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  6. Low-temperature DLC film deposition device (multilayer a-C:H, hydrogen-containing Cr system)

Low-temperature DLC film deposition device (multilayer a-C:H, hydrogen-containing Cr system)

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last updated:Mar 20, 2025

Creative Coatings Co., Ltd.
Creative Coatings Co., Ltd.
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Multi-layer film formation enables the improvement of load-bearing capacity for low-temperature DLC (Diamond-like carbon) thin film hard coatings!

High-density and stable high-quality film formation is possible! By performing DLC film formation that is highly hard (wear-resistant), has a low friction coefficient (wear-resistant), is corrosion-resistant, adhesion-resistant, and smooth, we contribute to the longevity of mold parts for semiconductor manufacturing equipment, resin molding molds, sliding parts, and tools. This is not only optimal for reducing customer costs but also for reducing maintenance work hours such as cleaning tasks and improving operations. It is also possible to achieve "strong adhesion, smoothness, and hard low-temperature DLC film formation" for three-dimensional ultra-precise complex-shaped molds and machine parts. In addition to improving hardness and wear resistance, we also accept "peeling treatment and re-coating," contributing to the reduction of product lifecycle costs and material waste, thus reducing environmental impact. ++++++++++++++++++++++++++++++ DLC stands for Diamond-Like Carbon, which refers to a hard thin film coating with good sliding properties that has intermediate characteristics between diamond and graphite. By adjusting the ratio of SP3 (diamond bonds) to SP2 (graphite bonds) and the ratio of H (hydrogen) contained within, as well as by applying multilayer coatings, it is possible to create thin films with various physical properties and characteristics (industrial value).

    Other semiconductor manufacturing equipmentPlasma surface treatment equipmentSurface treatment contract service
低温DLC_構造図a-CH.jpg

Low-temperature DLC film deposition device (multilayer a-C:H, hydrogen-containing Cr system)

低温DLC_構造図a-CH.jpg
低温DLC_構造図a-CH.jpg

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basic information

【Effects】 - Extended lifespan of molds (improved release properties & enhanced wear resistance) - Reduction of mold contamination enables shorter automated operation and cleaning tasks 【Coating Types】 CrN (multilayer), TiN, TiAIN (multilayer) 【Coating Thickness】 Thin film 0.2 to thick film 8μm 【Stress】 20 GPa 【Friction Coefficient】 0.29 to 0.45 【Processing Temperature】 Low temperature 180℃, high temperature 300℃

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Applications/Examples of results

【Applications】  ・Resin molding molds, rubber molding molds  ・High-precision optical lens molding molds  ・Semiconductor mold molds, precision molds, jigs 【Reference Achievements】  It is possible to "form a film without reducing the hardness or quality of the base material for low-temperature treatment," and the base material can be not only metal but also rubber products (such as O-rings). 【Consultation for Film Formation and Test Coating Available】  At Creative Coatings, we accept test coating and sample creation requests. We can listen to your needs and provide optimal DLC structure ratios, coating conditions, and film thickness adjustments and proposals according to the application and material. Please feel free to consult with us first. 【Evaluation Requests】  Various evaluation requests, including tribology tests, are also possible. We can also accept requests for the evaluation of coatings from other companies. Please feel free to consult with us. 【Contract Coating】  We can also accept contract coating from small lots of various types to mass production. Please feel free to consult with us. *Please consult us regarding the effects you want to improve with coating and the coating specifications. We will provide the optimal coating process.

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Model number overview
Low-Temperature DLC Coating Device (Multilayer ta-C, Hydrogen-Free) Improved adhesion compared to conventional ta-C, increased hardness and wear resistance, improved anti-adhesion properties
Low-Temperature DLC Coating Device (Multilayer CrN/TiAIN, Hydrogen-Containing Ti Series) Improved impact resistance through multilayer coating, enhanced load-bearing and impact resistance, high adhesion with no coating delamination, resulting in increased component lifespan

Company information

Creative

Creative Coatings Co., Ltd.

Electronic Components and Semiconductors

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One of the key technologies for achieving carbon neutrality is next-generation batteries, along with nanoscale functional particles with various capabilities, the proliferation of 5G and 6G communication systems and environmentally friendly vehicles, and the advancements in advanced driver-assistance systems (ADAS). There is a growing expectation for our coating technology in various fields of society, including passive components such as MLCCs, which require miniaturization and high reliability, high-quality healthcare through digital transformation (DX), and medical devices advancing with AI and digitalization.

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