KITZ SCT Corporation List of Products and Services

The KD-E series is a diaphragm valve designed to reduce running costs by allowing the seat and diaphragm to be easily detached and replaced, based on the KD series. By replacing the seat and diaphragm, the body and drive components can be reused. It is suitable for applications where valves need to be frequently replaced and cleaned, such as for liquid material containers. Additionally, using a dedicated replacement tool set allows for easy and accurate replacement of the seat and diaphragm. 【Features】 ■ Minimal dead volume and excellent replacement characteristics ■ Reduces the internal volume of the valve flow path to 1/4 compared to our WD series ■ Minimizes retention areas, making purging easy ■ Reduces running costs ■ Easy replacement of the seat and diaphragm *For more details, please refer to the PDF document or feel free to contact us.

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The "IVB_X, VX" series prevents the swirling of particles generated inside the chamber. The main valve and bypass valve are integrated, suppressing rapid pressure fluctuations that occur when exhausting from atmosphere to vacuum or returning from vacuum to atmosphere. Pressure control is achieved through slow exhaust via the bypass valve before the main valve opens and closes. There are two types of bypass valves available: one with fixed flow rate and another with adjustable exhaust speed. This bypass valve is compatible with all "IVB," "IVBL," and "IVBH" series except for the 15A size. 【Features】 ■ The conventional slow exhaust line is integrated with the main valve. ■ Space-saving design. ■ Cost reduction for the exhaust line. ■ Multiple bypass valves can be installed depending on the model. *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

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The "IVB/IVBL" is an L-shaped vacuum valve that uses SUS304 for the body, ensuring durability and considering cost reduction, just like before. By reducing the number of components to the extreme, it achieves low costs and features a design that allows for easy maintenance. It has high leak performance due to its bellows seal structure. 【Features】 ■ The use of a stainless steel body provides excellent corrosion resistance and compatibility with a wide range of gas types. ■ The adoption of a square body enables cost reduction (IVB). ■ The use of a spherical body achieves high conductance performance (IVBL). ■ High leak performance is ensured by the bellows seal structure. *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

