Achieving safe reduction and cleaning of metal oxide films! Plasma treatment device using water vapor.
The "Aqua Plasma Cleaner" is a plasma treatment device that primarily uses water vapor. It can safely and efficiently perform surface treatments such as the reduction of metal oxide films, cleaning of organic contaminants, photoresist ashing, and hydrophilization. It can be applied to the reduction, modification, and cleaning of silver and copper electrodes, as well as the reduction of other metal oxides, surface modification of resins, hydrophilization, and ashing. 【Features】 ■ Achieves safe reduction and cleaning of metal oxide films ■ Addition of oxygen enables faster cleaning speeds ■ Built-in automatic control system for water vapor generation and supply ■ Dedicated design reduces installation area to 60% of conventional models ■ Supports multi-stage processing (up to 3 stages) *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Other Features】 - Automatic operation and recipe storage via touch panel control - User level and operation mode switching function - Various interlocks and abnormal detection functions - Standard equipped with a light tower *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■Reduction, modification, and cleaning of silver electrodes ■Reduction, modification, and cleaning of copper electrodes ■Reduction of other metal oxides ■Surface modification, hydrophilization, and ashing of resins *For more details, please refer to the PDF document or feel free to contact us.
Company information
We excel in the technology of thin film formation and processing at the nano to micro level, and we are well-regarded for providing equipment and technology for both research and development applications as well as production purposes. Additionally, we specialize in the optoelectronics field, particularly in light sources (LEDs and semiconductor lasers), which are expected to see market expansion in the future.