For educational institutions and small facilities! A desktop system that allows for easy operation with a touch panel.
The "Plasma POD Series" is a small and compact tabletop etching and deposition device. It is recommended for those who have limited installation space and are considering the introduction of an etching and deposition device at a low cost. Please feel free to contact us if you have any inquiries. 【Features】 ■ Maximum device size: 80cm x 80cm x 80cm (height) ■ Easy operation with a touch panel * You can download the English version of the catalog. * For more details, please feel free to contact us.
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basic information
【Specifications (Partial)】 ■PECVD Equipment - SiN3 Film Formation - SiO2 Film Formation - Maximum Sample Size: 240mm ■Sputtering Equipment - Metal Film - Organic Film - Maximum Sample Size: 150mm ■Reactive Ion Etching Equipment - Surface Treatment - Failure Analysis - Maximum Sample Size: 200mm *You can download the English version of the catalog. *For more details, please feel free to contact us.
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Applications/Examples of results
【Applications】 ■Reactive Ion Etching (RIE), Plasma Enhanced Chemical Vapor Deposition (PECVD), Sputter Deposition *You can download the English version of the catalog. *For more details, please feel free to contact us.
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Company information
Our company offers etching, film deposition, and cutting equipment utilizing plasma technology, as well as the sale of ICP, RIE, DSE, IBE, IBD, PECVD, HDPCVD, and HDRF F.A.S.T.-ALD equipment, along with customer service related to these devices. Plasma-Therm LLC, headquartered in Florida, USA, was established in 1974. Since its founding, it has been manufacturing and selling semiconductor manufacturing equipment utilizing plasma technology for 48 years. Please feel free to contact us for inquiries. ▼ Group company Corial official website https://corial.plasmatherm.com/en