大阪真空機器製作所 List of Products and Services

We would like to introduce a case study of a "vacuum exhaust system" that uses a large Roots vacuum pump as the main pump to repeatedly evacuate the impregnation tank in a large impregnation device from atmospheric pressure to a vacuum state. In this case study, it was required to evacuate the impregnation tank with a volume of 13m³ from atmospheric pressure to below 10Pa within 7 minutes. When the set vacuum level is reached, the Roots vacuum pump is activated by a vacuum switch installed on the intake side. A relief valve that opens and closes by the weight of the valve body is provided between the intake and exhaust ports, allowing the pump to be activated from the high-pressure side. 【Features】 ■ When the set vacuum level is reached, the Roots vacuum pump is activated by a vacuum switch installed on the intake side. ■ A relief valve that opens and closes by the weight of the valve body is provided between the intake and exhaust ports, allowing the pump to be activated from the high-pressure side. ■ The motor, vacuum switch, and solenoid valve are all explosion-proof specifications. *For more details, please refer to the related links or feel free to contact us.

• Ventilation and Exhaust

This catalog introduces the "vacuum valves and vacuum components" that we handle. We feature a variety of products, including the automatic valve "LCAV series," which opens and closes with compressed air, and the "LV series," which uses all SUS materials. Specifications and dimensional drawings for each product are included, so please take a moment to read through them. [Contents (excerpt)] ■ MAH/PAH series (manual/air-operated/SUS304L/KF, CF, ISO-R flanges) ■ LCV series (manual/SUS304/KF flange) ■ LCAV series (air-operated/SUS304/KF flange) ■ LV series (manual/SUS304/VF flange) ■ LAV series (air-operated/SUS304/VF flange) *For more details, please download the PDF or feel free to contact us.

• Vacuum pump

The "VM70F" is a direct-coupled oil rotary vacuum pump that achieves 200V single-phase operation with a flow rate of 70m³/h. It can be started using the pump's main switch or via D-SUB. It is a product that is strong against condensable gases. It can be installed without the need for cooling water construction. Please feel free to contact us when you need assistance. 【Features】 ■ High exhaust speed with single-phase power ■ Supports remote/local start ■ Continuous gas ballast ■ Air-cooled design *For more details, please download the PDF or feel free to contact us.

• Vacuum pump

The "UD Series" is a direct-coupled oil rotary vacuum pump that prevents oil backflow into the vacuum system when the pump stops. It can be adjusted according to the amount of condensable gases (such as water vapor) being discharged. By minimizing mechanical components, it enables easy and precise maintenance and repairs. 【Features】 ■ Gas ballast valve ■ Check valves installed at both the intake and exhaust ports ■ Special heat treatment for the rotor and stator ■ Completely integrated cylinder structure with pin jointing ■ Forced oil circulation system *For more details, please download the PDF or feel free to contact us.

• Vacuum pump

We would like to introduce the successful integration of our turbo molecular pump into the ion plating system "CatArc 3036" by Vergason Technology, based in New York, USA. This device is suitable for coating applications in various fields, including automotive, decorative, medical, machinery and cutting tools, sports equipment, and many special applications. Our high-flow specification, lightweight, and inverted mounting-capable model "TGkine3800M-B" has been adopted. We offer not only individual sales of vacuum pumps and vacuum components from high vacuum to low vacuum but also the option to propose them integrated into vacuum systems. 【Case Overview】 ■ Adoption: Vergason Technology's ion plating system "CatArc 3036" ■ Adopted Product: Turbo molecular pump "TGkine3800M-B" ■ Product Features: High-flow specification, lightweight, and inverted mounting capability *For more details, please refer to the related links or feel free to contact us.

• Turbo Pump

This document introduces the "Mechanical Booster Exhaust System." It explains how it can be used in combination with vacuum pumps that can compress to atmospheric pressure, as well as with various auxiliary pumps to provide an appropriate vacuum environment. Additionally, the products include features, applicable industries, and system diagrams. Related products are also introduced with photos, so please take a look. [Featured Products] ■ PRM/SR Series ■ PRL Series ■ PRD Series *For more details, please download the PDF or feel free to contact us.

