It is suitable for transporting wafers with warping or those that leak with a suction chuck.
It is suitable for transporting wafers with warping and those that leak with a suction chuck. This is a chuck for transporting wafers that can make contact with the back surface of the outer circumference and the edge. It utilizes a tapered guide to hold the wafer within a certain range by its own weight. Transporting wafers with contact restrictions from the outer circumference at an affordable price. By adding an optional substrate presence sensor, it allows for confirmation of the presence of the wafer (when used in the atmosphere).
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basic information
Material: Ceramics, Aluminum, CFRP Surface Treatment: Conductive Teflon Coating
Price range
Delivery Time
Applications/Examples of results
Semiconductor manufacturing equipment, etc.
Company information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."
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