KITZ SCT Corporation Product Lineup

The IVBH series is an L-shaped vacuum valve that incorporates a spiral heater that follows the movement of the bellows, allowing for heating of the valve body and bellows even in the open and closed states. This valve can eliminate cold spots and minimize the adhesion of by-products by heating not only with an external heater but also from within the bellows. #By-product countermeasures The internal and external heaters have separate channels and can be heated to any temperature up to a maximum of 180°C. 【Features】 ■ Capable of maintaining long-term leak performance ■ Reduced generation of particles due to less product drop during movement ■ Achieves high durability of the bellows ■ Connection flanges can accommodate various connections such as "ISO KF" and "JIS VF/VG" ■ Options available include magnetic proximity open/close switches and thermostats *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The "IVBHK" is an L-type vacuum bellows hot valve based on the structure of the "IVBH" series, capable of heating the gas contact section to a maximum temperature of 250°C. In addition to the external heater on the valve, it is also equipped with an internal heater within the bellows, allowing for heating of the valve body and bellows even when the valve is closed or open, thereby eliminating cold spots and preventing the adhesion of by-products. #By-product countermeasures Furthermore, a structure that reduces thermal impact on the air cylinder section and the use of Inconel bellows ensure a durability performance of over 1 million cycles. 【Features】 ■ Achieves 250°C heating of the gas contact section ■ Equipped with an internal heater in the bellows ■ Removable external heater *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The "IVB/IVBL" is an L-shaped vacuum valve that uses SUS304 for the body, ensuring durability and considering cost reduction, just like before. By reducing the number of components to the extreme, it achieves low costs and features a design that allows for easy maintenance. It has high leak performance due to its bellows seal structure. 【Features】 ■ The use of a stainless steel body provides excellent corrosion resistance and compatibility with a wide range of gas types. ■ The adoption of a square body enables cost reduction (IVB). ■ The use of a spherical body achieves high conductance performance (IVBL). ■ High leak performance is ensured by the bellows seal structure. *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

The "IVB_X, VX" series prevents the swirling of particles generated inside the chamber. The main valve and bypass valve are integrated, suppressing rapid pressure fluctuations that occur when exhausting from atmosphere to vacuum or returning from vacuum to atmosphere. Pressure control is achieved through slow exhaust via the bypass valve before the main valve opens and closes. There are two types of bypass valves available: one with fixed flow rate and another with adjustable exhaust speed. This bypass valve is compatible with all "IVB," "IVBL," and "IVBH" series except for the 15A size. 【Features】 ■ The conventional slow exhaust line is integrated with the main valve. ■ Space-saving design. ■ Cost reduction for the exhaust line. ■ Multiple bypass valves can be installed depending on the model. *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

The "BRW Series" is a vacuum flange ball valve that allows for disassembly, cleaning, and replacement of packing. Both manual and automatic valves are available. It uses high-performance, heat-resistant Hyper-Tite PTFE for the ball seat, making it suitable for use at fluid temperatures up to 200°C. The full-bore structure effectively reduces high conductance and the accumulation of by-products, making it suitable for exhaust lines of CVD equipment, among others. #By-product countermeasures 【Features】 ■ The full-bore structure suppresses high conductance and the accumulation of by-products. ■ Suitable for exhaust lines of CVD equipment and similar applications. ■ Uses high-performance, heat-resistant Hyper-Tite PTFE for the ball seat. ■ Usable at fluid temperatures up to 200°C. ■ Allows for disassembly, cleaning, and replacement of packing. *KITZ SCT offers various solutions for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The 『IVBH-C015』 is a digital temperature controller for L-type vacuum bellows seal hot valves. This product can simultaneously heat two channels of heaters: an internal heater and an external heater. The control temperature range is from room temperature to a maximum of 180℃, and the input power supply is compatible with both AC100V and AC200V. 【Main Specifications (Excerpt)】 ■ Control Temperature Range: Room Temperature to Max 180℃ ■ Applicable Temperature Sensor: Type K Thermocouple ■ Applicable Heater Ratings: ・AC100V Internal Heater 400W / External Heater 400W ・AC200V Internal Heater 800W / External Heater 800W ■ Input Power Supply: Compatible with AC100V/200V *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

