KITZ SCT Corporation Product Lineup

The "2-way 3-port valve (flicker type)" is a composite valve designed with an even more compact body for our 2-way 3-port block valve, minimizing dead space to the utmost. The two valve actuators are laid out in a horizontally opposing position on either side of the central body. We offer various valve series including the standard diaphragm type "KD series," the compact type "KCD series," and the high-pressure type "RD series." 【Features】 ■ The body of our 2-way 3-port block valve is designed to be even more compact. ■ The two valve actuators are laid out in horizontally opposing positions on both sides. ■ The compact design makes layout planning within the valve box easier. ■ It allows for space-saving of the valve box itself. ■ The simple shape makes the design of heater jackets and insulation materials easier. *KITZ SCT provides various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The "2-way 3-port valve (block type)" is an excellent valve with degassing characteristics that minimizes dead space by combining two diaphragm valves from the KD, KCD, and RD series into one, thereby standardizing the piping flow path. The basic performance inherits the capabilities of the base valve, allowing for a compact design of the piping system through combinations of the same or different types. Additionally, it is possible to select suitable flow systems, piping arrangements, and types of fittings according to the piping layout. 【Features】 ■ Excellent degassing characteristics ■ Basic performance inherits the capabilities of the base valve ■ Enables compact design of the piping system ■ Allows selection of suitable flow systems, piping arrangements, and types of fittings ■ Special specifications can design and manufacture block valves with three or more connections #Manifold Valve *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The "KCD Series" is a direct diaphragm valve that aims for further compactness based on the "KD Series." Without compromising durability, it achieves 4 million cycles for automatic valves and 100,000 cycles for manual valves. With the highest level of manufacturing environment and internal polishing treatment, it accommodates many high-purity gases for semiconductors and pursues particle performance to the utmost limit. 【Features】 ■ Successfully reduced the volume from 1.2 cm³ in the KD Series to 0.97 cm³ ■ Limited to 1/4" size while maintaining the same design as the KD Series, reducing the external size by approximately 20% and also lightweight ■ Achieves 4 million cycles for automatic valves and 100,000 cycles for manual valves without compromising durability ■ Accommodates many high-purity gases for semiconductors and pursues particle performance to the utmost limit #Pneumatics *For more details, please refer to the PDF document or feel free to contact us.

The "KD Series" is a highly reliable valve that achieves a high Cv value, is compatible with high-purity gases for semiconductors, and combines high durability with excellent corrosion resistance. By minimizing the vertical hole dimensions of the body and reducing the internal volume to 1.36 cm³, it realizes outstanding gas replacement characteristics. With the highest level of manufacturing environment and internal polishing treatment, it is designed to accommodate high-purity gases for semiconductors and pursues particle performance to the utmost limit. 【Features】 ■ Achieves excellent gas replacement characteristics by reducing the internal volume to 1.36 cm³ ■ Pursues high sealing performance, high durability, degassing performance, and corrosion resistance to the utmost limit ■ High corrosion resistance through carefully selected diaphragm materials and unique molding methods that eliminate individual differences to achieve high durability ■ Accommodates high-purity gases for semiconductors and pursues particle performance to the utmost limit #Pneumatics *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

We would like to introduce our high-purity gas valve, the 'LOTO Valve.' When the valve is in the CLOSED position, the handle lowers, revealing a hole for a key. To open the valve, the handle must be lifted and turned. Additionally, by passing a padlock or wire (minimum diameter 3.18mm) through the hole at the top of the handle, the valve can be locked out and tagged out, helping to prevent operational errors due to human mistakes. 【Features】 ■ When the valve is in the CLOSED position, the handle lowers, revealing a hole for a key. ■ To open the valve, lift the handle and turn it. ■ By passing a padlock or wire (minimum diameter 3.18mm) through the hole at the top of the handle, the valve can be locked out and tagged out, helping to prevent operator errors. ■ Optionally, it can accommodate both OPEN and OPEN-CLOSE states. * At KITZ SCT, we offer various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