• Ventilation and Exhaust

We would like to introduce a case where a "high vacuum exhaust system for X-ray measurement experiment vacuum containers" was delivered to the Kansai Quantum Science Research Institute (Kizugawa). This exhaust unit consists of a 300 L/s class magnetic bearing turbo molecular pump TG390M, which can be directly attached to the vacuum container, a combined vacuum gauge featuring a Pirani type and a cold cathode ionization vacuum gauge, along with a cart that holds the controllers and auxiliary pumps. The turbo molecular pump attached to the vacuum container is of the magnetic bearing type, allowing for maintenance-free, oil-free operation with extremely low vibration exhaust. Additionally, the inlet flange uses a Conflat type with a copper gasket, which reduces the permeation of light gases from the gasket and the release of exhaust gases, while also enabling high-temperature baking. 【Case Overview】 ■ Delivery Destination: National Research and Development Agency, Quantum Science and Technology Research Development Organization, Kansai Quantum Science Research Institute (Kizugawa) ■ Delivered Product: High vacuum exhaust system for X-ray measurement experiment vacuum containers *For more details, please refer to the PDF document or feel free to contact us.

• Ventilation and Exhaust

We would like to introduce a case where a "liquid-sealed vacuum pump with a sealed liquid circulation system (closed cycle)" was delivered to a vacuum distillation process for recovering organic solvents in a high-performance film manufacturing plant. Raising the temperature of organic solvents can lead to degradation, but in vacuum distillation, it is possible to evaporate and recover organic solvents without increasing the temperature by reducing the pressure. Additionally, to prevent contamination of the recovered organic solvents, the parts in contact with the liquid in this pump and the closed cycle liquid circulation supply system are made of stainless steel, and the sealing materials are fluororubber or PTFE. 【Case Overview】 ■ Delivery Location: Polyolefin High-Performance Film Manufacturing Plant ■ Delivered Product: Liquid-sealed vacuum pump with a sealed liquid circulation system (closed cycle) *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum pump

We offer not only individual sales of vacuum pumps and vacuum components ranging from high vacuum to low vacuum, but also proposals for integrated vacuum systems. We also provide "vacuum exhaust systems for fine chemical plants," proposing combinations tailored to applications and efficient processes from a wide range of lineups. We support the resolution of various issues related to vacuum. 【Features】 ■ Proposals for vacuum products tailored to applications ■ Capable of addressing energy-saving needs, initial cost reduction, and compactness ■ Targeting a wide range of industries including chemicals, pharmaceuticals, machinery, steel, gas, food, and heavy electrical, we propose vacuum systems tailored to the site after hearing your consultation details ■ A global support network has also been established for rapid response to regulations ★ You can view materials summarizing our lineup and applications of vacuum pumps and vacuum systems from the download link below. Please feel free to contact us.

• Ventilation and Exhaust

This catalog features a wide range of vacuum products, from low vacuum to ultra-high vacuum. We introduce many products categorized by application, including the belt-driven oil rotary vacuum pump "P Series," the magnetic bearing compound molecular pump "TG-M Series," and the compact dry vacuum pump "DSP Series." Please make use of this for selecting products. 【Featured Products (Excerpt)】 ■ Turbo molecular pumps ■ Turbo molecular pump vacuum systems ■ Oil diffusion vacuum pumps ■ Mechanical booster pumps (Roots vacuum pumps) ■ Mechanical booster exhaust systems *For more details, please refer to the PDF materials or feel free to contact us.

• Vacuum pump

We would like to introduce a case where we delivered a magnetron sputtering device to the Osaka Institute of Industrial Technology, a local independent administrative institution. The device delivered this time is our "MS-3C100L model," which consists of a sputtering chamber, a load lock chamber (LL chamber), a vacuum exhaust system, a gas introduction system, a power supply system, a substrate temperature control system, and an operation and control system composed of a PC and control device. The sputtering chamber is equipped with three cathodes for attaching targets, and it is possible to apply RF or DC voltage to each cathode, or to superimpose the voltages. [Case Overview] ■ Delivery Destination: Osaka Institute of Industrial Technology, a local independent administrative institution ■ Delivered Product: MS-3C100L model *For more details, please refer to the PDF document or feel free to contact us.

