealing performance against back pressure. The "automatic valve with bypass" prevents fluid stagnation through the bypass flow path even when the valve is closed, and allows for water saving by adjusting the bypass valve opening. Valve sizes available are 1/4", 3/8", 1/2", 3/4", and 1", with fluid temperatures ranging from 5 to 100°C and ambient temperatures from 0 to 60°C. 【Specifications (excerpt)】 ■ Fluid temperature: 5 to 100°C ■ Ambient temperature: 0 to 60°C ■ Pressure resistance: 1.0MPa ■ Seat leakage: 0cm3/min (under water pressure) ■ Drive method: N.C./N.O./double acting *KITZ SCT offers various proposals for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings

The "FCDN series" is a valve that is clean, easy to use, and has high sealing performance against back pressure. The "automatic valve with flow adjustment" allows for arbitrary setting of the full open flow rate. Valve sizes available are 1/4", 3/8", 1/2", 3/4", and 1", with fluid temperatures ranging from 5 to 100°C and ambient temperatures from 0 to 60°C. 【Specifications (excerpt)】 ■ Fluid temperature: 5 to 100°C ■ Ambient temperature: 0 to 60°C ■ Pressure resistance: 1.0 MPa ■ Seat leakage: 0 cm3/min (under water pressure) ■ Drive method: N.C./N.O./double acting *KITZ SCT offers various proposals for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings

This product is a valve with a suck-back function that prevents liquid dripping from the nozzle tip when the fluid is stopped. We offer a "suck-back valve single valve" with only the suck-back function, and a "suck-back valve + ON/OFF automatic valve integrated" for liquid ON/OFF and suck-back function. It helps improve metering accuracy in coating processes and chemical filling processes. 【Features】 ■ With suck-back function ■ Prevents liquid dripping from the nozzle tip when the fluid is stopped ■ Helps improve metering accuracy in coating processes and chemical filling processes # Suck-back valve *KITZ SCT provides various proposals for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings

This product is a valve that can automatically open and close the bypass valve using air drive. It is equipped with an emergency shut-off function, allowing the bypass valve to automatically shut off in case of an emergency. It enables switching between large flow and small flow with a single valve, contributing to space-saving in applications such as chemical filling lines. 【Features】 ■ The bypass valve can also be automatically opened and closed using air drive. ■ Switching between large flow and small flow is possible with a single valve. ■ Helps save space in applications such as chemical filling lines. ■ In case of an emergency, the bypass valve can also be automatically shut off. *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings

The "TD-S Series" is a diaphragm valve compatible with integrated gas systems that incorporates unique technology, allowing it to be used in high-temperature environments. By enabling the entire valve to operate in high-temperature environments up to 200°C, efficient heating is possible. It is suitable for the supply of precursors in atomic layer deposition (ALD) processes, where reproducibility of flow rate is required. 【Features】 ■ Compatible with high-temperature environments ■ Stable Cv value ■ Use of PFA sheets ■ Usable with a wide variety of gases ■ High durability *For more details, please refer to the PDF document or feel free to contact us.

• Other semiconductor manufacturing equipment
• valve
• Pipe Fittings

The "TDF Series" is a high-purity gas diaphragm valve that combines high-speed opening and closing, high durability, corrosion resistance, heat resistance, and Cv stability, all of which are necessary for the ALD (Atomic Layer Deposition) process. It adopts a structure that reduces thermal conduction to the actuator, making it suitable for high-temperature fluids up to 220°C. The Cv values are adjusted for all units at the time of factory shipment, resulting in minimal variation in Cv values during use and stable gas flow. 【Features】 ■ High-speed opening and closing with high response stability #High response ■ Compatible with high-temperature fluids ■ Stable Cv values ■ High durability ■ Suitable for high-purity gases *For more details, please refer to the PDF document or feel free to contact us.

• Other semiconductor manufacturing equipment
• valve
• Pipe Fittings

The "Lock Assist CVC-LC Series" features a structure that is fastened with a single bolt, allowing for easy detachment even after piping installation. Thanks to our unique design, which causes the joint to rotate in the tightening direction when the bolt is fastened, loosening of the joint due to installation orientation does not occur. It can be used as a safety measure to prevent loosening caused by vibrations during the transport of semiconductor material containers, as well as for earthquake disaster prevention in factory piping systems. #VibrationCountermeasures 【Features】 ■ Structure fastened with a single bolt ■ Detachable even after piping installation ■ No interference with the leak test port ■ Easy to perform leak tests even after installation ■ No loosening of the joint due to installation orientation ■ Available for both joints and valves *For more details, please refer to the PDF document or feel free to contact us.

• Other semiconductor manufacturing equipment
• valve
• Pipe Fittings

The "IB" series is a bellows valve that demonstrates performance at use points requiring a large flow rate, such as supply lines in equipment, due to its high Cv value compared to diaphragm valves. It can be used not only in gas supply systems but also in exhaust system devices. We can also accommodate special specifications such as high-temperature, high-corrosion resistance, and variable flow valves. 【Features】 - Reduced dead space, resulting in shortened purge time - Usable not only in gas supply systems but also in exhaust system devices - Capable of accommodating special specifications such as high-temperature, high-corrosion resistance, and variable flow valves - Unique seat shape reduces particle generation from the disc and improves durability *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings

This product is a needle valve designed for high temperature and high corrosion resistance. Due to the ultra-precision machining of the needle part and a structure that prevents backlash (the gap that occurs at the back of gear or screw engagements), it allows for precise setting of very small flow rates. It features a standard metal gasket, which provides excellent heat resistance. 【Features】 ■ Flow adjustment needle type ■ High temperature and high corrosion resistance ■ Ultra-precision machining of the needle part and a structure that prevents backlash ■ Standard metal gasket ■ Excellent heat resistance *For more details, please refer to the PDF document or feel free to contact us.