The "NRD Series" is a high-pressure diaphragm valve that adopts a new high-output actuator and an internal screw body structure, pursuing a simple and compact design. As a valve that can handle high pressure, it offers a wide range of flow rates from low to high flow types. The entire series features a springless diaphragm structure, reducing particles. 【Features】 ■ Slim and compact design ■ Lineup of high-flow types ■ Adoption of springless diaphragm structure ■ Compatible with high-pressure gas minister certification (optional) ■ Special specifications and block valve compatibility (optional) *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The "NRHD8C Series" is a Cv1.0 high-flow type automatic valve. #Pneumatic By adopting a newly developed high-output actuator and a springless diaphragm structure, it achieves safety, high durability, and particle-free operation. It is suitable for high-flow supply systems in flat panel display factories and semiconductor factories for large-diameter wafers. 【Features】 ■ Cv1.0 high-flow type ■ Achieves safety, high durability, and particle-free operation by adopting a newly developed high-output actuator and a springless diaphragm structure ■ Suitable for high-flow supply systems in flat panel display factories and semiconductor factories for large-diameter wafers *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The "NRMD8C Series" is an automatic valve of the Cv0.75 medium flow type. #Pneumatic It features a slim actuator designed for high-pressure gas equipment such as BSGS (special material gas supply equipment) and GS. By adopting a newly developed high-output actuator and a springless diaphragm structure, it achieves safety, high durability, and particle-free operation. 【Features】 ■ Cv0.75 medium flow type ■ Slim actuator designed for high-pressure gas equipment such as BSGS and GS ■ Achieves safety, high durability, and particle-free operation by adopting a newly developed high-output actuator and springless diaphragm structure ※KITZ SCT offers various proposals for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

The "KD-S Series" is a diaphragm valve that incorporates unique technology, making it suitable for use in high-temperature environments. It is ideal for supplying precursors in atomic layer deposition (ALD) processes, where reproducibility of flow rate is required. By adopting a resin sheet, the durability performance in high-temperature environments, such as sheet leaks and lifecycle, has improved compared to metal sheet types. 【Features】 ■ Compatible with high-temperature environments ■ No product errors, ensuring compatibility after replacement ■ Stable and reproducible gas flow rates can be obtained ■ PFA, which excels in heat resistance and corrosion resistance, is used as the sheet material ■ Improved durability performance in high-temperature environments, such as sheet leaks and lifecycle *For more details, please refer to the PDF document or feel free to contact us.

The "TD/TCD (B-SEAL Valve)" is a valve featuring KITZ SCT's unique sealing method. Instead of the conventional four-point tightening installation, it adopts a center-lock method. This greatly simplifies valve replacement and significantly enhances maintenance workability, contributing greatly to user productivity. Additionally, to prevent misalignment during the installation of the valve and block, the cut sizes at the junction points of the valve and block are designed differently for the In side and Out side. 【Features】 - Excellent maintenance workability, greatly contributing to user productivity - The manual valve is equipped with a locking mechanism to prevent accidental operation - The toggle handle allows for easy operation even in limited spaces - In the block type, cartridge heaters can be integrated along the flow path within the block, significantly improving temperature control and bake-out performance *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The "TD/TCD (C-SEAL Valve)" is a compactly designed valve compatible with 1.125" C-seals. It offers both manual and automatic valves for surface mounting for 1.125" C-seals, with the manual valve featuring a 90° rotating handle and an optional LOTO mechanism to prevent accidental operation. The hardness of the sealing area with the block is managed at Hv300, enhancing sealing performance during repeated assembly and disassembly. 【Features】 ■ The Cv value of the TD4 series is 0.3 ■ Both manual and automatic valves are available for surface mounting for 1.125" C-seals ■ The manual valve has a 90° rotating handle and is available with an optional LOTO mechanism to prevent accidental operation ■ The gas contact area is treated with a Chrome-rich process, achieving Cr/Fe > 2.0 (optional) ■ The hardness of the sealing area with the block is managed at Hv300, enhancing sealing performance during repeated assembly and disassembly *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

The "VLCD Series" is a diaphragm valve that inherits the basic performance of the conventional "KD Series" while implementing commonality of parts. By reviewing each component and material, we have achieved a low-cost price. The cleaning and inspection processes are equivalent to those of the conventional products, making it suitable for use in manufacturing equipment for semiconductors, FPDs, and LEDs. 【Features】 ■ Implements commonality of parts while inheriting the performance of the conventional "KD Series" ■ Achieves a 20% reduction in external dimensions compared to the conventional "KD Series" ■ Reviews of each component and material have been conducted to achieve a low-cost price ■ Usable in manufacturing equipment for semiconductors, FPDs, and LEDs #Pneumatics *For more details, please refer to the PDF materials or feel free to contact us.

