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  6. Grinding waste liquid concentration recovery treatment system

Grinding waste liquid concentration recovery treatment system

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last updated:Mar 14, 2025

電子技研
電子技研
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If you are struggling with high costs for the industrial waste treatment of slurry and back grinder waste liquid, improve efficiency with electronic engineering's waste liquid treatment systems, ranging from small to large machines!

It is possible to reuse the separated permeate liquid from the equipment that collects abrasive particles from waste liquid according to your requirements. Additionally, the absence of heating, such as from heaters, reduces running costs. Maintenance is also easy, allowing for simple cleaning without burdening maintenance personnel. <Features> ★ It concentrates and reduces the volume of polishing waste liquids, such as slurries for semiconductors and back grinders, from a dilution concentration of 1/10 to 1/100. ★ The liquid that has passed through the membrane can be treated to a level equivalent to neutralized wastewater that can be discharged, municipal water, or primary pure water, depending on your requirements. ★ We offer three types of models based on the volume of waste liquid. ★ There are many options available, including automatic cleaning functions that reduce maintenance frequency and remote monitoring. ★ Its compact design allows for installation in existing factories without needing to choose a specific location. ★ It is possible to reduce running costs primarily through pump operation without heating treatment.

    Other semiconductor manufacturing equipment
研磨廃液

Grinding waste liquid concentration recovery treatment system

研磨廃液 濃縮回収処理システム.png
研磨廃液 濃縮回収処理システム.png

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basic information

Processing volume: 1 to 200 m³/day Waste liquid type: Slurry waste / Wafer polishing waste Effluent discharge treatment: Discharge / City water / Pure water Maintenance: Fully automatic / Manual Remote operation monitoring: Yes / No Concentrated waste liquid: Sludge / High-concentration liquid

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Applications/Examples of results

Recovery and treatment of slurry waste liquid/wafers polishing waste liquid in semiconductor device manufacturing processes.

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Slurry & Back Grinder Waste Liquid Concentration Recovery Treatment System

Slurry & Back Grinder Waste Liquid Concentration Recovery Treatment System

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電子技研

電子技研

Industrial Machinery

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Focusing on plasma and vacuum-related equipment, we respond to a wide variety of needs in various fields, including cleaning equipment and material handling. We also flexibly accept contract manufacturing for OEMs and other products beyond our own. Regarding plasma processing, we conduct joint research and development with other companies and universities in various fields, including electronics and medical applications. We also accept contract processing only. Leveraging our position as a manufacturer in design and other areas, we offer maintenance services for factory equipment, contract maintenance from equipment manufacturers, relocation of existing equipment, and refurbishment of used equipment, providing maintenance for various devices regardless of whether they are our own or from other companies.

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