• Sputtering Equipment
• Vacuum Equipment

This time, in conjunction with the establishment of new equipment with increased manufacturing capacity, a larger vacuum exhaust system with a higher exhaust speed was necessary to evacuate the enlarged reaction vessel. Therefore, we manufactured and delivered a vacuum exhaust system. Since it is used in the adhesive manufacturing process, we considered the possibility of adhesive materials sticking and stopping the pump. To ensure that vacuum evacuation can continue even if one system stops due to sticking, it is configured with two parallel exhaust systems. The main exhaust system "PRD25-60" is a combination of a Roots vacuum pump (mechanical booster pump) "RD2500" and a screw-type dry vacuum pump. The gas contact section is oil-free, eliminating the need for frequent oil changes due to oil contamination from the intake gas. The auxiliary exhaust system "PRM25-45" combines a Roots vacuum pump (mechanical booster pump) "RD2500" with an economical oil rotary vacuum pump "P450," which is relatively resistant to adhesive material sticking. Additionally, since the installation site is a hazardous materials manufacturing facility, the motor is designed to be explosion-proof and pressure-resistant. *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum pump
• Ventilation and Exhaust

The exhaust unit delivered for the leak test of automotive parts this time features the grease-lubricated ball bearing turbo molecular pump "TG350F" as the main pump, with a direct-coupled oil rotary vacuum pump as the auxiliary pump. It connects to the vacuum chamber via a 100mm diameter angle valve installed on the intake port of the turbo molecular pump through a short pipe. Both the turbo molecular pump and the oil rotary vacuum pump are mounted on a cart with wheels. Additionally, since both the main and auxiliary pumps are air-cooled, the exhaust unit can operate solely on AC100V input. With the touch panel controller mounted on the cart, it is possible to perform automatic operation of the entire system, including the operation of the vacuum gauge and slow leak valve, as well as manual operation of various components. The grease-lubricated ball bearing turbo molecular pump TG350F is resistant to external vibrations, allowing it to maintain rated operation while the cart is being moved. This simple yet highly reliable exhaust unit supports the manufacturing of automotive parts. *For more details, please refer to the PDF document or feel free to contact us.*

• Vacuum pump
• Ventilation and Exhaust

The "VSV Series" is a single-stage rotary vane type oil rotary vacuum pump. With a simple and robust design, it is suitable for repeated exhaust from atmospheric pressure to vacuum. Compared to oscillating piston types (Kinney type) and cam types (Senko type), it features a lightweight, compact, and low-vibration structure. Additionally, all models are air-cooled, requiring no cooling water, making them energy-efficient and low-cost, while eliminating the need for piping work. 【Features】 ■ All models are air-cooled ■ Lightweight, compact, and low vibration ■ Standard equipped with an oil filter ■ Gas ballast valve (two/three-stage adjustment) ■ Standard equipped with an oil mist trap element *For more details, please refer to the PDF materials or feel free to contact us.

• Vacuum pump

To provide vacuum systems that meet the demands of various fields such as cutting-edge production processes, analysis, and R&D, we are working on the advanced utilization and stable operation of existing technologies in addition to developing new technologies, further striving to improve equipment operation. At this year's vacuum exhibition, we will introduce a rich lineup of products that assist in creating vacuum environments, including our new products: the magnetic bearing turbo molecular pump TGkine-R series and the direct-coupled oil-sealed rotary vacuum pump VSV series (single-stage). - Controller and power supply integrated magnetic bearing turbo molecular pump: TGkine-B series - Magnetic bearing turbo molecular pump: TGkine-R series [New Product] - Magnetic bearing turbo molecular pump: TG-M series - Flexible posture turbo molecular pump: TG-F series - Dry vacuum pumps: DSP series, ER series, FR series - Direct-coupled oil-sealed rotary vacuum pumps: VRD series, VSV series [New Product] - Turbo molecular pump exhaust systems: ST series - etc. For more details, please download the PDF or contact us.