The "VLD Series" is a diaphragm valve that is based on the "KD Series," designed to pursue ease of use and simplicity. While maintaining the basic performance, materials, and cleanliness, we have reviewed the components, changed the processing methods, and reduced the number of parts to achieve safety and low prices. With the highest level of manufacturing environment and internal polishing treatment, we have addressed high-purity gases for semiconductors and pursued particle performance to the extreme. 【Features】 ■ Minimization and simplification of drive components ■ Achieving safety and low prices ■ Cleaning and inspection processes are equivalent to the conventional model ■ Reliability and durability performance remain unchanged ■ Addressing high-purity gases for semiconductors and pursuing particle performance to the extreme *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The "VRD Series" is a 1/4" high-pressure direct diaphragm valve that supports an enclosed gas pressure of 20.6 MPa. Maintaining the same performance as the conventional "RD Series," it reduces the number of components to achieve a lower price. The height of all sizes has been shortened by 6 mm compared to the conventional model, making it more compact. It can be used in gas lines and piping within equipment where complete prevention of high pressure and high vacuum retention, as well as leakage to the outside air, is desired. 【Features】 ■ Supports enclosed gas pressure of 20.6 MPa ■ Achieves a lower price by reducing the number of components while maintaining the same performance as the conventional model ■ Reduces operating torque compared to the "RD Series" ■ The height of all sizes has been shortened by 6 mm compared to the conventional model, making it more compact ■ Easier to use than ever due to low torque and compact design *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The "ZCD Series" is a diaphragm valve that minimizes the internal volume (dead volume) within the valve to the extreme, enhancing gas replacement characteristics. To prevent vacuum closure of the diaphragm and improve the opening speed, the lift (ASSY) component forcibly lifts the diaphragm. Additionally, the lift (ASSY) component can be replaced on the user side. 【Features】 ■ By minimizing the dead volume from the seat to the main flow path when the valve is closed, it achieves exceptionally good gas replacement characteristics. ■ To prevent vacuum closure of the diaphragm and improve the opening speed, the lift (ASSY) component forcibly lifts the diaphragm. ■ The lift (ASSY) component can be replaced on the user side. #Dead Space *For more details, please refer to the PDF document or feel free to contact us.

We would like to introduce the "Quick Turn Valve," a high-purity gas valve for semiconductor manufacturing handled by KITZ SCT Corporation. We offer a diverse lineup, including the connection fitting "KD4QTS-VC" with 1/4" CVC male, as well as "KD8QTS-VC," "KD4QTS-VFC," and "KD8QTS-VFC." The valve has no intermediate opening and always maintains either an "OPEN" or "CLOSE" state, helping to prevent human error that could lead to incorrect valve operation, such as the valve being partially open. 【Features】 ■ Improved operability with a butterfly handle ■ No intermediate opening, always maintains either "OPEN" or "CLOSE" state ■ Helps prevent the valve from being partially open *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The "Two-Step Valve" is a revolutionary composite valve that enables manual flow adjustment and two-stage control of fully open/fully closed using an air actuator, all in one unit. By controlling the fluid with a diaphragm instead of a needle, it achieves particle-free and speedy gas supply. This eliminates the need for bypass piping and control equipment in conventional systems, allowing for significant cost reduction and space-saving. 【Features】 ■ Enables manual flow adjustment and two-stage control of fully open/fully closed with an air actuator in one unit ■ Achieves particle-free and speedy gas supply ■ Eliminates the need for bypass piping and control equipment in conventional systems ■ Allows for significant cost reduction and space-saving ■ Suitable Cv values can be set as needed according to the intended use *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The "KD Series" is a diaphragm valve with a safety feature that reduces the pressure in the piping when abnormal pressure occurs. It offers selectable cracking pressures (1.0-1.4MPa(G) or 1.6-2.0MPa(G)) and features a particle-free structure with no springs or O-rings in the gas contact area. It can be used for safety measures in cylinder cabinets and other applications. 【Features】 ■ Equipped with a safety function that automatically reduces the pressure on the primary side when the pressure in the piping exceeds the cracking pressure. ■ Selectable cracking pressures (1.0-1.4MPa(G) or 1.6-2.0MPa(G)). ■ Particle-free structure with no springs or O-rings in the gas contact area. *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The "high-temperature (250℃) compatible valve" can be used at 250℃ by making all valve components fully metallic. Thanks to its unique design, it minimizes the drop in Cv value in high-temperature environments, achieving high performance, compactness, and low cost. Additionally, not only the gas-contacting parts but all components of the valve, including the actuator, can be used in high-temperature environments, making it suitable for processes that require uniform heat distribution in organometallic systems. 【Features】 ■ All valve components are fully metallic, allowing use at 250℃ ■ Minimizes the drop in Cv value, achieving high performance, compactness, and low cost ■ All components of the valve, including the actuator, can be used in high-temperature environments ■ Suitable for processes that require uniform heat distribution in organometallic systems *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