The "IVWF Series" is a shut-off valve with a simple structure that can be installed in the vacuum exhaust line of semiconductor vacuum equipment. Its simple design features compactness and lightweight, making valve installation easy. The structure of the throttle valve allows for reproducibility of the opening degree through the scale of the micrometer handle, and fine adjustments can be made using a differential screw mechanism. 【Features】 ■ Compact and lightweight ■ Easy valve installation ■ Solves installation space issues with minimal spacing dimensions ■ Can be set to any opening degree with fixed screws ■ Allows for fine adjustments using a differential screw mechanism *KITZ SCT offers various solutions for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The "PCA Series" is a valve capable of opening and closing, slow exhaust, and pressure regulation. The newly developed seat ring mechanism eliminates issues such as twisting and detachment of the O-ring attached to the flapper. Additionally, the flapper seal section is grease-free, making it less likely to contaminate the reaction chamber. By adopting the seat ring mechanism, we have reduced stress on the O-ring and achieved high durability. 【Features】 ■ Capable of opening and closing valves, slow exhaust, and pressure regulation ■ Pressure adjustment possible from low vacuum to high vacuum ■ Utilizes a newly developed seat ring mechanism ■ High durability: 3 million cycles of full open and full close operation ■ Reduction of internal by-products through unique heating ■ Excellent adaptability to processes with high by-product generation *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

The "UXG/LG Series" is a rectangular gate valve developed for partitioning between the reaction chamber and transfer chamber of semiconductor vacuum equipment. The body is made of aluminum and is operated by a double-acting air actuator. The heater-equipped version features not only external heating from a built-in external heater in the fixed body but also has a heater inside the movable valve body, allowing for heating from both the outside and inside, which provides excellent uniform heating performance. 【Features】 ■ Significantly extends maintenance intervals ■ Allows individual temperature settings for internal and external areas ■ Non-sliding structure that minimizes particle generation during valve opening and closing operations ■ Equipped with a latch lock mechanism to maintain valve closure ■ Offers various materials for the gate's O-ring, including fluororubber, KALREZ, and Chemraz *KITZ SCT provides various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

We would like to introduce our "Magnetic Proximity Switch for Open/Close Indication." The "IVB," "IVBL," and "IVBH" series of air cylinder valves (NC, NO, DA) can be equipped with magnetic proximity switches to detect the open and close states of the valves. We offer a lineup of contactless switch "PE33L3" and contact switch "PD31L3." They have an impact resistance of 294 m/s², with a response time and recovery time of less than 1 ms. 【Lineup】 ■ Contactless Switch "PE33L3" ■ Contact Switch "PD31L3" *KITZ SCT provides various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.

Introducing the APC Butterfly Valve [PCVA Series] equipped with AUTO PID control. This product is an integrated valve and controller type APC butterfly valve, suitable for use in vacuum exhaust lines for semiconductor manufacturing. In semiconductor manufacturing lines, minute fluctuations in temperature and pressure can significantly impact product quality, making high-precision control essential. AUTO PID control offers advantages in high-precision control, rapid response, long-term stability, and resistance to disturbances, contributing to the stabilization of required processes in semiconductor manufacturing. The APC Butterfly Valve [PCVA Series] equipped with AUTO PID control can automatically reach the specified target pressure, contributing to the optimization and efficiency of semiconductor manufacturing processes. Specifically, the following controls are possible: ■ Pressure Control: Automatically adjusts to the specified target pressure. ■ Target Change: Responds to changes in target pressure values during pressure control. ■ Flow Variation: Capable of pressure control for flow rates other than the learned flow rate. ■ Disturbance Impact: Converges to the target pressure even if the flow rate changes during target pressure control. ■ Position Shift Detection: Capable of detecting position shifts due to product adhesion or mechanical issues.

This is a technical document summarizing the valves used for each piece of equipment and facility in semiconductor manufacturing plants. It includes examples of our products and the conditions required for valves in various processes, from process equipment such as deposition systems, etching systems, and cleaning systems, to facilities like cylinder cabinets, gas purification systems, liquid supply systems, VMB, exhaust systems, and utility piping. Please feel free to use this as a reference for product selection. [Contents (partial)] ■ Products used in deposition systems (single wafer/batch/vertical) ■ The role of etching systems and the valves used ■ The role of cleaning systems and the valves used ■ Valves used in equipment and systems supporting the deposition process *For more details, please download the PDF or feel free to contact us.