• Turbo Pump

The "VRD Series" is a two-stage direct-coupled oil rotary vacuum pump suitable for the refrigeration equipment industry, medical equipment, and pharmaceutical industries. We offer a wide range of products with exhaust speeds from 4 to 65 m³/h, along with optional items, providing high-quality products at attractive prices. The equipped two-stage adjustable gas ballast valve can be adjusted according to the amount of condensable gas being exhausted. (VRD-4 and VRD-8 have a single stage) Additionally, we also offer the "VRD-M Series," which is compatible with plasma sterilization. 【Features】 ■ Gas ballast valve (two-stage adjustment) ■ Check valves installed at both the intake and exhaust ports ■ Completely integrated cylinder structure with pin jointing ■ Forced oil circulation system *For more details, please refer to the PDF materials or feel free to contact us.

• Vacuum pump

The "VRD Series" is a two-stage direct-coupled oil rotary vacuum pump suitable for general industry, medical devices, and pharmaceutical industries. We offer a wide range of products with exhaust speeds from 4 to 65 m³/h, along with optional items, providing high-quality products at attractive prices. The equipped two-stage adjustable gas ballast valve can be adjusted according to the amount of condensable gas being exhausted. (VRD-4 and VRD-8 have a single stage) Additionally, we also offer the "VRD-M Series," which is compatible with plasma sterilization. 【Features】 ■ Gas ballast valve (two-stage adjustment) ■ Check valves installed at both the intake and exhaust ports ■ Completely integrated cylinder structure with pin jointing ■ Forced oil circulation system *For more details, please refer to the PDF materials or feel free to contact us.

• Vacuum pump

At Osaka Vacuum Equipment Manufacturing Co., Ltd., we are responsible for the design and manufacturing of not only turbo molecular pumps but also systems for vacuum equipment in general, including control panels and control sequences. Our approximately 65 years of achievements and experience in vacuum equipment have been recognized, and our reliable turbo molecular pump "TG-F series" has been adopted in the vacuum exhaust systems of accelerators used for particle beam therapy. Additionally, our standard exhaust units, designed similarly to the exhaust units for medical accelerators, the ST series, have also received positive feedback. 【Features (TG-F series)】 ■ Strong against disturbances ■ Compact and lightweight ■ Grease-lubricated ball bearings for long lifespan ■ Highly regarded for reliability in medical settings *For more details, please refer to the PDF materials or feel free to contact us.

• Vacuum pump
• Ventilation and Exhaust

To realize an IoT society, various electronic components and semiconductors are necessary, and an appropriate vacuum environment is essential for their production. Our company is considering how to make vacuum pumps capable of supporting IoT to create that vacuum environment. This time, we will introduce products from our extensive lineup, focusing on vacuum pumps for semiconductors. 【Products】 ■ Controller and power supply integrated / Magnetic bearing turbo molecular pump (reactive product compatible specification): TGkine4200MI ■ Magnetic bearing turbo molecular pump, controller: TGkine3400M-R, TC0331M [New Product] ■ Magnetic bearing compound molecular pump (ultra-low vibration specification): TG420ML ■ Compact dry vacuum pump: DSP251 [New Product], DSP50 ■ Energy-saving dry vacuum pump: ER100D For more details, please download the PDF or contact us. Additionally, Osaka Vacuum will exhibit the above pumps at SEMICON Japan 2019, so please come and visit us.

• Other processing machines
• Analytical Equipment and Devices
• Other pumps

The 'TG397M / TG427M / TG907M / TG1307M' handled by Osaka Vacuum Equipment Manufacturing Co., Ltd. has achieved low power consumption through improvements in the magnetic levitation motor compared to conventional magnetic bearing turbo molecular pumps. Additionally, it is equipped with a memory function that stores operational data, touchdown counts, and other information in the pump body, allowing for data transfer even when the controller is replaced during overhauls. 【Features】 ■ Energy-saving design ■ Ability to retain operational data, touchdown counts, model information, etc., in the main unit *For more details, please refer to the catalog or feel free to contact us.