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The "IVBHK" is an L-type vacuum bellows hot valve based on the structure of the "IVBH" series, capable of heating the gas contact section to a maximum temperature of 250°C. In addition to the external heater on the valve, it is also equipped with an internal heater within the bellows, allowing for heating of the valve body and bellows even when the valve is closed or open, thereby eliminating cold spots and preventing the adhesion of by-products. #By-product countermeasures Furthermore, a structure that reduces thermal impact on the air cylinder section and the use of Inconel bellows ensure a durability performance of over 1 million cycles. 【Features】 ■ Achieves 250°C heating of the gas contact section ■ Equipped with an internal heater in the bellows ■ Removable external heater *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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The IVBH series is an L-shaped vacuum valve that incorporates a spiral heater that follows the movement of the bellows, allowing for heating of the valve body and bellows even in the open and closed states. This valve can eliminate cold spots and minimize the adhesion of by-products by heating not only with an external heater but also from within the bellows. #By-product countermeasures The internal and external heaters have separate channels and can be heated to any temperature up to a maximum of 180°C. 【Features】 ■ Capable of maintaining long-term leak performance ■ Reduced generation of particles due to less product drop during movement ■ Achieves high durability of the bellows ■ Connection flanges can accommodate various connections such as "ISO KF" and "JIS VF/VG" ■ Options available include magnetic proximity open/close switches and thermostats *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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"IF" is a metal gasket seal fitting designed for high flow rates. By adopting a nickel gasket, it achieves high sealing performance and airtightness, with excellent corrosion resistance, capable of handling corrosive gases. Additionally, it can be temporarily fixed with a gasket fixing pin, preventing the gasket from falling off during installation. The use of a rotating flange makes installation in tight spaces easier. 【Features】 ■ Eliminates resin packing seals in high-purity gas systems ■ Suitable for high flow types ■ Available sizes range from 10A to 80A, accommodating large gas supply for LCDs and solar cells ■ Improved piping workability ■ Capable of handling a wide temperature range from -200 to 450℃ *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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The "IC" series is a poppet sliding type check valve. Thanks to precision fitting, it has a smooth opening and closing operation, and the specially designed elastomer allows for sealing from low to high pressure. The compact design minimizes gas accumulation. 【Features】 - Made of SUS316L material for improved corrosion resistance - Simple structure of components - Excellent external airtightness due to metal seals - Minimizes gas accumulation - Utilizes the elasticity of the elastomer for excellent internal sealing *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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The "IBC/IBD/IBE" series, like the "SBB" series, is designed to be compact while offering high Cv values and durability, intended for use in supply lines with large diameter pipe size bellows valves. The inner surface of the "IBC/IBD" type is uniformly finished through full cylindrical machining, while the "IBE" type features a screw sleeve structure with built-in bearings, resulting in low handle torque and excellent operability. Purge ports are available as an optional feature, compatible with primary side, secondary side, or both sides. 【Features】 ■ Achieves higher Cv values than the S type due to our unique Y-shaped structure ■ The seat section adopts a design that minimizes gas accumulation and dust generation ■ Compact design ■ Large diameter straight type ■ Purge ports available as an optional feature, compatible with primary side, secondary side, or both sides *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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The "CVC" is a mechanical metal gasket face seal fitting designed for use with high-purity gas piping, featuring our unique electropolished surface treatment and cleaning, inspection, and packaging conducted in a clean room. The component "female nut (NF)" has silver plating on the female threads to prevent galling and seizing, ensuring secure tightening. Additionally, two leak test ports are positioned along the gasket line, making it easy to confirm gasket installation and conduct leak tests. 【Components and Features】 ■ Female Nut (NF) - Silver plating on the female threads prevents galling and seizing, ensuring secure tightening. ■ Sleeve (S) - Smooth inner surface finish achieved through our unique electropolishing and other processes. ■ Gasket (G) - Nickel is used as the standard material, achieving high sealing performance with the sleeve through tightening. ■ Male Nut (NM) - High strength is achieved by adopting rolled threads, ensuring secure connections. *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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The "BZD" series is a butterfly valve that has been completed by incorporating unique cleaning technology into conventional general-purpose butterfly valves, designed to meet semiconductor grade standards. It is an industrial butterfly valve in a wafer shape made of stainless steel for the body and wetted parts. To minimize particle retention and adhesion, the gas (liquid) contact parts are finished with polishing and treated to be oil-free. It is possible to mount a pneumatic actuator via a bracket and connector. 【Features】 ■ Adopts a double-eccentric structure to ensure high sealing performance ■ Operable with a small opening and closing torque ■ The seat material is durable PTFE ■ Can be operated with minimal force, allowing for compact piping compared to lever-operated types ■ It is possible to mount a pneumatic actuator via a bracket and connector *KITZ SCT offers various proposals for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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The "high-temperature (250℃) compatible valve" can be used at 250℃ by making all valve components fully metallic. Thanks to its unique design, it minimizes the drop in Cv value in high-temperature environments, achieving high performance, compactness, and low cost. Additionally, not only the gas-contacting parts but all components of the valve, including the actuator, can be used in high-temperature environments, making it suitable for processes that require uniform heat distribution in organometallic systems. 【Features】 ■ All valve components are fully metallic, allowing use at 250℃ ■ Minimizes the drop in Cv value, achieving high performance, compactness, and low cost ■ All components of the valve, including the actuator, can be used in high-temperature environments ■ Suitable for processes that require uniform heat distribution in organometallic systems *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

