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  6. Atmospheric pressure plasma treatment device

Atmospheric pressure plasma treatment device

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D・Aiplasma

last updated:May 28, 2026

電子技研
電子技研
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Achieving contamination-free and clean plasma reforming.

<Features> ● Since plasma is generated inside a quartz glass tube, impurities such as particles do not fall onto the treated object, allowing for clean plasma treatment. ● The plasma generation unit has few consumable parts, and with regular maintenance, it can achieve a long lifespan of over 10,000 hours. ● Plasma treatment can be performed at atmospheric pressure, eliminating the need for a vacuum system and reducing capital investment. ● This device is divided into a plasma generation unit and a controller unit, allowing for easy integration of just the plasma generation unit into your existing or new equipment to build an inline system. ● It can perform pinpoint high-speed plasma treatment on targeted areas. ● It comes standard with input/output control functions for customer-side equipment, enabling control of plasma irradiation ON/OFF based on signals from the customer-side equipment.

    Other semiconductor manufacturing equipment
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Atmospheric pressure plasma treatment device

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basic information

Illumination effective width: approximately φ8mm (our standard value)

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Applications/Examples of results

●Surface cleaning / Organic matter removal ●Surface modification (improving adhesion)

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Atmospheric pressure plasma D・Aiplasma

Atmospheric pressure plasma D・Aiplasma

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電子技研

電子技研

Industrial Machinery

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Focusing on plasma and vacuum-related equipment, we respond to a wide variety of needs in various fields, including cleaning equipment and material handling. We also flexibly accept contract manufacturing for OEMs and other products beyond our own. Regarding plasma processing, we conduct joint research and development with other companies and universities in various fields, including electronics and medical applications. We also accept contract processing only. Leveraging our position as a manufacturer in design and other areas, we offer maintenance services for factory equipment, contract maintenance from equipment manufacturers, relocation of existing equipment, and refurbishment of used equipment, providing maintenance for various devices regardless of whether they are our own or from other companies.

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