Druck pressure sensor for semiconductor applications
Druck
Various high-precision pressure sensors necessary for flow control in semiconductor manufacturing equipment. Customization of modules is also possible.
[We exhibited at SEMICON JAPAN 2021] Thank you to all the customers who visited our booth. [Fluid Control for Semiconductor Manufacturing Equipment] In the semiconductor manufacturing process, precise flow control of process gases is essential. We offer various pressure sensors that perform well under stringent conditions, as well as customizable module functions. [Featured Product] New Product: ADROIT Series, resistant to temperature changes! This pressure sensor is equipped with digital temperature compensation functions suitable for semiconductor manufacturing equipment, air conditioning systems, and automobiles. [Pressure Calibrators and Controllers] For pressure measurement in semiconductor manufacturing equipment, subsystems, pressure testing on inspection lines, and pressure standards for quality assurance. Introducing these into production lines can significantly reduce costs. For more details, please see the link below. *Please note that personal information registered with Ipros may be shared with our authorized distributors, and they may contact you. Thank you for your understanding.
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basic information
**Various Pressure Sensors for Semiconductor Manufacturing Equipment** High precision is required for pressure control of gases used in semiconductor manufacturing equipment. We offer sensors for measuring pressure within subsystems of semiconductor devices, high-precision pressure sensors suitable for mass flow controllers in dry etching, and barometers. ■ADROIT Series: A new product launched this year. An analog pressure sensor equipped with digital temperature compensation. It enables highly accurate pressure sensing even in environments with significant temperature fluctuations. Compatible with VCR fittings. ■UNIK5000: A highly versatile analog pressure sensor. Compatible with VCR fittings. ■TERPS Series: High-performance pressure sensors utilizing top-class silicon piezo technology from our company. Suitable for atmospheric pressure measurement as well. Compatible with VCR fittings. ■DPS5000 Series: Digital pressure sensors. ■Module Function: Modules can be customized according to customer requirements. You can choose from various types of silicon, pressure ranges, temperatures, sizes, and materials. (For more details, please download and refer to the catalog.) *For more information, please contact us or refer to the catalog.*
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Applications/Examples of results
Pressure Sensor Application Examples: Semiconductor Manufacturing Equipment: Dry Etching, CVD, CMP, etc. Subsystems: Mass Flow Controllers, Temperature Regulators, Pressure Measurement: Differential pressure flow measurement using high-precision reference pressure sensors. Other applications include atmospheric pressure measurement. *Various types of pressure sensors and calibrators for measuring and calibrating pressure within equipment are also available. For more details, click the link to 'Druck Pressure Measurement Solutions for Semiconductor Applications' on the page!
Detailed information
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Lineup of pressure sensors for drugs
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Comparison of the operating temperature range and accuracy of ADROIT and our pressure sensors.
catalog（8）
Download All Catalogs![[Druck] Digital Correction Analog Output Pressure Sensor ADROIT 6200](https://image.mono.ipros.com/public/catalog/image/01/249/559623/IPROS02662710074831670980.jpeg?w=120&h=170)
Company information
日本ベーカーヒューズ株式会社＆ベーカーヒューズ・エナジージャパン株式会社 （旧）GEセンシング＆インスペクション・テクノロジーズ株式会社
*When making inquiries, please specify the brand name and product name. * Baker Hughes, a GE company, is an energy technology company that provides solutions to the global energy industry operating in over 120 countries. We aim to create energy that is safer, cleaner, and more efficient for people and the planet. Baker Hughes Japan, the Japanese subsidiary (formerly GE Sensing & Inspection Technologies), offers moisture meters, analyzers, and flow meters under the Panametrics brand, pressure gauges and pressure calibrators under the Druck brand, and high-performance gamma and neutron detectors for radiation monitoring applications under the Reuter-Stokes brand.