The "BZD" series is a butterfly valve that has been completed by incorporating unique cleaning technology into conventional general-purpose butterfly valves, designed to meet semiconductor grade standards. It is an industrial butterfly valve in a wafer shape made of stainless steel for the body and wetted parts. To minimize particle retention and adhesion, the gas (liquid) contact parts are finished with polishing and treated to be oil-free. It is possible to mount a pneumatic actuator via a bracket and connector. 【Features】 ■ Adopts a double-eccentric structure to ensure high sealing performance ■ Operable with a small opening and closing torque ■ The seat material is durable PTFE ■ Can be operated with minimal force, allowing for compact piping compared to lever-operated types ■ It is possible to mount a pneumatic actuator via a bracket and connector *KITZ SCT offers various proposals for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The "IBC/IBD/IBE" series, like the "SBB" series, is designed to be compact while offering high Cv values and durability, intended for use in supply lines with large diameter pipe size bellows valves. The inner surface of the "IBC/IBD" type is uniformly finished through full cylindrical machining, while the "IBE" type features a screw sleeve structure with built-in bearings, resulting in low handle torque and excellent operability. Purge ports are available as an optional feature, compatible with primary side, secondary side, or both sides. 【Features】 ■ Achieves higher Cv values than the S type due to our unique Y-shaped structure ■ The seat section adopts a design that minimizes gas accumulation and dust generation ■ Compact design ■ Large diameter straight type ■ Purge ports available as an optional feature, compatible with primary side, secondary side, or both sides *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The "IC" series is a poppet sliding type check valve. Thanks to precision fitting, it has a smooth opening and closing operation, and the specially designed elastomer allows for sealing from low to high pressure. The compact design minimizes gas accumulation. 【Features】 - Made of SUS316L material for improved corrosion resistance - Simple structure of components - Excellent external airtightness due to metal seals - Minimizes gas accumulation - Utilizes the elasticity of the elastomer for excellent internal sealing *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The KD-E series is a diaphragm valve designed to reduce running costs by allowing the seat and diaphragm to be easily detached and replaced, based on the KD series. By replacing the seat and diaphragm, the body and drive components can be reused. It is suitable for applications where valves need to be frequently replaced and cleaned, such as for liquid material containers. Additionally, using a dedicated replacement tool set allows for easy and accurate replacement of the seat and diaphragm. 【Features】 ■ Minimal dead volume and excellent replacement characteristics ■ Reduces the internal volume of the valve flow path to 1/4 compared to our WD series ■ Minimizes retention areas, making purging easy ■ Reduces running costs ■ Easy replacement of the seat and diaphragm *For more details, please refer to the PDF document or feel free to contact us.

