Low-temperature process, high refractive index control, high-speed reactive film formation, dense and flat film.
The "AFTEX-9000 series" is a device capable of achieving high-quality nano thin film formation at low temperatures and with low damage. It supports substrate sizes of up to 8 inches and can accommodate up to three ECR plasma sources, significantly improving productivity by operating them simultaneously. Please use our equipment for nano thin film formation. 【Features】 ■ A fully automated C to C single wafer system with a multi-chamber design that can connect up to three ECR deposition modules for 8-inch substrates. ■ Achieves high productivity with simultaneous deposition using three ECR plasmas. ■ Allows for the setting of transport flow, deposition chamber, and deposition process through recipes, enabling fully automated deposition of multilayer films with any material. ■ Excellent uniformity is achieved through substrate tilt rotation and low-pressure deposition. ■ An in-device spectroscopic system (optional) enables measurement of film thickness, refractive index dispersion, etc. ■ Directly reacts raw material particles from solid sources with a highly active ECR plasma flow, eliminating the need for expensive exhaust treatment equipment and being environmentally friendly. *For more details, please refer to the catalog or feel free to contact us.
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basic information
【Lineup】 ■AFTEX-9600L ■AFTEX-9800 *For more details, please refer to the catalog or feel free to contact us.
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Applications/Examples of results
【Applications】 ■Coating for semiconductor laser end faces ■Protective film for SAW filters, etc. *For more details, please refer to the catalog or feel free to contact us.
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Company information
JSW Afti Corporation has been developing based on ECR plasma deposition technology within the NTT Group since its establishment. It started as part of the Mitsui Engineering & Shipbuilding Group in September 2007, when the semiconductor and flat panel manufacturing equipment businesses of the group companies were integrated into our company. In April 2014, we began anew as part of the Japan Steel Works Group, consistently handling everything from development to manufacturing, sales, and after-sales service, contributing even more to the value creation for our customers. We will not only unleash the potential of the technological resources we have developed and accumulated so far but also focus on their improvement and the development of new technologies, striving through these efforts to realize a prosperous future for our customers, ourselves, and society.