• Turbo Pump

The TG60F turbo molecular pump with grease-lubricated bearing is a compact size with an integrated controller. Its installation orientation is flexible, allowing for greater freedom in equipment design. It is ideal for applications such as electron gun evacuation, analytical instruments, and research and development. 【Features】 ■ Rapid vent stop capability. ■ Strong structure against atmospheric intrusion. ■ Compliance with safety standards: NRTL/SEMI-S2/CE (only for TG60F-20) *For more details, please contact us or download the catalog to view.

• Other pumps
• Vacuum Equipment
• Vacuum pump

Power Unit and Pump Integrated Turbo Molecular Pump New Product TGkine4200M Released!! We have successfully developed the new product TGkine4200M. It features a large flow rate despite its compact size compared to other products. We plan to showcase the actual unit at the Vacuum Exhibition 2015 scheduled for September, where we will explain the specifications through panels and other materials. We will display the TGkine series (TGkine2200M/3300M/4200M) including the TGkine4200M and introduce it to everyone. For more details, please check our company website. (Link to our company website) We invite you to visit our booth during this opportunity. The compact design also contributes to cost reduction. It is widely adopted in manufacturing industries such as medical devices, semiconductors, and analytical/testing equipment. 【Features】 ■ Cost reduction possible with flexible design! ■ Improved work efficiency by consolidating various access points at the front! ■ Standard IP54 (dustproof and splashproof) compliant, usable even in harsh environments! *For more details, please contact us or download the catalog to view.

• Other pumps

Air-cooled dry vacuum pumps are designed for continuous operation under atmospheric pressure. They can handle water vapor intake and maintain a constant exhaust speed up to the point of reach. They are widely used for applications such as exhaust in load lock chambers and transport chambers, as auxiliary pumps for high vacuum pumps, exhaust for analysis and measurement equipment, and exhaust for accelerators. 【Product Features】 ■ Exhaust speed during open operation: 800 L/min ■ Water vapor handling capacity: 500 g/hr ■ Exhaust speed: 1000 L/min *For more details, please contact us or download the catalog for further information.

• Other pumps
• Vacuum Equipment
• Vacuum pump

Osaka Vacuum was the first in Japan to successfully develop a turbo molecular pump. The magnetic bearing turbo molecular pump features a design that integrates the power unit and the pump, eliminating the need for output cables and separate controllers, thus removing the necessity for cable ducts and controller racks. This eliminates the cumbersome task of cable routing, improving work efficiency and maintainability. Its compact design also contributes to cost reduction. It is widely adopted in manufacturing industries such as medical devices, semiconductors, and analytical/testing equipment. 【Features】 ■ Cost reduction possible with flexible design! ■ Various access points consolidated at the front to improve work efficiency! ■ Standard IP54 (dustproof and splash-proof) compliant, usable even in harsh environments! *For more details, please contact us or download the catalog to view.

• Other pumps

The energy-saving dry vacuum pump ER100D/ER100DC has achieved top-class energy efficiency, compactness, and lightweight design among dry vacuum pumps in the same class. It is energy-efficient, with a power consumption of 400W at the target pressure. It is compact and lightweight, with a footprint of 0.11m² (230×450mm) and a weight of 60kg. It also reduces cooling water and purge gas usage, resulting in lower utility costs. Compliant with international standards, we offer product specifications tailored to various applications. The ER100D is ideal for exhaust in light-load, clean processes, while the ER100DC uses highly corrosion-resistant materials to handle exhaust of corrosive gases. For more details, please contact us or refer to the catalog.

• Vacuum pump

The compact dry vacuum pump is a small, lightweight, and portable type of vacuum pump that is resistant to disturbances. Its compact design makes it convenient for transportation and allows for flexible installation without taking up much space. The bearing life exceeds 20,000 hours, ensuring long-lasting performance. It is widely used in various applications such as SEM, medical devices, analytical instruments, and accelerators. 【Product Features】 ○ Exhaust speeds of 230L/min and 500L/min available ○ Achievable pressure of 0.5Pa ○ Easy to move with a compact design (15-20kg) ○ Completely oil-free with no lubricating oil used ○ Can be used as an auxiliary pump for TMP ● For more features and functions, please refer to the catalog or contact us.