The "SBB" series is a bellows valve designed for use in supply lines, featuring a compact design while maintaining a high Cv value and durability. By setting the air supply port at the head, it allows for design without worrying about the direction of piping, and the purge port can be offered as an option, compatible with the primary side, secondary side, or both sides. The seat section adopts a structure that minimizes gas accumulation and dust generation. 【Features】 ■ Straight type ■ Lightweight due to forged body ■ Structure of the seat section minimizes gas accumulation and dust generation ■ Purge port available as an option, compatible with the primary side, secondary side, or both sides *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The "WD" is a diaphragm valve that can use high-purity liquid materials such as TEOS, which are used in semiconductors and LCD devices, as fluids. While maintaining the basic characteristics of the valve, particle performance, and purge characteristics, it allows for the replacement of the seat (ASSY) component on the user side. Additionally, it has an actuator diameter of φ39.7mm and is compatible with a line pitch of 40mm. 【Features】 ■ Can use high-purity liquid materials such as TEOS, which are used in semiconductors and LCD devices, as fluids ■ Allows for the replacement of the seat (ASSY) component on the user side while maintaining purge characteristics and other features ■ Effective in improving maintenance performance and reducing running costs for sealing valves of material containers ■ The seat (ASSY) replacement tool is common with the "WD4 manual valve series" ■ Compatible with a line pitch of 40mm with an actuator diameter of φ39.7mm *For more details, please refer to the PDF document or feel free to contact us.

This product is a bellows valve with a KF flange connection type for vacuum use. Leveraging our features of offering a lineup of various valves for high-purity gases and vacuum applications, we can accommodate a wide range from pressurization to vacuum by integrating technology and know-how. It can be used for gas introduction lines for pressure testing in exhaust systems of atmospheric processes such as CVD in semiconductor manufacturing. 【Features】 ■ KF flange connection type for vacuum use ■ Suitable as a leak valve for exhaust system testing for large chambers ■ Capable of accommodating a wide range from pressurization to vacuum *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

This product is a bellows valve that allows for arbitrary setting of the full flow rate. By rotating the knurled black handle on the top of the actuator, flow adjustment is possible, giving it the characteristics of both an automatic valve and a needle valve in one unit. This enables simplification of piping layout, space-saving, and cost reduction. 【Features】 ■ Variable flow barrier type ■ Combines the characteristics of both an automatic valve and a needle valve in one unit ■ Allows for simplification of piping layout, space-saving, and cost reduction ■ Can be manufactured for high-temperature specifications (maximum operating temperature of 180°C) ■ A dedicated heating heater (hot shell) is also available separately *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

This product is a needle valve designed for high temperature and high corrosion resistance. Due to the ultra-precision machining of the needle part and a structure that prevents backlash (the gap that occurs at the back of gear or screw engagements), it allows for precise setting of very small flow rates. It features a standard metal gasket, which provides excellent heat resistance. 【Features】 ■ Flow adjustment needle type ■ High temperature and high corrosion resistance ■ Ultra-precision machining of the needle part and a structure that prevents backlash ■ Standard metal gasket ■ Excellent heat resistance *For more details, please refer to the PDF document or feel free to contact us.

The "IB" series is a bellows valve that demonstrates performance at use points requiring a large flow rate, such as supply lines in equipment, due to its high Cv value compared to diaphragm valves. It can be used not only in gas supply systems but also in exhaust system devices. We can also accommodate special specifications such as high-temperature, high-corrosion resistance, and variable flow valves. 【Features】 - Reduced dead space, resulting in shortened purge time - Usable not only in gas supply systems but also in exhaust system devices - Capable of accommodating special specifications such as high-temperature, high-corrosion resistance, and variable flow valves - Unique seat shape reduces particle generation from the disc and improves durability *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The "TDF Series" is a high-purity gas diaphragm valve that combines high-speed opening and closing, high durability, corrosion resistance, heat resistance, and Cv stability, all of which are necessary for the ALD (Atomic Layer Deposition) process. It adopts a structure that reduces thermal conduction to the actuator, making it suitable for high-temperature fluids up to 220°C. The Cv values are adjusted for all units at the time of factory shipment, resulting in minimal variation in Cv values during use and stable gas flow. 【Features】 ■ High-speed opening and closing with high response stability #High response ■ Compatible with high-temperature fluids ■ Stable Cv values ■ High durability ■ Suitable for high-purity gases *For more details, please refer to the PDF document or feel free to contact us.

The "TD-S Series" is a diaphragm valve compatible with integrated gas systems that incorporates unique technology, allowing it to be used in high-temperature environments. By enabling the entire valve to operate in high-temperature environments up to 200°C, efficient heating is possible. It is suitable for the supply of precursors in atomic layer deposition (ALD) processes, where reproducibility of flow rate is required. 【Features】 ■ Compatible with high-temperature environments ■ Stable Cv value ■ Use of PFA sheets ■ Usable with a wide variety of gases ■ High durability *For more details, please refer to the PDF document or feel free to contact us.

