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  6. Low-temperature DLC film deposition device (multilayer CrN/TiAIN, hydrogen-containing Ti-based)

Low-temperature DLC film deposition device (multilayer CrN/TiAIN, hydrogen-containing Ti-based)

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last updated:Mar 20, 2025

Creative Coatings Co., Ltd.
Creative Coatings Co., Ltd.
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Multi-layer film formation enables the creation of low-temperature DLC (Diamond-like carbon) thin film hard coatings with improved impact resistance!

High-density and stable high-quality film formation is possible! By performing DLC film formation that is highly hard (wear-resistant), has a low friction coefficient (wear-resistant), is corrosion-resistant, adhesion-resistant, and smooth, we contribute to the longevity of mold parts for semiconductor manufacturing equipment, resin molding molds, sliding parts, and tools. This is not only optimal for customer cost reduction but also for reducing maintenance work hours such as cleaning tasks and improving operations. It is also possible to achieve "strong adhesion, smooth & hard low-temperature DLC film formation" for three-dimensional ultra-precise complex-shaped molds and machine parts. In addition to improving high hardness and wear resistance, we also accept "peeling treatment and re-coating," contributing to the reduction of product lifecycle costs and material waste, thus reducing environmental impact. ++++++++++++++++++++++++++++++ DLC stands for Diamond-Like Carbon, which refers to a hard thin film coating with good sliding properties that possesses intermediate characteristics between diamond and graphite. By adjusting the ratio of SP3 (diamond bonds) to SP2 (graphite bonds) and the ratio of H (hydrogen) contained within, as well as by applying multilayer coatings, it is possible to create thin films with various physical properties and characteristics (industrial value).

    Other semiconductor manufacturing equipmentPlasma surface treatment equipmentSurface treatment contract service
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Low-temperature DLC film deposition device (multilayer CrN/TiAIN, hydrogen-containing Ti-based)

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【Effect】 - Improved load-bearing capacity and impact resistance - Enhanced component lifespan with high adhesion and no film peeling 【Film Type】 CrN/TiAIN multilayer 【Film Thickness】 3 μm 【Stress】 25 GPa 【Friction Coefficient】 0.38 【Processing Temperature】 250℃

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Applications/Examples of results

【Applications】  ・Cold forging molds, plastic molding molds  ・Punches and dies for steel processing 【Reference Achievements】  It is possible to "form a film without reducing the hardness or quality of the base material due to low-temperature treatment," and the base material can be made not only of metal but also of rubber products (such as O-rings). 【Consultation for Film Formation and Test Coating Available】  At Creative Coatings, we accept requests for test coatings and sample creation. We can listen to your needs and provide optimal DLC structure ratios, coating conditions, and film thickness adjustments based on the application and material. Please feel free to consult with us. 【Evaluation Requests】  Various evaluation requests, including tribology tests, are also possible. We can also accept requests for evaluations of coatings from other companies. Please feel free to consult with us. 【Contract Coating】  We can accept contract coating from small lots of various types to mass production. Please feel free to consult with us. *Please consult us about the effects you want to improve with coating and the coating specifications. We will provide the optimal coating process.

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Model number overview
Low-temperature DLC film deposition device (multi-layer ta-C, hydrogen-free) Improved adhesion compared to conventional ta-C, increased hardness and wear resistance, improved anti-adhesion properties
Low-temperature DLC film deposition device (multi-layer a-C:H, hydrogen-containing Cr system) Improved load-bearing capacity due to multi-layer deposition, extended lifespan of molds (improved release properties and wear resistance), reduction of mold contamination allows for shorter automated operations and cleaning tasks

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Low-temperature ALD equipment CVA series

Low-temperature ALD equipment CVA series

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Low-temperature high-frequency excitation DLC film deposition device CVC series

Low-temperature high-frequency excitation DLC film deposition device CVC series

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Company information

Creative

Creative Coatings Co., Ltd.

Electronic Components and Semiconductors

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One of the key technologies for achieving carbon neutrality is next-generation batteries, along with nanoscale functional particles with various capabilities, the proliferation of 5G and 6G communication systems and environmentally friendly vehicles, and the advancements in advanced driver-assistance systems (ADAS). There is a growing expectation for our coating technology in various fields of society, including passive components such as MLCCs, which require miniaturization and high reliability, high-quality healthcare through digital transformation (DX), and medical devices advancing with AI and digitalization.

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