• Other pumps
• Vacuum Equipment
• Vacuum pump

We offer a wide range of classes from small to large. You can choose the optimal pump from the exhaust speed classes of 200L/s to 5500L/s according to your application.

• Other pumps
• Vacuum Equipment
• Vacuum pump

○Flexible Installation Orientation The installation orientation is freely adjustable in 360 degrees, expanding the design flexibility of the equipment! ○Excellent Durability By adopting a unique bearing structure, it is resistant to sudden pressure increases caused by atmospheric entry! ○Rapid Vent Stop The pump can be rapidly stopped using the vent port, similar to an air brake. *Some models may not support this feature. ○Maintenance-Free There is no need for daily maintenance. With regular overhauls, you can use it for a longer period.

• Other pumps
• Vacuum Equipment
• Vacuum pump

It is a compactly designed turbo molecular pump exhaust unit that is easy to carry.

• Other pumps
• Vacuum Equipment
• Vacuum pump

This is a turbo molecular pump exhaust unit. Custom products can be manufactured according to your requests, such as combinations of pumps and the addition of optional equipment!

• Other pumps
• Vacuum Equipment
• Vacuum pump

Increased durability against radiation, enabling operation in harsh environments. Delivered to facilities such as the Japan Proton Accelerator Research Complex (J-PARC)!

• Other pumps
• Vacuum Equipment
• Vacuum pump

In addition to heating with an external heater, effectively utilize the friction heat generated by the suction gas inside the pump to efficiently raise the temperature of the gas contact area. ■ The output of the external heater can be reduced, improving energy-saving effects!! ■ Minimize thermal impact on key components, reducing damage to the pump.

• Other pumps
• Vacuum Equipment
• Vacuum pump

It is ideal for high-performance electron microscopes, fine drawing devices, and analytical instruments.

• Other pumps
• Vacuum Equipment
• Vacuum pump

Ultra-high vacuum magnetic bearing composite molecular pump (high compression type) TG-MU series

• Other pumps
• Vacuum Equipment
• Vacuum pump

We also have the reaction product countermeasure specifications TG2400MI in our lineup.

• Other pumps
• Vacuum Equipment
• Vacuum pump

You can choose from various special specifications according to your application. Specifications for reaction byproduct measures, ultra-low vibration, ultra-high vacuum, radiation resistance, and high-temperature resistance.

• Other pumps
• Vacuum Equipment
• Vacuum pump

You can choose from various special specifications according to your application: reaction product countermeasure specification, ultra-low vibration specification, ultra-high vacuum specification, radiation-resistant specification, and high-temperature resistant specification.

• Other pumps
• Vacuum Equipment
• Vacuum pump

You can choose from various special specifications according to your application. Specifications for reaction products, ultra-low vibration, ultra-high vacuum, radiation resistance, and high-temperature resistance.

• Other pumps
• Vacuum Equipment
• Vacuum pump

You can choose from various special specifications according to your application. Specifications for reaction products, ultra-low vibration, ultra-high vacuum, radiation resistance, and high-temperature resistance.

• Other pumps
• Vacuum Equipment
• Vacuum pump

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation. It has a structural design that is resistant to atmospheric intrusion.

• Other pumps
• Vacuum Equipment
• Vacuum pump

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation. It has a robust structural design that is resistant to atmospheric entry.

• Other pumps
• Vacuum Equipment
• Vacuum pump

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation. It has a structural design that is resistant to atmospheric intrusion.

• Other pumps
• Vacuum Equipment
• Vacuum pump

Since it is a grease-lubricated bearing type turbo molecular pump, it can be installed in any orientation. It has a structural design that is resistant to atmospheric intrusion.

• Other pumps
• Vacuum Equipment
• Vacuum pump

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation. It has a robust structural design that is resistant to atmospheric intrusion.

• Other pumps
• Vacuum Equipment
• Vacuum pump

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation. It has a robust structural design that is resistant to atmospheric intrusion.

• Other pumps
• Vacuum Equipment
• Vacuum pump