We confirmed that the valve attached to the device was closed at the time of shipment, but due to vibrations during transportation, the valve handle became loose. Although we manage the valve handle with a lock, the time taken by operators to unlock it is an issue. Are there any challenges regarding preventing loosening during equipment transportation? KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. If you have any specific cases of interest, please contact us through Ipros or our website. Website: https://www.kitzsct.com/contact/product/?utm_source=Ipros&utm_medium=web&utm_campaign=Arbooth

During busy times or when operations that are not usually performed occur, operational mistakes are likely to happen. We will introduce examples of preventing accidents caused by human error by reducing the psychological burden on workers. KITZ SCT offers various proposals for fluid-related issues in semiconductor manufacturing. If you have any concerns, please contact us via Ipros or our company website. Website: https://www.kitzsct.com/contact/product/?utm_source=Ipros&utm_medium=web&utm_campaign=Arbooth

Are you spending valuable design time on layout considerations? The layout design has become more complex due to the increase in the diameter of the main piping. Additionally, various requirements have become stricter, making it difficult to design piping that takes into account constructability and maintainability. At KITZ SCT, we offer various proposals to address fluid-related concerns in semiconductor manufacturing. If you have any specific cases you are interested in, please contact us through Ipros or our company website. Website: https://www.kitzsct.com/contact/product/?utm_source=Ipros&utm_medium=web&utm_campaign=Arbooth

The high-purity gas valve series ZD and ZD-K (high-temperature replaceable valve) are diaphragm valves that allow for detachable and replaceable seat components and can be used in high-temperature environments. Customers can replace the valve seat themselves! - Suitable for applications such as cleaning and replacing valves for material containers. * Note: After maintenance, the product warranty will be void. - Usable in high-temperature environments! ZD series: up to 200°C, ZD-K series: up to 250°C. 【Features】 ■ Size: 1/4" 1/2" ■ Drive method: Automatic Manual (only ZD-K) KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

The high-purity gas valve series "ZD Series" and "ZD-K Series" (high-temperature replaceable valves) are diaphragm valves that allow for the detachable and replaceable exchange of the seat section and can be used in high-temperature environments. 【Features】 ■ Customers can replace the valve seat themselves! The seat section can be detached and replaced during valve cleaning, allowing for the reuse of the valve. This makes it suitable for applications where valves need to be cleaned or replaced, such as for material containers. *Note: After maintenance, the product warranty will be void. ■ Usable in high-temperature environments! Both the interior through which the fluid flows and the exterior are resistant to high-temperature environments. The "ZD Series" can be used in environments up to 200°C, while the "ZD-K Series" can be used in environments up to 250°C. ■ Improved durability through the adoption of PFA seats By changing from metal seats to PFA seats, durability performance is improved by approximately 16 times.* *Based on our performance comparison data. *Metal seat: 50,000 cycles, ZD-K Series PFA seat: 800,000 cycles. We offer various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

In semiconductor manufacturing, the supply of chemical solutions requires high purity and temperature control. In particular, the degradation of chemicals and contamination by foreign substances can seriously affect product quality. Additionally, usage in high-temperature environments significantly impacts the durability and reliability of valves. The high-temperature diaphragm valves, 'ZD Series' and 'ZD-K Series,' address these challenges and ensure stable chemical supply. 【Application Scenarios】 - Chemical supply lines - Supply to material containers - Use in high-temperature environments 【Benefits of Implementation】 - Improved maintainability through sheet replacement - Stable performance in high-temperature environments - Maintenance of high product purity

This is a technical document summarizing the valves used for each piece of equipment and facility in semiconductor manufacturing plants. It includes examples of our products and the conditions required for valves in various processes, from process equipment such as deposition systems, etching systems, and cleaning systems, to facilities like cylinder cabinets, gas purification systems, liquid supply systems, VMB, exhaust systems, and utility piping. Please feel free to use this as a reference for product selection. [Contents (partial)] ■ Products used in deposition systems (single wafer/batch/vertical) ■ The role of etching systems and the valves used ■ The role of cleaning systems and the valves used ■ Valves used in equipment and systems supporting the deposition process *For more details, please download the PDF or feel free to contact us.