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The "KD Series" is a diaphragm valve with a safety feature that reduces the pressure in the piping when abnormal pressure occurs. It offers selectable cracking pressures (1.0-1.4MPa(G) or 1.6-2.0MPa(G)) and features a particle-free structure with no springs or O-rings in the gas contact area. It can be used for safety measures in cylinder cabinets and other applications. 【Features】 ■ Equipped with a safety function that automatically reduces the pressure on the primary side when the pressure in the piping exceeds the cracking pressure. ■ Selectable cracking pressures (1.0-1.4MPa(G) or 1.6-2.0MPa(G)). ■ Particle-free structure with no springs or O-rings in the gas contact area. *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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The "Two-Step Valve" is a revolutionary composite valve that enables manual flow adjustment and two-stage control of fully open/fully closed using an air actuator, all in one unit. By controlling the fluid with a diaphragm instead of a needle, it achieves particle-free and speedy gas supply. This eliminates the need for bypass piping and control equipment in conventional systems, allowing for significant cost reduction and space-saving. 【Features】 ■ Enables manual flow adjustment and two-stage control of fully open/fully closed with an air actuator in one unit ■ Achieves particle-free and speedy gas supply ■ Eliminates the need for bypass piping and control equipment in conventional systems ■ Allows for significant cost reduction and space-saving ■ Suitable Cv values can be set as needed according to the intended use *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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We would like to introduce the "Quick Turn Valve," a high-purity gas valve for semiconductor manufacturing handled by KITZ SCT Corporation. We offer a diverse lineup, including the connection fitting "KD4QTS-VC" with 1/4" CVC male, as well as "KD8QTS-VC," "KD4QTS-VFC," and "KD8QTS-VFC." The valve has no intermediate opening and always maintains either an "OPEN" or "CLOSE" state, helping to prevent human error that could lead to incorrect valve operation, such as the valve being partially open. 【Features】 ■ Improved operability with a butterfly handle ■ No intermediate opening, always maintains either "OPEN" or "CLOSE" state ■ Helps prevent the valve from being partially open *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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The "ZCD Series" is a diaphragm valve that minimizes the internal volume (dead volume) within the valve to the extreme, enhancing gas replacement characteristics. To prevent vacuum closure of the diaphragm and improve the opening speed, the lift (ASSY) component forcibly lifts the diaphragm. Additionally, the lift (ASSY) component can be replaced on the user side. 【Features】 ■ By minimizing the dead volume from the seat to the main flow path when the valve is closed, it achieves exceptionally good gas replacement characteristics. ■ To prevent vacuum closure of the diaphragm and improve the opening speed, the lift (ASSY) component forcibly lifts the diaphragm. ■ The lift (ASSY) component can be replaced on the user side. #Dead Space *For more details, please refer to the PDF document or feel free to contact us.

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The "VRD Series" is a 1/4" high-pressure direct diaphragm valve that supports an enclosed gas pressure of 20.6 MPa. Maintaining the same performance as the conventional "RD Series," it reduces the number of components to achieve a lower price. The height of all sizes has been shortened by 6 mm compared to the conventional model, making it more compact. It can be used in gas lines and piping within equipment where complete prevention of high pressure and high vacuum retention, as well as leakage to the outside air, is desired. 【Features】 ■ Supports enclosed gas pressure of 20.6 MPa ■ Achieves a lower price by reducing the number of components while maintaining the same performance as the conventional model ■ Reduces operating torque compared to the "RD Series" ■ The height of all sizes has been shortened by 6 mm compared to the conventional model, making it more compact ■ Easier to use than ever due to low torque and compact design *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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The "VLD Series" is a diaphragm valve that is based on the "KD Series," designed to pursue ease of use and simplicity. While maintaining the basic performance, materials, and cleanliness, we have reviewed the components, changed the processing methods, and reduced the number of parts to achieve safety and low prices. With the highest level of manufacturing environment and internal polishing treatment, we have addressed high-purity gases for semiconductors and pursued particle performance to the extreme. 【Features】 ■ Minimization and simplification of drive components ■ Achieving safety and low prices ■ Cleaning and inspection processes are equivalent to the conventional model ■ Reliability and durability performance remain unchanged ■ Addressing high-purity gases for semiconductors and pursuing particle performance to the extreme *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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The "VLCD Series" is a diaphragm valve that inherits the basic performance of the conventional "KD Series" while implementing commonality of parts. By reviewing each component and material, we have achieved a low-cost price. The cleaning and inspection processes are equivalent to those of the conventional products, making it suitable for use in manufacturing equipment for semiconductors, FPDs, and LEDs. 【Features】 ■ Implements commonality of parts while inheriting the performance of the conventional "KD Series" ■ Achieves a 20% reduction in external dimensions compared to the conventional "KD Series" ■ Reviews of each component and material have been conducted to achieve a low-cost price ■ Usable in manufacturing equipment for semiconductors, FPDs, and LEDs #Pneumatics *For more details, please refer to the PDF materials or feel free to contact us.

