◆nanoPVD-T15A◆ High-performance organic and metal film deposition device
Ideal for organic thin film deposition applications such as OLED, OPV, and OTFT. Utilizes low-temperature organic deposition sources with excellent temperature responsiveness/stability and high-temperature deposition sources for metal films.
A fully automated R&D vacuum deposition system with easy touch panel operation, excellent operability, and maintainability. An intuitive HMI that allows anyone to operate without complicated procedures. Connects to a PC via USB cable for log saving and creating and storing automatic deposition recipes.
◉ Compact size: 804(W) x 530(D) x 600(H)mm
◉ Weight: 40kg to 70kg (depending on equipment configuration)
◉ Excellent basic performance
- Achievable vacuum level: 5x10-5 Pascal
- Equipped with a high-performance turbo molecular pump
- Φ2 inch or Φ4 inch substrates
◉ Deposition sources
- Resistance heating deposition source TE x up to 2 units
- Organic deposition source LTE x up to 4 units (if mixed with resistance heating TE, up to 2 units)
◉ 7" touch panel
◉ Continuous deposition
- Automatic control of deposition programs
- 30 types of registered recipes
- High-precision wide-range vacuum gauge
◉ Abundant options
- Substrate rotation
- Up and down lift with 300mm stroke
- Substrate shutter
- Dry pump (RP standard)

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