• valve
• Pipe Fittings

This product is a bellows valve that allows for arbitrary setting of the full flow rate. By rotating the knurled black handle on the top of the actuator, flow adjustment is possible, giving it the characteristics of both an automatic valve and a needle valve in one unit. This enables simplification of piping layout, space-saving, and cost reduction. 【Features】 ■ Variable flow barrier type ■ Combines the characteristics of both an automatic valve and a needle valve in one unit ■ Allows for simplification of piping layout, space-saving, and cost reduction ■ Can be manufactured for high-temperature specifications (maximum operating temperature of 180°C) ■ A dedicated heating heater (hot shell) is also available separately *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings

This product is a bellows valve with a KF flange connection type for vacuum use. Leveraging our features of offering a lineup of various valves for high-purity gases and vacuum applications, we can accommodate a wide range from pressurization to vacuum by integrating technology and know-how. It can be used for gas introduction lines for pressure testing in exhaust systems of atmospheric processes such as CVD in semiconductor manufacturing. 【Features】 ■ KF flange connection type for vacuum use ■ Suitable as a leak valve for exhaust system testing for large chambers ■ Capable of accommodating a wide range from pressurization to vacuum *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings

The "WD" is a diaphragm valve that can use high-purity liquid materials such as TEOS, which are used in semiconductors and LCD devices, as fluids. While maintaining the basic characteristics of the valve, particle performance, and purge characteristics, it allows for the replacement of the seat (ASSY) component on the user side. Additionally, it has an actuator diameter of φ39.7mm and is compatible with a line pitch of 40mm. 【Features】 ■ Can use high-purity liquid materials such as TEOS, which are used in semiconductors and LCD devices, as fluids ■ Allows for the replacement of the seat (ASSY) component on the user side while maintaining purge characteristics and other features ■ Effective in improving maintenance performance and reducing running costs for sealing valves of material containers ■ The seat (ASSY) replacement tool is common with the "WD4 manual valve series" ■ Compatible with a line pitch of 40mm with an actuator diameter of φ39.7mm *For more details, please refer to the PDF document or feel free to contact us.

• valve
• Pipe Fittings

The "SQ" is a safe and reproducible connection fitting that can be used with quartz chamber reactors. It uses fluororesin-coated washers to prevent the O-ring from rotating during nut tightening and to stop the O-ring from coming out. The stopper ensures that the amount of nut tightening is consistent, preventing damage to the quartz tube caused by over-tightening the nut. 【Features】 ■ Prevents disengagement and rotation ■ Uses fluororesin-coated washers ■ Consistent nut tightening amount due to the stopper ■ Prevents damage to the quartz tube from over-tightening the nut ■ Can be used in a cleaner environment than conventional products due to ultra-precision cleaning treatment *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings

"SCL" is a type of welded joint with a long straight pipe section. The surface roughness is achieved at Rz0.7μm or less through electropolishing treatment. With the long straight pipe section, single pipes are unnecessary during manifold piping construction, reducing the number of work processes (one welding point is not required). 【Features】 ■ Surface roughness is achieved at Rz0.7μm or less through electropolishing treatment ■ The long straight pipe section eliminates the need for single pipes during manifold piping construction ■ Equipped with a neck (straight pipe section) suitable for automatic welding ■ High-quality welding can be easily performed *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings

"SCM" is a type of welded joint with a short straight pipe section. Due to its compact shape, it allows for space-saving in piping. The connection end is equipped with a neck suitable for automatic welding, and to suppress the release of gas, ultra-high purity double melting material for piping is available as an option. 【Features】 ■ Achieves surface roughness of Rz0.7μm or less through electropolishing treatment ■ Compact shape allows for space-saving in piping ■ Equipped with a neck (straight pipe section) suitable for automatic welding ■ High-quality welding can be easily performed *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings

"SCF" is a clean welded joint made from pipe material and has a polished inner surface. To suppress the release of gas, ultra-high purity double melting material for piping is optionally used, achieving a surface roughness of Rz0.7μm or less through electropolishing treatment. Additionally, it comes with a neck (straight pipe section) suitable for automatic welding, allowing for easy high-quality welding due to the bevel for butt welding. For sizes and flanges not listed in the catalog, please contact your sales representative. 【Features】 ■ For high-purity gas supply ■ Achieves a surface roughness of Rz0.7μm or less through electropolishing treatment ■ Compact shape allows for space-saving piping ■ Comes with a neck (straight pipe section) suitable for automatic welding ■ Easy high-quality welding due to the bevel for butt welding *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings

The "SBB" series is a bellows valve designed for use in supply lines, featuring a compact design while maintaining a high Cv value and durability. By setting the air supply port at the head, it allows for design without worrying about the direction of piping, and the purge port can be offered as an option, compatible with the primary side, secondary side, or both sides. The seat section adopts a structure that minimizes gas accumulation and dust generation. 【Features】 ■ Straight type ■ Lightweight due to forged body ■ Structure of the seat section minimizes gas accumulation and dust generation ■ Purge port available as an option, compatible with the primary side, secondary side, or both sides *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

• valve
• Pipe Fittings