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The "TD/TCD (C-SEAL Valve)" is a compactly designed valve compatible with 1.125" C-seals. It offers both manual and automatic valves for surface mounting for 1.125" C-seals, with the manual valve featuring a 90° rotating handle and an optional LOTO mechanism to prevent accidental operation. The hardness of the sealing area with the block is managed at Hv300, enhancing sealing performance during repeated assembly and disassembly. 【Features】 ■ The Cv value of the TD4 series is 0.3 ■ Both manual and automatic valves are available for surface mounting for 1.125" C-seals ■ The manual valve has a 90° rotating handle and is available with an optional LOTO mechanism to prevent accidental operation ■ The gas contact area is treated with a Chrome-rich process, achieving Cr/Fe > 2.0 (optional) ■ The hardness of the sealing area with the block is managed at Hv300, enhancing sealing performance during repeated assembly and disassembly *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

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The "TD/TCD (B-SEAL Valve)" is a valve featuring KITZ SCT's unique sealing method. Instead of the conventional four-point tightening installation, it adopts a center-lock method. This greatly simplifies valve replacement and significantly enhances maintenance workability, contributing greatly to user productivity. Additionally, to prevent misalignment during the installation of the valve and block, the cut sizes at the junction points of the valve and block are designed differently for the In side and Out side. 【Features】 - Excellent maintenance workability, greatly contributing to user productivity - The manual valve is equipped with a locking mechanism to prevent accidental operation - The toggle handle allows for easy operation even in limited spaces - In the block type, cartridge heaters can be integrated along the flow path within the block, significantly improving temperature control and bake-out performance *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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The "KD-S Series" is a diaphragm valve that incorporates unique technology, making it suitable for use in high-temperature environments. It is ideal for supplying precursors in atomic layer deposition (ALD) processes, where reproducibility of flow rate is required. By adopting a resin sheet, the durability performance in high-temperature environments, such as sheet leaks and lifecycle, has improved compared to metal sheet types. 【Features】 ■ Compatible with high-temperature environments ■ No product errors, ensuring compatibility after replacement ■ Stable and reproducible gas flow rates can be obtained ■ PFA, which excels in heat resistance and corrosion resistance, is used as the sheet material ■ Improved durability performance in high-temperature environments, such as sheet leaks and lifecycle *For more details, please refer to the PDF document or feel free to contact us.

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The "RD Series" is a diaphragm valve that, while capable of handling high pressure, achieves compactness and low torque. The "manual valve" features a smooth operational feel and employs a large window and easily visible OPEN/CLOSE indicators to allow for immediate confirmation of the open/closed status. The "automatic valve" enhances the rigidity of the connection between the body and actuator, improving reliability, and incorporates a patented wedge-type amplification mechanism, resulting in a compact and highly durable actuator. 【Features】 <Manual Valve> ■ Adoption of a large wheel handle for a smooth operational feel ■ Large window and easily visible OPEN/CLOSE indicators for immediate confirmation of the open/closed status *For more details, please refer to the PDF document or feel free to contact us.

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The "NRMD8C Series" is an automatic valve of the Cv0.75 medium flow type. #Pneumatic It features a slim actuator designed for high-pressure gas equipment such as BSGS (special material gas supply equipment) and GS. By adopting a newly developed high-output actuator and a springless diaphragm structure, it achieves safety, high durability, and particle-free operation. 【Features】 ■ Cv0.75 medium flow type ■ Slim actuator designed for high-pressure gas equipment such as BSGS and GS ■ Achieves safety, high durability, and particle-free operation by adopting a newly developed high-output actuator and springless diaphragm structure ※KITZ SCT offers various proposals for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

