Versatile MFC that contributes to cost reduction.
The Aera Transformer digital mass flow controllers (MFC) and digital mass flow meters (MFM), suitable for various applications such as CVD, PVD, diffusion, and etching, contribute to your process improvements by achieving excellent flexibility and efficiency, thereby enhancing yield, increasing productivity, and reducing costs. Equipped with new sensor and valve technologies, proven core components in the field, and high-speed digital circuits, they enable precise gas flow control. They boast outstanding reliability, exceptional responsiveness, accuracy, and reproducibility, and offer a versatile range of single gas and multi-gas, multi-range MFCs tailored to the values and functions prioritized by our customers.
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basic information
Features - Multi-gas, multi-range - High-speed response - 100% metal seal, high purity design - Field programmable * - Various gas selections possible without recalibration * - Compatible with DeviceNet, RS-485, and analog control - Diverse warning and diagnostic functions - RoHS compliant * Only applicable to multi-gas, multi-range Transformer MFC.
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Applications/Examples of results
In the markets for semiconductors, FPD, data storage devices, industrial vacuum equipment, industrial coatings, etc., applications using non-corrosive gases, including CVD, PVD, etching, ion implantation, sputtering, thermal oxidation films, optical glass coatings, optical fibers, surface treatment, and other coating processes are included.
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Company information
Thank you for your continued support. Since our establishment as Tokiko Pressure Gauge Co., Ltd. in 1964 through a joint investment by Tokiko Co., Ltd. (now Hitachi Automotive Systems, Ltd.) and Nagano Keiki Co., Ltd., we have continuously grown across a wide range of fields, including general industrial equipment, railway vehicles, office supplies, home appliances, medical devices, and infrastructure-related industries, and we have celebrated our 50th anniversary thanks to your support. In 2015, while centering on the products of Hitachi Automotive Systems, Ltd. and Nagano Keiki Co., Ltd., we transformed into Hitachi Automotive Systems & Nagano Co., Ltd. as a member of the Hitachi Group, aiming to create a safe, secure, and comfortable living environment and to challenge all industries, products, and services. Moving forward, in addition to our core products, we will strive to be a trusted comprehensive distribution company by expanding our trading company functions and enhancing our engineering capabilities, and we will work hard to propose systems that meet your satisfaction. We kindly ask for your continued strict guidance and warm support.