Plasma processing device (multi-purpose plasma etcher)
This device is a multipurpose single-sheet plasma unit that is effective for etching polyimide-based resins, nitride films, ashing (ash removal) of photoresists, and surface modification, using parallel plate high-frequency plasma. It supports wafer sizes from 50 to 200 mm (2 to 8 inches) and is compatible with BGA, CSP, and other formats. The plasma mode can be switched between DP mode and RIE mode via the operation panel. Additionally, it allows for the retrofitting of a transport unit, making it ideal for experimental and research facilities.
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basic information
This device is a multipurpose single-sheet plasma unit that is effective for etching polyimide-based resins, nitride films, ashing (removal of photoresist), surface modification, etc., using parallel plate high-frequency plasma. It supports wafer sizes from 50 to 200 mm (2 to 8 inches) and is compatible with BGA, CSP, and other formats. The plasma mode can be switched between DP mode and RIE mode via the operation panel. Additionally, it allows for the retrofitting of a transport unit, making it ideal for experimental and research facilities.
Price information
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Applications/Examples of results
Etching of materials such as SiO2, SiN, and Poly-Si (silicon wafers), as well as etching of polyimide-based resins. Ashing of photoresist and surface modification. Improvement of adhesive effects through the removal of inorganic materials from CSP, BGA/CSP substrates, lead frames, etc. Surface modification of plastic packages, hybrid ICs, polymer materials, etc. Enhancement of underfill properties and wire bonding properties through surface modification.
Company information
Our company primarily engages in: 1. Sales and services of new equipment (plasma treatment equipment, wafer transporters (sorters), inspection equipment, etc.) 2. Sales and services of used semiconductor manufacturing equipment 3. Development, manufacturing, and consulting of equipment based on customer needs. Additionally, leveraging our network with companies both domestically and internationally, we accept inquiries regarding our customers' diverse needs, not limited to the semiconductor industry.
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