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The "NRHD8C Series" is a Cv1.0 high-flow type automatic valve. #Pneumatic By adopting a newly developed high-output actuator and a springless diaphragm structure, it achieves safety, high durability, and particle-free operation. It is suitable for high-flow supply systems in flat panel display factories and semiconductor factories for large-diameter wafers. 【Features】 ■ Cv1.0 high-flow type ■ Achieves safety, high durability, and particle-free operation by adopting a newly developed high-output actuator and a springless diaphragm structure ■ Suitable for high-flow supply systems in flat panel display factories and semiconductor factories for large-diameter wafers *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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The "NRD Series" is a high-pressure diaphragm valve that adopts a new high-output actuator and an internal screw body structure, pursuing a simple and compact design. As a valve that can handle high pressure, it offers a wide range of flow rates from low to high flow types. The entire series features a springless diaphragm structure, reducing particles. 【Features】 ■ Slim and compact design ■ Lineup of high-flow types ■ Adoption of springless diaphragm structure ■ Compatible with high-pressure gas minister certification (optional) ■ Special specifications and block valve compatibility (optional) *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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We would like to introduce our high-purity gas valve, the 'LOTO Valve.' When the valve is in the CLOSED position, the handle lowers, revealing a hole for a key. To open the valve, the handle must be lifted and turned. Additionally, by passing a padlock or wire (minimum diameter 3.18mm) through the hole at the top of the handle, the valve can be locked out and tagged out, helping to prevent operational errors due to human mistakes. 【Features】 ■ When the valve is in the CLOSED position, the handle lowers, revealing a hole for a key. ■ To open the valve, lift the handle and turn it. ■ By passing a padlock or wire (minimum diameter 3.18mm) through the hole at the top of the handle, the valve can be locked out and tagged out, helping to prevent operator errors. ■ Optionally, it can accommodate both OPEN and OPEN-CLOSE states. * At KITZ SCT, we offer various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

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The "KD Series" is a highly reliable valve that achieves a high Cv value, is compatible with high-purity gases for semiconductors, and combines high durability with excellent corrosion resistance. By minimizing the vertical hole dimensions of the body and reducing the internal volume to 1.36 cm³, it realizes outstanding gas replacement characteristics. With the highest level of manufacturing environment and internal polishing treatment, it is designed to accommodate high-purity gases for semiconductors and pursues particle performance to the utmost limit. 【Features】 ■ Achieves excellent gas replacement characteristics by reducing the internal volume to 1.36 cm³ ■ Pursues high sealing performance, high durability, degassing performance, and corrosion resistance to the utmost limit ■ High corrosion resistance through carefully selected diaphragm materials and unique molding methods that eliminate individual differences to achieve high durability ■ Accommodates high-purity gases for semiconductors and pursues particle performance to the utmost limit #Pneumatics *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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The "KCD Series" is a direct diaphragm valve that aims for further compactness based on the "KD Series." Without compromising durability, it achieves 4 million cycles for automatic valves and 100,000 cycles for manual valves. With the highest level of manufacturing environment and internal polishing treatment, it accommodates many high-purity gases for semiconductors and pursues particle performance to the utmost limit. 【Features】 ■ Successfully reduced the volume from 1.2 cm³ in the KD Series to 0.97 cm³ ■ Limited to 1/4" size while maintaining the same design as the KD Series, reducing the external size by approximately 20% and also lightweight ■ Achieves 4 million cycles for automatic valves and 100,000 cycles for manual valves without compromising durability ■ Accommodates many high-purity gases for semiconductors and pursues particle performance to the utmost limit #Pneumatics *For more details, please refer to the PDF document or feel free to contact us.

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The "2-way 3-port valve (block type)" is an excellent valve with degassing characteristics that minimizes dead space by combining two diaphragm valves from the KD, KCD, and RD series into one, thereby standardizing the piping flow path. The basic performance inherits the capabilities of the base valve, allowing for a compact design of the piping system through combinations of the same or different types. Additionally, it is possible to select suitable flow systems, piping arrangements, and types of fittings according to the piping layout. 【Features】 ■ Excellent degassing characteristics ■ Basic performance inherits the capabilities of the base valve ■ Enables compact design of the piping system ■ Allows selection of suitable flow systems, piping arrangements, and types of fittings ■ Special specifications can design and manufacture block valves with three or more connections #Manifold Valve *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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The "2-way 3-port valve (flicker type)" is a composite valve designed with an even more compact body for our 2-way 3-port block valve, minimizing dead space to the utmost. The two valve actuators are laid out in a horizontally opposing position on either side of the central body. We offer various valve series including the standard diaphragm type "KD series," the compact type "KCD series," and the high-pressure type "RD series." 【Features】 ■ The body of our 2-way 3-port block valve is designed to be even more compact. ■ The two valve actuators are laid out in horizontally opposing positions on both sides. ■ The compact design makes layout planning within the valve box easier. ■ It allows for space-saving of the valve box itself. ■ The simple shape makes the design of heater jackets and insulation materials easier. *KITZ SCT provides various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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